12/31/2011	10:00:23 AM	Main Vac valve closed
12/31/2011	10:00:48 AM	Main Vac valve opened
12/31/2011	10:01:50 AM	Recipe started at 10:01 AM
12/31/2011	10:01:50 AM	Helium valve closed
12/31/2011	10:01:50 AM	H2 valve closed
12/31/2011	10:01:50 AM	BCl3 valve closed
12/31/2011	10:01:50 AM	PH3 valve closed
12/31/2011	10:01:50 AM	SiCl4 pre valve closed
12/31/2011	10:01:50 AM	SiCl4 post valve closed
12/31/2011	10:01:50 AM	Main Vac valve closed
12/31/2011	10:01:50 AM	Bypass valve closed
12/31/2011	10:01:50 AM	Bubbler valve closed
12/31/2011	10:01:50 AM	Helium MFC set to  0.000000
12/31/2011	10:01:50 AM	H2 MFC set to  0.000000
12/31/2011	10:01:50 AM	BCl3 MFC set to  0.000000
12/31/2011	10:01:50 AM	PHl3 MFC set to  0.000000
12/31/2011	10:01:50 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:01:50 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:01:50 AM	Tube furnace set to 0
12/31/2011	10:01:53 AM	Helium valve closed
12/31/2011	10:01:53 AM	BCl3 valve closed
12/31/2011	10:01:53 AM	PH3 valve closed
12/31/2011	10:01:53 AM	SiCl4 pre valve closed
12/31/2011	10:01:53 AM	SiCl4 post valve closed
12/31/2011	10:01:53 AM	Main Vac valve closed
12/31/2011	10:01:53 AM	Bypass valve closed
12/31/2011	10:01:53 AM	Bubbler valve closed
12/31/2011	10:01:53 AM	H2 valve opened
12/31/2011	10:01:53 AM	Helium MFC set to  0.000000
12/31/2011	10:01:53 AM	H2 MFC set to  500.000000
12/31/2011	10:01:53 AM	BCl3 MFC set to  0.000000
12/31/2011	10:01:53 AM	PHl3 MFC set to  0.000000
12/31/2011	10:01:53 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:01:53 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:01:53 AM	Tube furnace set to 50
12/31/2011	10:02:11 AM	Run aborted at 10:02 AM
12/31/2011	10:02:11 AM	Helium valve closed
12/31/2011	10:02:11 AM	H2 valve closed
12/31/2011	10:02:11 AM	BCl3 valve closed
12/31/2011	10:02:11 AM	PH3 valve closed
12/31/2011	10:02:11 AM	SiCl4 pre valve closed
12/31/2011	10:02:11 AM	SiCl4 post valve closed
12/31/2011	10:02:11 AM	Bypass valve closed
12/31/2011	10:02:11 AM	Main Vac valve closed
12/31/2011	10:02:11 AM	Bubbler valve closed
12/31/2011	10:02:11 AM	Helium MFC set to  0.000000
12/31/2011	10:02:11 AM	H2 MFC set to  0.000000
12/31/2011	10:02:11 AM	BCl3 MFC set to  0.000000
12/31/2011	10:02:11 AM	PHl3 MFC set to  0.000000
12/31/2011	10:02:11 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:02:11 AM	Tube furnace set to 0
12/31/2011	10:02:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	10:02:18 AM	Recipe started at 10:02 AM
12/31/2011	10:02:18 AM	Helium valve closed
12/31/2011	10:02:18 AM	H2 valve closed
12/31/2011	10:02:18 AM	BCl3 valve closed
12/31/2011	10:02:18 AM	PH3 valve closed
12/31/2011	10:02:18 AM	SiCl4 pre valve closed
12/31/2011	10:02:18 AM	SiCl4 post valve closed
12/31/2011	10:02:18 AM	Main Vac valve closed
12/31/2011	10:02:18 AM	Bubbler valve closed
12/31/2011	10:02:18 AM	Bypass valve opened
12/31/2011	10:02:18 AM	Helium MFC set to  0.000000
12/31/2011	10:02:18 AM	H2 MFC set to  0.000000
12/31/2011	10:02:18 AM	BCl3 MFC set to  0.000000
12/31/2011	10:02:18 AM	PHl3 MFC set to  0.000000
12/31/2011	10:02:18 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:02:18 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:02:18 AM	Tube furnace set to 0
12/31/2011	10:03:14 AM	Helium valve closed
12/31/2011	10:03:14 AM	H2 valve closed
12/31/2011	10:03:14 AM	BCl3 valve closed
12/31/2011	10:03:14 AM	PH3 valve closed
12/31/2011	10:03:14 AM	SiCl4 pre valve closed
12/31/2011	10:03:14 AM	SiCl4 post valve closed
12/31/2011	10:03:14 AM	Main Vac valve closed
12/31/2011	10:03:14 AM	Bubbler valve closed
12/31/2011	10:03:14 AM	Bypass valve opened
12/31/2011	10:03:14 AM	Helium MFC set to  0.000000
12/31/2011	10:03:14 AM	H2 MFC set to  0.000000
12/31/2011	10:03:14 AM	BCl3 MFC set to  0.000000
12/31/2011	10:03:14 AM	PHl3 MFC set to  0.000000
12/31/2011	10:03:14 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:03:14 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:03:14 AM	Tube furnace set to 0
12/31/2011	10:04:03 AM	Helium valve closed
12/31/2011	10:04:03 AM	H2 valve closed
12/31/2011	10:04:03 AM	BCl3 valve closed
12/31/2011	10:04:03 AM	PH3 valve closed
12/31/2011	10:04:03 AM	SiCl4 pre valve closed
12/31/2011	10:04:03 AM	SiCl4 post valve closed
12/31/2011	10:04:03 AM	Bypass valve closed
12/31/2011	10:04:03 AM	Bubbler valve closed
12/31/2011	10:04:03 AM	Main Vac valve opened
12/31/2011	10:04:03 AM	Helium MFC set to  0.000000
12/31/2011	10:04:03 AM	H2 MFC set to  0.000000
12/31/2011	10:04:03 AM	BCl3 MFC set to  0.000000
12/31/2011	10:04:03 AM	PHl3 MFC set to  0.000000
12/31/2011	10:04:03 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:04:03 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:04:03 AM	Tube furnace set to 0
12/31/2011	10:04:04 AM	Run finished at 10:04 AM
12/31/2011	10:04:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	10:04:44 AM	Recipe started at 10:04 AM
12/31/2011	10:04:44 AM	Helium valve closed
12/31/2011	10:04:44 AM	H2 valve closed
12/31/2011	10:04:44 AM	BCl3 valve closed
12/31/2011	10:04:44 AM	PH3 valve closed
12/31/2011	10:04:44 AM	SiCl4 pre valve closed
12/31/2011	10:04:44 AM	SiCl4 post valve closed
12/31/2011	10:04:44 AM	Main Vac valve closed
12/31/2011	10:04:44 AM	Bypass valve closed
12/31/2011	10:04:44 AM	Bubbler valve closed
12/31/2011	10:04:44 AM	Helium MFC set to  0.000000
12/31/2011	10:04:44 AM	H2 MFC set to  0.000000
12/31/2011	10:04:44 AM	BCl3 MFC set to  0.000000
12/31/2011	10:04:44 AM	PHl3 MFC set to  0.000000
12/31/2011	10:04:44 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:04:44 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:04:45 AM	Tube furnace set to 0
12/31/2011	10:04:48 AM	Helium valve closed
12/31/2011	10:04:48 AM	BCl3 valve closed
12/31/2011	10:04:48 AM	PH3 valve closed
12/31/2011	10:04:48 AM	SiCl4 pre valve closed
12/31/2011	10:04:48 AM	SiCl4 post valve closed
12/31/2011	10:04:48 AM	Main Vac valve closed
12/31/2011	10:04:48 AM	Bypass valve closed
12/31/2011	10:04:48 AM	Bubbler valve closed
12/31/2011	10:04:48 AM	H2 valve opened
12/31/2011	10:04:48 AM	Helium MFC set to  0.000000
12/31/2011	10:04:48 AM	H2 MFC set to  500.000000
12/31/2011	10:04:48 AM	BCl3 MFC set to  0.000000
12/31/2011	10:04:48 AM	PHl3 MFC set to  0.000000
12/31/2011	10:04:48 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:04:48 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:04:48 AM	Tube furnace set to 50
12/31/2011	10:05:58 AM	Helium valve closed
12/31/2011	10:05:58 AM	BCl3 valve closed
12/31/2011	10:05:58 AM	PH3 valve closed
12/31/2011	10:05:58 AM	SiCl4 pre valve closed
12/31/2011	10:05:58 AM	SiCl4 post valve closed
12/31/2011	10:05:58 AM	Main Vac valve closed
12/31/2011	10:05:58 AM	Bypass valve closed
12/31/2011	10:05:58 AM	H2 valve opened
12/31/2011	10:05:58 AM	Bubbler valve opened
12/31/2011	10:05:58 AM	Helium MFC set to  0.000000
12/31/2011	10:05:58 AM	H2 MFC set to  500.000000
12/31/2011	10:05:58 AM	BCl3 MFC set to  0.000000
12/31/2011	10:05:58 AM	PHl3 MFC set to  0.000000
12/31/2011	10:05:58 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:05:58 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:05:58 AM	Tube furnace set to 50
12/31/2011	10:05:59 AM	Helium valve closed
12/31/2011	10:05:59 AM	BCl3 valve closed
12/31/2011	10:06:00 AM	PH3 valve closed
12/31/2011	10:06:00 AM	SiCl4 pre valve closed
12/31/2011	10:06:00 AM	SiCl4 post valve closed
12/31/2011	10:06:00 AM	Main Vac valve closed
12/31/2011	10:06:00 AM	Bypass valve closed
12/31/2011	10:06:00 AM	H2 valve opened
12/31/2011	10:06:00 AM	Bubbler valve opened
12/31/2011	10:06:00 AM	Helium MFC set to  0.000000
12/31/2011	10:06:00 AM	H2 MFC set to  500.000000
12/31/2011	10:06:00 AM	BCl3 MFC set to  0.000000
12/31/2011	10:06:00 AM	PHl3 MFC set to  0.000000
12/31/2011	10:06:00 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:06:00 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:06:00 AM	Tube furnace set to 1000
12/31/2011	10:29:00 AM	Helium valve closed
12/31/2011	10:29:00 AM	PH3 valve closed
12/31/2011	10:29:00 AM	Main Vac valve closed
12/31/2011	10:29:00 AM	Bypass valve closed
12/31/2011	10:29:00 AM	H2 valve opened
12/31/2011	10:29:00 AM	BCl3 valve opened
12/31/2011	10:29:00 AM	SiCl4 pre valve opened
12/31/2011	10:29:00 AM	SiCl4 post valve opened
12/31/2011	10:29:00 AM	Bubbler valve opened
12/31/2011	10:29:00 AM	Helium MFC set to  0.000000
12/31/2011	10:29:00 AM	H2 MFC set to  500.000000
12/31/2011	10:29:00 AM	BCl3 MFC set to  12.000000
12/31/2011	10:29:00 AM	PHl3 MFC set to  0.000000
12/31/2011	10:29:00 AM	SiCl4 MFC set to  50.000000
12/31/2011	10:29:00 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:29:00 AM	Tube furnace set to 1000
12/31/2011	10:39:00 AM	Helium valve closed
12/31/2011	10:39:00 AM	BCl3 valve closed
12/31/2011	10:39:00 AM	PH3 valve closed
12/31/2011	10:39:00 AM	SiCl4 pre valve closed
12/31/2011	10:39:00 AM	SiCl4 post valve closed
12/31/2011	10:39:00 AM	Main Vac valve closed
12/31/2011	10:39:00 AM	Bypass valve closed
12/31/2011	10:39:00 AM	H2 valve opened
12/31/2011	10:39:00 AM	Bubbler valve opened
12/31/2011	10:39:00 AM	Helium MFC set to  0.000000
12/31/2011	10:39:00 AM	H2 MFC set to  480.000000
12/31/2011	10:39:00 AM	BCl3 MFC set to  0.000000
12/31/2011	10:39:00 AM	PHl3 MFC set to  0.000000
12/31/2011	10:39:00 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:39:00 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:39:00 AM	Tube furnace set to 750
12/31/2011	10:48:14 AM	H2 valve closed
12/31/2011	10:48:14 AM	BCl3 valve closed
12/31/2011	10:48:14 AM	PH3 valve closed
12/31/2011	10:48:14 AM	SiCl4 pre valve closed
12/31/2011	10:48:14 AM	SiCl4 post valve closed
12/31/2011	10:48:15 AM	Main Vac valve closed
12/31/2011	10:48:15 AM	Bypass valve closed
12/31/2011	10:48:15 AM	Helium valve opened
12/31/2011	10:48:15 AM	Bubbler valve opened
12/31/2011	10:48:15 AM	Helium MFC set to  400.000000
12/31/2011	10:48:15 AM	H2 MFC set to  0.000000
12/31/2011	10:48:15 AM	BCl3 MFC set to  0.000000
12/31/2011	10:48:15 AM	PHl3 MFC set to  0.000000
12/31/2011	10:48:15 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:48:15 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:48:15 AM	Tube furnace set to 0
12/31/2011	10:52:11 AM	Run aborted at 10:52 AM
12/31/2011	10:52:11 AM	Helium valve closed
12/31/2011	10:52:11 AM	H2 valve closed
12/31/2011	10:52:11 AM	BCl3 valve closed
12/31/2011	10:52:11 AM	PH3 valve closed
12/31/2011	10:52:11 AM	SiCl4 pre valve closed
12/31/2011	10:52:11 AM	SiCl4 post valve closed
12/31/2011	10:52:11 AM	Bypass valve closed
12/31/2011	10:52:11 AM	Main Vac valve closed
12/31/2011	10:52:11 AM	Bubbler valve closed
12/31/2011	10:52:11 AM	Helium MFC set to  0.000000
12/31/2011	10:52:11 AM	H2 MFC set to  0.000000
12/31/2011	10:52:11 AM	BCl3 MFC set to  0.000000
12/31/2011	10:52:11 AM	PHl3 MFC set to  0.000000
12/31/2011	10:52:11 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:52:12 AM	Tube furnace set to 0
12/31/2011	10:52:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/31/2011	10:52:15 AM	Recipe started at 10:52 AM
12/31/2011	10:52:15 AM	Helium valve closed
12/31/2011	10:52:15 AM	H2 valve closed
12/31/2011	10:52:15 AM	BCl3 valve closed
12/31/2011	10:52:15 AM	PH3 valve closed
12/31/2011	10:52:15 AM	SiCl4 pre valve closed
12/31/2011	10:52:15 AM	SiCl4 post valve closed
12/31/2011	10:52:15 AM	Main Vac valve closed
12/31/2011	10:52:15 AM	Bypass valve closed
12/31/2011	10:52:15 AM	Bubbler valve closed
12/31/2011	10:52:15 AM	Helium MFC set to  0.000000
12/31/2011	10:52:15 AM	H2 MFC set to  0.000000
12/31/2011	10:52:15 AM	BCl3 MFC set to  0.000000
12/31/2011	10:52:15 AM	PHl3 MFC set to  0.000000
12/31/2011	10:52:16 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:52:16 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:52:16 AM	Tube furnace set to 0
12/31/2011	10:52:19 AM	H2 valve closed
12/31/2011	10:52:19 AM	BCl3 valve closed
12/31/2011	10:52:19 AM	PH3 valve closed
12/31/2011	10:52:19 AM	SiCl4 pre valve closed
12/31/2011	10:52:19 AM	SiCl4 post valve closed
12/31/2011	10:52:19 AM	Main Vac valve closed
12/31/2011	10:52:19 AM	Bypass valve closed
12/31/2011	10:52:19 AM	Bubbler valve closed
12/31/2011	10:52:19 AM	Helium valve opened
12/31/2011	10:52:19 AM	Helium MFC set to  500.000000
12/31/2011	10:52:19 AM	H2 MFC set to  0.000000
12/31/2011	10:52:19 AM	BCl3 MFC set to  0.000000
12/31/2011	10:52:19 AM	PHl3 MFC set to  0.000000
12/31/2011	10:52:19 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:52:19 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:52:19 AM	Tube furnace set to 0
12/31/2011	10:52:19 AM	Helium valve closed
12/31/2011	10:52:19 AM	H2 valve closed
12/31/2011	10:52:19 AM	BCl3 valve closed
12/31/2011	10:52:19 AM	PH3 valve closed
12/31/2011	10:52:19 AM	SiCl4 pre valve closed
12/31/2011	10:52:19 AM	SiCl4 post valve closed
12/31/2011	10:52:19 AM	Main Vac valve closed
12/31/2011	10:52:19 AM	Bypass valve closed
12/31/2011	10:52:19 AM	Bubbler valve closed
12/31/2011	10:52:19 AM	Helium MFC set to  0.000000
12/31/2011	10:52:19 AM	H2 MFC set to  0.000000
12/31/2011	10:52:19 AM	BCl3 MFC set to  0.000000
12/31/2011	10:52:19 AM	PHl3 MFC set to  0.000000
12/31/2011	10:52:19 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:52:19 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:52:19 AM	Tube furnace set to 0
12/31/2011	10:52:20 AM	Run finished at 10:52 AM
12/31/2011	10:52:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/31/2011	10:56:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	10:56:40 AM	Recipe started at 10:56 AM
12/31/2011	10:56:40 AM	Helium valve closed
12/31/2011	10:56:40 AM	H2 valve closed
12/31/2011	10:56:40 AM	BCl3 valve closed
12/31/2011	10:56:40 AM	PH3 valve closed
12/31/2011	10:56:40 AM	SiCl4 pre valve closed
12/31/2011	10:56:40 AM	SiCl4 post valve closed
12/31/2011	10:56:40 AM	Main Vac valve closed
12/31/2011	10:56:40 AM	Bubbler valve closed
12/31/2011	10:56:40 AM	Bypass valve opened
12/31/2011	10:56:40 AM	Helium MFC set to  0.000000
12/31/2011	10:56:40 AM	H2 MFC set to  0.000000
12/31/2011	10:56:40 AM	BCl3 MFC set to  0.000000
12/31/2011	10:56:40 AM	PHl3 MFC set to  0.000000
12/31/2011	10:56:40 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:56:40 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:56:40 AM	Tube furnace set to 0
12/31/2011	10:58:24 AM	Helium valve closed
12/31/2011	10:58:24 AM	H2 valve closed
12/31/2011	10:58:24 AM	BCl3 valve closed
12/31/2011	10:58:24 AM	PH3 valve closed
12/31/2011	10:58:24 AM	SiCl4 pre valve closed
12/31/2011	10:58:24 AM	SiCl4 post valve closed
12/31/2011	10:58:24 AM	Main Vac valve closed
12/31/2011	10:58:24 AM	Bubbler valve closed
12/31/2011	10:58:24 AM	Bypass valve opened
12/31/2011	10:58:24 AM	Helium MFC set to  0.000000
12/31/2011	10:58:24 AM	H2 MFC set to  0.000000
12/31/2011	10:58:24 AM	BCl3 MFC set to  0.000000
12/31/2011	10:58:24 AM	PHl3 MFC set to  0.000000
12/31/2011	10:58:24 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:58:24 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:58:24 AM	Tube furnace set to 0
12/31/2011	10:59:24 AM	Helium valve closed
12/31/2011	10:59:24 AM	H2 valve closed
12/31/2011	10:59:24 AM	BCl3 valve closed
12/31/2011	10:59:24 AM	PH3 valve closed
12/31/2011	10:59:24 AM	SiCl4 pre valve closed
12/31/2011	10:59:24 AM	SiCl4 post valve closed
12/31/2011	10:59:24 AM	Bypass valve closed
12/31/2011	10:59:24 AM	Bubbler valve closed
12/31/2011	10:59:24 AM	Main Vac valve opened
12/31/2011	10:59:24 AM	Helium MFC set to  0.000000
12/31/2011	10:59:24 AM	H2 MFC set to  0.000000
12/31/2011	10:59:24 AM	BCl3 MFC set to  0.000000
12/31/2011	10:59:24 AM	PHl3 MFC set to  0.000000
12/31/2011	10:59:24 AM	SiCl4 MFC set to  0.000000
12/31/2011	10:59:24 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	10:59:24 AM	Tube furnace set to 0
12/31/2011	10:59:25 AM	Run finished at 10:59 AM
12/31/2011	10:59:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	11:02:29 AM	Recipe started at 11:02 AM
12/31/2011	11:02:29 AM	Helium valve closed
12/31/2011	11:02:29 AM	H2 valve closed
12/31/2011	11:02:29 AM	BCl3 valve closed
12/31/2011	11:02:29 AM	PH3 valve closed
12/31/2011	11:02:29 AM	SiCl4 pre valve closed
12/31/2011	11:02:29 AM	SiCl4 post valve closed
12/31/2011	11:02:29 AM	Main Vac valve closed
12/31/2011	11:02:29 AM	Bubbler valve closed
12/31/2011	11:02:29 AM	Bypass valve opened
12/31/2011	11:02:30 AM	Helium MFC set to  0.000000
12/31/2011	11:02:30 AM	H2 MFC set to  0.000000
12/31/2011	11:02:30 AM	BCl3 MFC set to  0.000000
12/31/2011	11:02:30 AM	PHl3 MFC set to  0.000000
12/31/2011	11:02:30 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:02:30 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:02:30 AM	Tube furnace set to 180
12/31/2011	11:02:30 AM	Helium valve closed
12/31/2011	11:02:30 AM	H2 valve closed
12/31/2011	11:02:30 AM	BCl3 valve closed
12/31/2011	11:02:30 AM	PH3 valve closed
12/31/2011	11:02:30 AM	SiCl4 pre valve closed
12/31/2011	11:02:30 AM	SiCl4 post valve closed
12/31/2011	11:02:30 AM	Main Vac valve closed
12/31/2011	11:02:30 AM	Bubbler valve closed
12/31/2011	11:02:30 AM	Bypass valve opened
12/31/2011	11:02:30 AM	Helium MFC set to  0.000000
12/31/2011	11:02:30 AM	H2 MFC set to  0.000000
12/31/2011	11:02:30 AM	BCl3 MFC set to  0.000000
12/31/2011	11:02:30 AM	PHl3 MFC set to  0.000000
12/31/2011	11:02:30 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:02:30 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:02:31 AM	Tube furnace set to 150
12/31/2011	11:03:01 AM	Helium valve closed
12/31/2011	11:03:01 AM	H2 valve closed
12/31/2011	11:03:01 AM	BCl3 valve closed
12/31/2011	11:03:01 AM	PH3 valve closed
12/31/2011	11:03:01 AM	SiCl4 pre valve closed
12/31/2011	11:03:01 AM	SiCl4 post valve closed
12/31/2011	11:03:01 AM	Bypass valve closed
12/31/2011	11:03:01 AM	Bubbler valve closed
12/31/2011	11:03:01 AM	Main Vac valve opened
12/31/2011	11:03:01 AM	Helium MFC set to  0.000000
12/31/2011	11:03:01 AM	H2 MFC set to  0.000000
12/31/2011	11:03:01 AM	BCl3 MFC set to  0.000000
12/31/2011	11:03:01 AM	PHl3 MFC set to  0.000000
12/31/2011	11:03:01 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:03:01 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:03:01 AM	Tube furnace set to 180
12/31/2011	11:03:31 AM	H2 valve closed
12/31/2011	11:03:31 AM	BCl3 valve closed
12/31/2011	11:03:31 AM	PH3 valve closed
12/31/2011	11:03:31 AM	SiCl4 pre valve closed
12/31/2011	11:03:31 AM	SiCl4 post valve closed
12/31/2011	11:03:31 AM	Bypass valve closed
12/31/2011	11:03:31 AM	Bubbler valve closed
12/31/2011	11:03:31 AM	Helium valve opened
12/31/2011	11:03:31 AM	Main Vac valve opened
12/31/2011	11:03:31 AM	Helium MFC set to  20.000000
12/31/2011	11:03:31 AM	H2 MFC set to  0.000000
12/31/2011	11:03:31 AM	BCl3 MFC set to  0.000000
12/31/2011	11:03:31 AM	PHl3 MFC set to  0.000000
12/31/2011	11:03:31 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:03:31 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:03:31 AM	Tube furnace set to 180
12/31/2011	11:04:01 AM	Helium valve closed
12/31/2011	11:04:01 AM	H2 valve closed
12/31/2011	11:04:01 AM	BCl3 valve closed
12/31/2011	11:04:01 AM	PH3 valve closed
12/31/2011	11:04:01 AM	SiCl4 pre valve closed
12/31/2011	11:04:01 AM	SiCl4 post valve closed
12/31/2011	11:04:01 AM	Bypass valve closed
12/31/2011	11:04:01 AM	Bubbler valve closed
12/31/2011	11:04:01 AM	Main Vac valve opened
12/31/2011	11:04:01 AM	Helium MFC set to  0.000000
12/31/2011	11:04:01 AM	H2 MFC set to  0.000000
12/31/2011	11:04:01 AM	BCl3 MFC set to  0.000000
12/31/2011	11:04:01 AM	PHl3 MFC set to  0.000000
12/31/2011	11:04:01 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:04:01 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:04:01 AM	Tube furnace set to 150
12/31/2011	11:04:31 AM	H2 valve closed
12/31/2011	11:04:31 AM	BCl3 valve closed
12/31/2011	11:04:31 AM	PH3 valve closed
12/31/2011	11:04:31 AM	SiCl4 pre valve closed
12/31/2011	11:04:31 AM	SiCl4 post valve closed
12/31/2011	11:04:31 AM	Bypass valve closed
12/31/2011	11:04:31 AM	Bubbler valve closed
12/31/2011	11:04:31 AM	Helium valve opened
12/31/2011	11:04:31 AM	Main Vac valve opened
12/31/2011	11:04:31 AM	Helium MFC set to  20.000000
12/31/2011	11:04:31 AM	H2 MFC set to  0.000000
12/31/2011	11:04:31 AM	BCl3 MFC set to  0.000000
12/31/2011	11:04:31 AM	PHl3 MFC set to  0.000000
12/31/2011	11:04:31 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:04:31 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:04:31 AM	Tube furnace set to 180
12/31/2011	11:05:01 AM	Helium valve closed
12/31/2011	11:05:01 AM	H2 valve closed
12/31/2011	11:05:01 AM	BCl3 valve closed
12/31/2011	11:05:01 AM	PH3 valve closed
12/31/2011	11:05:01 AM	SiCl4 pre valve closed
12/31/2011	11:05:01 AM	SiCl4 post valve closed
12/31/2011	11:05:01 AM	Bypass valve closed
12/31/2011	11:05:01 AM	Bubbler valve closed
12/31/2011	11:05:01 AM	Main Vac valve opened
12/31/2011	11:05:01 AM	Helium MFC set to  0.000000
12/31/2011	11:05:01 AM	H2 MFC set to  0.000000
12/31/2011	11:05:01 AM	BCl3 MFC set to  0.000000
12/31/2011	11:05:01 AM	PHl3 MFC set to  0.000000
12/31/2011	11:05:01 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:05:01 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:05:02 AM	Tube furnace set to 150
12/31/2011	11:05:32 AM	H2 valve closed
12/31/2011	11:05:32 AM	BCl3 valve closed
12/31/2011	11:05:32 AM	PH3 valve closed
12/31/2011	11:05:32 AM	SiCl4 pre valve closed
12/31/2011	11:05:32 AM	SiCl4 post valve closed
12/31/2011	11:05:32 AM	Bypass valve closed
12/31/2011	11:05:32 AM	Bubbler valve closed
12/31/2011	11:05:32 AM	Helium valve opened
12/31/2011	11:05:32 AM	Main Vac valve opened
12/31/2011	11:05:32 AM	Helium MFC set to  20.000000
12/31/2011	11:05:32 AM	H2 MFC set to  0.000000
12/31/2011	11:05:32 AM	BCl3 MFC set to  0.000000
12/31/2011	11:05:32 AM	PHl3 MFC set to  0.000000
12/31/2011	11:05:32 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:05:32 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:05:32 AM	Tube furnace set to 150
12/31/2011	11:06:02 AM	Helium valve closed
12/31/2011	11:06:02 AM	H2 valve closed
12/31/2011	11:06:02 AM	BCl3 valve closed
12/31/2011	11:06:02 AM	PH3 valve closed
12/31/2011	11:06:02 AM	SiCl4 pre valve closed
12/31/2011	11:06:02 AM	SiCl4 post valve closed
12/31/2011	11:06:02 AM	Bypass valve closed
12/31/2011	11:06:02 AM	Bubbler valve closed
12/31/2011	11:06:02 AM	Main Vac valve opened
12/31/2011	11:06:02 AM	Helium MFC set to  0.000000
12/31/2011	11:06:02 AM	H2 MFC set to  0.000000
12/31/2011	11:06:02 AM	BCl3 MFC set to  0.000000
12/31/2011	11:06:02 AM	PHl3 MFC set to  0.000000
12/31/2011	11:06:02 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:06:02 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:06:02 AM	Tube furnace set to 150
12/31/2011	11:06:32 AM	H2 valve closed
12/31/2011	11:06:32 AM	BCl3 valve closed
12/31/2011	11:06:32 AM	PH3 valve closed
12/31/2011	11:06:32 AM	SiCl4 pre valve closed
12/31/2011	11:06:32 AM	SiCl4 post valve closed
12/31/2011	11:06:32 AM	Bypass valve closed
12/31/2011	11:06:32 AM	Bubbler valve closed
12/31/2011	11:06:32 AM	Helium valve opened
12/31/2011	11:06:32 AM	Main Vac valve opened
12/31/2011	11:06:32 AM	Helium MFC set to  20.000000
12/31/2011	11:06:32 AM	H2 MFC set to  0.000000
12/31/2011	11:06:32 AM	BCl3 MFC set to  0.000000
12/31/2011	11:06:32 AM	PHl3 MFC set to  0.000000
12/31/2011	11:06:32 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:06:32 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:06:32 AM	Tube furnace set to 180
12/31/2011	11:07:02 AM	Helium valve closed
12/31/2011	11:07:02 AM	H2 valve closed
12/31/2011	11:07:02 AM	BCl3 valve closed
12/31/2011	11:07:02 AM	PH3 valve closed
12/31/2011	11:07:02 AM	SiCl4 pre valve closed
12/31/2011	11:07:02 AM	SiCl4 post valve closed
12/31/2011	11:07:02 AM	Bypass valve closed
12/31/2011	11:07:02 AM	Bubbler valve closed
12/31/2011	11:07:02 AM	Main Vac valve opened
12/31/2011	11:07:02 AM	Helium MFC set to  0.000000
12/31/2011	11:07:02 AM	H2 MFC set to  0.000000
12/31/2011	11:07:02 AM	BCl3 MFC set to  0.000000
12/31/2011	11:07:02 AM	PHl3 MFC set to  0.000000
12/31/2011	11:07:02 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:07:02 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:07:02 AM	Tube furnace set to 150
12/31/2011	11:07:32 AM	H2 valve closed
12/31/2011	11:07:32 AM	BCl3 valve closed
12/31/2011	11:07:32 AM	PH3 valve closed
12/31/2011	11:07:32 AM	SiCl4 pre valve closed
12/31/2011	11:07:32 AM	SiCl4 post valve closed
12/31/2011	11:07:32 AM	Bypass valve closed
12/31/2011	11:07:32 AM	Bubbler valve closed
12/31/2011	11:07:32 AM	Helium valve opened
12/31/2011	11:07:32 AM	Main Vac valve opened
12/31/2011	11:07:32 AM	Helium MFC set to  20.000000
12/31/2011	11:07:32 AM	H2 MFC set to  0.000000
12/31/2011	11:07:32 AM	BCl3 MFC set to  0.000000
12/31/2011	11:07:32 AM	PHl3 MFC set to  0.000000
12/31/2011	11:07:32 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:07:32 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:07:33 AM	Tube furnace set to 150
12/31/2011	11:08:03 AM	Helium valve closed
12/31/2011	11:08:03 AM	H2 valve closed
12/31/2011	11:08:03 AM	BCl3 valve closed
12/31/2011	11:08:03 AM	PH3 valve closed
12/31/2011	11:08:03 AM	SiCl4 pre valve closed
12/31/2011	11:08:03 AM	SiCl4 post valve closed
12/31/2011	11:08:03 AM	Bypass valve closed
12/31/2011	11:08:03 AM	Bubbler valve closed
12/31/2011	11:08:03 AM	Main Vac valve opened
12/31/2011	11:08:03 AM	Helium MFC set to  0.000000
12/31/2011	11:08:03 AM	H2 MFC set to  0.000000
12/31/2011	11:08:03 AM	BCl3 MFC set to  0.000000
12/31/2011	11:08:03 AM	PHl3 MFC set to  0.000000
12/31/2011	11:08:03 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:08:03 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:08:03 AM	Tube furnace set to 150
12/31/2011	11:08:33 AM	H2 valve closed
12/31/2011	11:08:33 AM	BCl3 valve closed
12/31/2011	11:08:33 AM	PH3 valve closed
12/31/2011	11:08:33 AM	SiCl4 pre valve closed
12/31/2011	11:08:33 AM	SiCl4 post valve closed
12/31/2011	11:08:33 AM	Bypass valve closed
12/31/2011	11:08:33 AM	Bubbler valve closed
12/31/2011	11:08:33 AM	Helium valve opened
12/31/2011	11:08:33 AM	Main Vac valve opened
12/31/2011	11:08:33 AM	Helium MFC set to  20.000000
12/31/2011	11:08:33 AM	H2 MFC set to  0.000000
12/31/2011	11:08:33 AM	BCl3 MFC set to  0.000000
12/31/2011	11:08:33 AM	PHl3 MFC set to  0.000000
12/31/2011	11:08:33 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:08:33 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:08:33 AM	Tube furnace set to 150
12/31/2011	11:09:03 AM	Helium valve closed
12/31/2011	11:09:03 AM	H2 valve closed
12/31/2011	11:09:03 AM	BCl3 valve closed
12/31/2011	11:09:03 AM	PH3 valve closed
12/31/2011	11:09:03 AM	SiCl4 pre valve closed
12/31/2011	11:09:03 AM	SiCl4 post valve closed
12/31/2011	11:09:03 AM	Bypass valve closed
12/31/2011	11:09:03 AM	Bubbler valve closed
12/31/2011	11:09:03 AM	Main Vac valve opened
12/31/2011	11:09:03 AM	Helium MFC set to  0.000000
12/31/2011	11:09:03 AM	H2 MFC set to  0.000000
12/31/2011	11:09:03 AM	BCl3 MFC set to  0.000000
12/31/2011	11:09:03 AM	PHl3 MFC set to  0.000000
12/31/2011	11:09:03 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:09:03 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:09:03 AM	Tube furnace set to 150
12/31/2011	11:09:33 AM	H2 valve closed
12/31/2011	11:09:33 AM	BCl3 valve closed
12/31/2011	11:09:33 AM	PH3 valve closed
12/31/2011	11:09:33 AM	SiCl4 pre valve closed
12/31/2011	11:09:33 AM	SiCl4 post valve closed
12/31/2011	11:09:33 AM	Bypass valve closed
12/31/2011	11:09:33 AM	Bubbler valve closed
12/31/2011	11:09:33 AM	Helium valve opened
12/31/2011	11:09:33 AM	Main Vac valve opened
12/31/2011	11:09:33 AM	Helium MFC set to  20.000000
12/31/2011	11:09:33 AM	H2 MFC set to  0.000000
12/31/2011	11:09:33 AM	BCl3 MFC set to  0.000000
12/31/2011	11:09:33 AM	PHl3 MFC set to  0.000000
12/31/2011	11:09:33 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:09:33 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:09:33 AM	Tube furnace set to 150
12/31/2011	11:10:03 AM	Helium valve closed
12/31/2011	11:10:03 AM	H2 valve closed
12/31/2011	11:10:03 AM	BCl3 valve closed
12/31/2011	11:10:03 AM	PH3 valve closed
12/31/2011	11:10:03 AM	SiCl4 pre valve closed
12/31/2011	11:10:03 AM	SiCl4 post valve closed
12/31/2011	11:10:03 AM	Bypass valve closed
12/31/2011	11:10:03 AM	Bubbler valve closed
12/31/2011	11:10:03 AM	Main Vac valve opened
12/31/2011	11:10:03 AM	Helium MFC set to  0.000000
12/31/2011	11:10:03 AM	H2 MFC set to  0.000000
12/31/2011	11:10:03 AM	BCl3 MFC set to  0.000000
12/31/2011	11:10:03 AM	PHl3 MFC set to  0.000000
12/31/2011	11:10:03 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:10:03 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:10:04 AM	Tube furnace set to 150
12/31/2011	11:10:34 AM	H2 valve closed
12/31/2011	11:10:34 AM	BCl3 valve closed
12/31/2011	11:10:34 AM	PH3 valve closed
12/31/2011	11:10:34 AM	SiCl4 pre valve closed
12/31/2011	11:10:34 AM	SiCl4 post valve closed
12/31/2011	11:10:34 AM	Bypass valve closed
12/31/2011	11:10:34 AM	Bubbler valve closed
12/31/2011	11:10:34 AM	Helium valve opened
12/31/2011	11:10:34 AM	Main Vac valve opened
12/31/2011	11:10:34 AM	Helium MFC set to  20.000000
12/31/2011	11:10:34 AM	H2 MFC set to  0.000000
12/31/2011	11:10:34 AM	BCl3 MFC set to  0.000000
12/31/2011	11:10:34 AM	PHl3 MFC set to  0.000000
12/31/2011	11:10:34 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:10:34 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:10:34 AM	Tube furnace set to 150
12/31/2011	11:11:04 AM	Helium valve closed
12/31/2011	11:11:04 AM	H2 valve closed
12/31/2011	11:11:04 AM	BCl3 valve closed
12/31/2011	11:11:04 AM	PH3 valve closed
12/31/2011	11:11:04 AM	SiCl4 pre valve closed
12/31/2011	11:11:04 AM	SiCl4 post valve closed
12/31/2011	11:11:04 AM	Bypass valve closed
12/31/2011	11:11:04 AM	Bubbler valve closed
12/31/2011	11:11:04 AM	Main Vac valve opened
12/31/2011	11:11:04 AM	Helium MFC set to  0.000000
12/31/2011	11:11:04 AM	H2 MFC set to  0.000000
12/31/2011	11:11:04 AM	BCl3 MFC set to  0.000000
12/31/2011	11:11:04 AM	PHl3 MFC set to  0.000000
12/31/2011	11:11:04 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:11:04 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:11:04 AM	Tube furnace set to 150
12/31/2011	11:11:34 AM	H2 valve closed
12/31/2011	11:11:34 AM	BCl3 valve closed
12/31/2011	11:11:34 AM	PH3 valve closed
12/31/2011	11:11:34 AM	SiCl4 pre valve closed
12/31/2011	11:11:34 AM	SiCl4 post valve closed
12/31/2011	11:11:34 AM	Bypass valve closed
12/31/2011	11:11:34 AM	Bubbler valve closed
12/31/2011	11:11:34 AM	Helium valve opened
12/31/2011	11:11:34 AM	Main Vac valve opened
12/31/2011	11:11:34 AM	Helium MFC set to  20.000000
12/31/2011	11:11:34 AM	H2 MFC set to  0.000000
12/31/2011	11:11:34 AM	BCl3 MFC set to  0.000000
12/31/2011	11:11:34 AM	PHl3 MFC set to  0.000000
12/31/2011	11:11:34 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:11:34 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:11:34 AM	Tube furnace set to 150
12/31/2011	11:12:04 AM	Helium valve closed
12/31/2011	11:12:04 AM	H2 valve closed
12/31/2011	11:12:04 AM	BCl3 valve closed
12/31/2011	11:12:04 AM	PH3 valve closed
12/31/2011	11:12:04 AM	SiCl4 pre valve closed
12/31/2011	11:12:04 AM	SiCl4 post valve closed
12/31/2011	11:12:04 AM	Bypass valve closed
12/31/2011	11:12:04 AM	Bubbler valve closed
12/31/2011	11:12:04 AM	Main Vac valve opened
12/31/2011	11:12:04 AM	Helium MFC set to  0.000000
12/31/2011	11:12:04 AM	H2 MFC set to  0.000000
12/31/2011	11:12:04 AM	BCl3 MFC set to  0.000000
12/31/2011	11:12:04 AM	PHl3 MFC set to  0.000000
12/31/2011	11:12:04 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:12:04 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:12:04 AM	Tube furnace set to 150
12/31/2011	11:12:34 AM	H2 valve closed
12/31/2011	11:12:34 AM	BCl3 valve closed
12/31/2011	11:12:34 AM	PH3 valve closed
12/31/2011	11:12:34 AM	SiCl4 pre valve closed
12/31/2011	11:12:34 AM	SiCl4 post valve closed
12/31/2011	11:12:34 AM	Bypass valve closed
12/31/2011	11:12:34 AM	Bubbler valve closed
12/31/2011	11:12:34 AM	Helium valve opened
12/31/2011	11:12:34 AM	Main Vac valve opened
12/31/2011	11:12:34 AM	Helium MFC set to  20.000000
12/31/2011	11:12:34 AM	H2 MFC set to  0.000000
12/31/2011	11:12:34 AM	BCl3 MFC set to  0.000000
12/31/2011	11:12:34 AM	PHl3 MFC set to  0.000000
12/31/2011	11:12:34 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:12:34 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:12:35 AM	Tube furnace set to 150
12/31/2011	11:13:05 AM	Helium valve closed
12/31/2011	11:13:05 AM	H2 valve closed
12/31/2011	11:13:05 AM	BCl3 valve closed
12/31/2011	11:13:05 AM	PH3 valve closed
12/31/2011	11:13:05 AM	SiCl4 pre valve closed
12/31/2011	11:13:05 AM	SiCl4 post valve closed
12/31/2011	11:13:05 AM	Bypass valve closed
12/31/2011	11:13:05 AM	Bubbler valve closed
12/31/2011	11:13:05 AM	Main Vac valve opened
12/31/2011	11:13:05 AM	Helium MFC set to  0.000000
12/31/2011	11:13:05 AM	H2 MFC set to  0.000000
12/31/2011	11:13:05 AM	BCl3 MFC set to  0.000000
12/31/2011	11:13:05 AM	PHl3 MFC set to  0.000000
12/31/2011	11:13:05 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:13:05 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:13:05 AM	Tube furnace set to 150
12/31/2011	11:13:35 AM	H2 valve closed
12/31/2011	11:13:35 AM	BCl3 valve closed
12/31/2011	11:13:35 AM	PH3 valve closed
12/31/2011	11:13:35 AM	SiCl4 pre valve closed
12/31/2011	11:13:35 AM	SiCl4 post valve closed
12/31/2011	11:13:35 AM	Bypass valve closed
12/31/2011	11:13:35 AM	Bubbler valve closed
12/31/2011	11:13:35 AM	Helium valve opened
12/31/2011	11:13:35 AM	Main Vac valve opened
12/31/2011	11:13:35 AM	Helium MFC set to  20.000000
12/31/2011	11:13:35 AM	H2 MFC set to  0.000000
12/31/2011	11:13:35 AM	BCl3 MFC set to  0.000000
12/31/2011	11:13:35 AM	PHl3 MFC set to  0.000000
12/31/2011	11:13:35 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:13:35 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:13:35 AM	Tube furnace set to 150
12/31/2011	11:14:05 AM	Helium valve closed
12/31/2011	11:14:05 AM	H2 valve closed
12/31/2011	11:14:05 AM	BCl3 valve closed
12/31/2011	11:14:05 AM	PH3 valve closed
12/31/2011	11:14:05 AM	SiCl4 pre valve closed
12/31/2011	11:14:05 AM	SiCl4 post valve closed
12/31/2011	11:14:05 AM	Bypass valve closed
12/31/2011	11:14:05 AM	Bubbler valve closed
12/31/2011	11:14:05 AM	Main Vac valve opened
12/31/2011	11:14:05 AM	Helium MFC set to  0.000000
12/31/2011	11:14:05 AM	H2 MFC set to  0.000000
12/31/2011	11:14:05 AM	BCl3 MFC set to  0.000000
12/31/2011	11:14:05 AM	PHl3 MFC set to  0.000000
12/31/2011	11:14:05 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:14:05 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:14:05 AM	Tube furnace set to 150
12/31/2011	11:14:35 AM	H2 valve closed
12/31/2011	11:14:35 AM	BCl3 valve closed
12/31/2011	11:14:35 AM	PH3 valve closed
12/31/2011	11:14:35 AM	SiCl4 pre valve closed
12/31/2011	11:14:35 AM	SiCl4 post valve closed
12/31/2011	11:14:35 AM	Bypass valve closed
12/31/2011	11:14:35 AM	Bubbler valve closed
12/31/2011	11:14:35 AM	Helium valve opened
12/31/2011	11:14:35 AM	Main Vac valve opened
12/31/2011	11:14:35 AM	Helium MFC set to  20.000000
12/31/2011	11:14:35 AM	H2 MFC set to  0.000000
12/31/2011	11:14:35 AM	BCl3 MFC set to  0.000000
12/31/2011	11:14:35 AM	PHl3 MFC set to  0.000000
12/31/2011	11:14:35 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:14:35 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:14:35 AM	Tube furnace set to 150
12/31/2011	11:15:05 AM	Helium valve closed
12/31/2011	11:15:05 AM	H2 valve closed
12/31/2011	11:15:05 AM	BCl3 valve closed
12/31/2011	11:15:05 AM	PH3 valve closed
12/31/2011	11:15:05 AM	SiCl4 pre valve closed
12/31/2011	11:15:05 AM	SiCl4 post valve closed
12/31/2011	11:15:05 AM	Bypass valve closed
12/31/2011	11:15:05 AM	Bubbler valve closed
12/31/2011	11:15:05 AM	Main Vac valve opened
12/31/2011	11:15:05 AM	Helium MFC set to  0.000000
12/31/2011	11:15:05 AM	H2 MFC set to  0.000000
12/31/2011	11:15:05 AM	BCl3 MFC set to  0.000000
12/31/2011	11:15:05 AM	PHl3 MFC set to  0.000000
12/31/2011	11:15:05 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:15:05 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:15:06 AM	Tube furnace set to 150
12/31/2011	11:15:36 AM	H2 valve closed
12/31/2011	11:15:36 AM	BCl3 valve closed
12/31/2011	11:15:36 AM	PH3 valve closed
12/31/2011	11:15:36 AM	SiCl4 pre valve closed
12/31/2011	11:15:36 AM	SiCl4 post valve closed
12/31/2011	11:15:36 AM	Bypass valve closed
12/31/2011	11:15:36 AM	Bubbler valve closed
12/31/2011	11:15:36 AM	Helium valve opened
12/31/2011	11:15:36 AM	Main Vac valve opened
12/31/2011	11:15:36 AM	Helium MFC set to  20.000000
12/31/2011	11:15:36 AM	H2 MFC set to  0.000000
12/31/2011	11:15:36 AM	BCl3 MFC set to  0.000000
12/31/2011	11:15:36 AM	PHl3 MFC set to  0.000000
12/31/2011	11:15:36 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:15:36 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:15:36 AM	Tube furnace set to 150
12/31/2011	11:16:06 AM	Helium valve closed
12/31/2011	11:16:06 AM	H2 valve closed
12/31/2011	11:16:06 AM	BCl3 valve closed
12/31/2011	11:16:06 AM	PH3 valve closed
12/31/2011	11:16:06 AM	SiCl4 pre valve closed
12/31/2011	11:16:06 AM	SiCl4 post valve closed
12/31/2011	11:16:06 AM	Bypass valve closed
12/31/2011	11:16:06 AM	Bubbler valve closed
12/31/2011	11:16:06 AM	Main Vac valve opened
12/31/2011	11:16:06 AM	Helium MFC set to  0.000000
12/31/2011	11:16:06 AM	H2 MFC set to  0.000000
12/31/2011	11:16:06 AM	BCl3 MFC set to  0.000000
12/31/2011	11:16:06 AM	PHl3 MFC set to  0.000000
12/31/2011	11:16:06 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:16:06 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:16:06 AM	Tube furnace set to 150
12/31/2011	11:16:36 AM	H2 valve closed
12/31/2011	11:16:36 AM	BCl3 valve closed
12/31/2011	11:16:36 AM	PH3 valve closed
12/31/2011	11:16:36 AM	SiCl4 pre valve closed
12/31/2011	11:16:36 AM	SiCl4 post valve closed
12/31/2011	11:16:36 AM	Bypass valve closed
12/31/2011	11:16:36 AM	Bubbler valve closed
12/31/2011	11:16:36 AM	Helium valve opened
12/31/2011	11:16:36 AM	Main Vac valve opened
12/31/2011	11:16:36 AM	Helium MFC set to  20.000000
12/31/2011	11:16:36 AM	H2 MFC set to  0.000000
12/31/2011	11:16:36 AM	BCl3 MFC set to  0.000000
12/31/2011	11:16:36 AM	PHl3 MFC set to  0.000000
12/31/2011	11:16:36 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:16:36 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:16:36 AM	Tube furnace set to 150
12/31/2011	11:17:06 AM	Helium valve closed
12/31/2011	11:17:06 AM	H2 valve closed
12/31/2011	11:17:06 AM	BCl3 valve closed
12/31/2011	11:17:06 AM	PH3 valve closed
12/31/2011	11:17:06 AM	SiCl4 pre valve closed
12/31/2011	11:17:06 AM	SiCl4 post valve closed
12/31/2011	11:17:06 AM	Bypass valve closed
12/31/2011	11:17:06 AM	Bubbler valve closed
12/31/2011	11:17:06 AM	Main Vac valve opened
12/31/2011	11:17:06 AM	Helium MFC set to  0.000000
12/31/2011	11:17:06 AM	H2 MFC set to  0.000000
12/31/2011	11:17:06 AM	BCl3 MFC set to  0.000000
12/31/2011	11:17:06 AM	PHl3 MFC set to  0.000000
12/31/2011	11:17:06 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:17:06 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:17:07 AM	Tube furnace set to 150
12/31/2011	11:17:37 AM	H2 valve closed
12/31/2011	11:17:37 AM	BCl3 valve closed
12/31/2011	11:17:37 AM	PH3 valve closed
12/31/2011	11:17:37 AM	SiCl4 pre valve closed
12/31/2011	11:17:37 AM	SiCl4 post valve closed
12/31/2011	11:17:37 AM	Bypass valve closed
12/31/2011	11:17:37 AM	Bubbler valve closed
12/31/2011	11:17:37 AM	Helium valve opened
12/31/2011	11:17:37 AM	Main Vac valve opened
12/31/2011	11:17:37 AM	Helium MFC set to  20.000000
12/31/2011	11:17:37 AM	H2 MFC set to  0.000000
12/31/2011	11:17:37 AM	BCl3 MFC set to  0.000000
12/31/2011	11:17:37 AM	PHl3 MFC set to  0.000000
12/31/2011	11:17:37 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:17:37 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:17:37 AM	Tube furnace set to 150
12/31/2011	11:18:07 AM	Helium valve closed
12/31/2011	11:18:07 AM	H2 valve closed
12/31/2011	11:18:07 AM	BCl3 valve closed
12/31/2011	11:18:07 AM	PH3 valve closed
12/31/2011	11:18:07 AM	SiCl4 pre valve closed
12/31/2011	11:18:07 AM	SiCl4 post valve closed
12/31/2011	11:18:07 AM	Bypass valve closed
12/31/2011	11:18:07 AM	Bubbler valve closed
12/31/2011	11:18:07 AM	Main Vac valve opened
12/31/2011	11:18:07 AM	Helium MFC set to  0.000000
12/31/2011	11:18:07 AM	H2 MFC set to  0.000000
12/31/2011	11:18:07 AM	BCl3 MFC set to  0.000000
12/31/2011	11:18:07 AM	PHl3 MFC set to  0.000000
12/31/2011	11:18:07 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:18:07 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:18:07 AM	Tube furnace set to 150
12/31/2011	11:18:37 AM	H2 valve closed
12/31/2011	11:18:37 AM	BCl3 valve closed
12/31/2011	11:18:37 AM	PH3 valve closed
12/31/2011	11:18:37 AM	SiCl4 pre valve closed
12/31/2011	11:18:37 AM	SiCl4 post valve closed
12/31/2011	11:18:37 AM	Bypass valve closed
12/31/2011	11:18:37 AM	Bubbler valve closed
12/31/2011	11:18:37 AM	Helium valve opened
12/31/2011	11:18:37 AM	Main Vac valve opened
12/31/2011	11:18:37 AM	Helium MFC set to  20.000000
12/31/2011	11:18:37 AM	H2 MFC set to  0.000000
12/31/2011	11:18:37 AM	BCl3 MFC set to  0.000000
12/31/2011	11:18:37 AM	PHl3 MFC set to  0.000000
12/31/2011	11:18:37 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:18:37 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:18:37 AM	Tube furnace set to 150
12/31/2011	11:19:07 AM	Helium valve closed
12/31/2011	11:19:07 AM	H2 valve closed
12/31/2011	11:19:07 AM	BCl3 valve closed
12/31/2011	11:19:07 AM	PH3 valve closed
12/31/2011	11:19:07 AM	SiCl4 pre valve closed
12/31/2011	11:19:07 AM	SiCl4 post valve closed
12/31/2011	11:19:07 AM	Bypass valve closed
12/31/2011	11:19:07 AM	Bubbler valve closed
12/31/2011	11:19:07 AM	Main Vac valve opened
12/31/2011	11:19:07 AM	Helium MFC set to  0.000000
12/31/2011	11:19:07 AM	H2 MFC set to  0.000000
12/31/2011	11:19:07 AM	BCl3 MFC set to  0.000000
12/31/2011	11:19:07 AM	PHl3 MFC set to  0.000000
12/31/2011	11:19:07 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:19:07 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:19:07 AM	Tube furnace set to 150
12/31/2011	11:19:37 AM	H2 valve closed
12/31/2011	11:19:37 AM	BCl3 valve closed
12/31/2011	11:19:37 AM	PH3 valve closed
12/31/2011	11:19:37 AM	SiCl4 pre valve closed
12/31/2011	11:19:37 AM	SiCl4 post valve closed
12/31/2011	11:19:37 AM	Bypass valve closed
12/31/2011	11:19:37 AM	Bubbler valve closed
12/31/2011	11:19:37 AM	Helium valve opened
12/31/2011	11:19:37 AM	Main Vac valve opened
12/31/2011	11:19:37 AM	Helium MFC set to  20.000000
12/31/2011	11:19:37 AM	H2 MFC set to  0.000000
12/31/2011	11:19:37 AM	BCl3 MFC set to  0.000000
12/31/2011	11:19:37 AM	PHl3 MFC set to  0.000000
12/31/2011	11:19:37 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:19:37 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:19:38 AM	Tube furnace set to 150
12/31/2011	11:20:08 AM	Helium valve closed
12/31/2011	11:20:08 AM	H2 valve closed
12/31/2011	11:20:08 AM	BCl3 valve closed
12/31/2011	11:20:08 AM	PH3 valve closed
12/31/2011	11:20:08 AM	SiCl4 pre valve closed
12/31/2011	11:20:08 AM	SiCl4 post valve closed
12/31/2011	11:20:08 AM	Bypass valve closed
12/31/2011	11:20:08 AM	Bubbler valve closed
12/31/2011	11:20:08 AM	Main Vac valve opened
12/31/2011	11:20:08 AM	Helium MFC set to  0.000000
12/31/2011	11:20:08 AM	H2 MFC set to  0.000000
12/31/2011	11:20:08 AM	BCl3 MFC set to  0.000000
12/31/2011	11:20:08 AM	PHl3 MFC set to  0.000000
12/31/2011	11:20:08 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:20:08 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:20:08 AM	Tube furnace set to 150
12/31/2011	11:20:38 AM	H2 valve closed
12/31/2011	11:20:38 AM	BCl3 valve closed
12/31/2011	11:20:38 AM	PH3 valve closed
12/31/2011	11:20:38 AM	SiCl4 pre valve closed
12/31/2011	11:20:38 AM	SiCl4 post valve closed
12/31/2011	11:20:38 AM	Bypass valve closed
12/31/2011	11:20:38 AM	Bubbler valve closed
12/31/2011	11:20:38 AM	Helium valve opened
12/31/2011	11:20:38 AM	Main Vac valve opened
12/31/2011	11:20:38 AM	Helium MFC set to  20.000000
12/31/2011	11:20:38 AM	H2 MFC set to  0.000000
12/31/2011	11:20:38 AM	BCl3 MFC set to  0.000000
12/31/2011	11:20:38 AM	PHl3 MFC set to  0.000000
12/31/2011	11:20:38 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:20:38 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:20:38 AM	Tube furnace set to 150
12/31/2011	11:21:08 AM	Helium valve closed
12/31/2011	11:21:08 AM	H2 valve closed
12/31/2011	11:21:08 AM	BCl3 valve closed
12/31/2011	11:21:08 AM	PH3 valve closed
12/31/2011	11:21:08 AM	SiCl4 pre valve closed
12/31/2011	11:21:08 AM	SiCl4 post valve closed
12/31/2011	11:21:08 AM	Bypass valve closed
12/31/2011	11:21:08 AM	Bubbler valve closed
12/31/2011	11:21:08 AM	Main Vac valve opened
12/31/2011	11:21:08 AM	Helium MFC set to  0.000000
12/31/2011	11:21:08 AM	H2 MFC set to  0.000000
12/31/2011	11:21:08 AM	BCl3 MFC set to  0.000000
12/31/2011	11:21:08 AM	PHl3 MFC set to  0.000000
12/31/2011	11:21:08 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:21:08 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:21:08 AM	Tube furnace set to 150
12/31/2011	11:21:38 AM	H2 valve closed
12/31/2011	11:21:38 AM	BCl3 valve closed
12/31/2011	11:21:38 AM	PH3 valve closed
12/31/2011	11:21:38 AM	SiCl4 pre valve closed
12/31/2011	11:21:38 AM	SiCl4 post valve closed
12/31/2011	11:21:38 AM	Bypass valve closed
12/31/2011	11:21:38 AM	Bubbler valve closed
12/31/2011	11:21:38 AM	Helium valve opened
12/31/2011	11:21:38 AM	Main Vac valve opened
12/31/2011	11:21:38 AM	Helium MFC set to  20.000000
12/31/2011	11:21:38 AM	H2 MFC set to  0.000000
12/31/2011	11:21:38 AM	BCl3 MFC set to  0.000000
12/31/2011	11:21:38 AM	PHl3 MFC set to  0.000000
12/31/2011	11:21:38 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:21:38 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:21:38 AM	Tube furnace set to 150
12/31/2011	11:22:08 AM	Helium valve closed
12/31/2011	11:22:08 AM	H2 valve closed
12/31/2011	11:22:08 AM	BCl3 valve closed
12/31/2011	11:22:08 AM	PH3 valve closed
12/31/2011	11:22:08 AM	SiCl4 pre valve closed
12/31/2011	11:22:08 AM	SiCl4 post valve closed
12/31/2011	11:22:08 AM	Bypass valve closed
12/31/2011	11:22:08 AM	Bubbler valve closed
12/31/2011	11:22:08 AM	Main Vac valve opened
12/31/2011	11:22:08 AM	Helium MFC set to  0.000000
12/31/2011	11:22:08 AM	H2 MFC set to  0.000000
12/31/2011	11:22:08 AM	BCl3 MFC set to  0.000000
12/31/2011	11:22:08 AM	PHl3 MFC set to  0.000000
12/31/2011	11:22:08 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:22:08 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:22:09 AM	Tube furnace set to 150
12/31/2011	11:22:39 AM	H2 valve closed
12/31/2011	11:22:39 AM	BCl3 valve closed
12/31/2011	11:22:39 AM	PH3 valve closed
12/31/2011	11:22:39 AM	SiCl4 pre valve closed
12/31/2011	11:22:39 AM	SiCl4 post valve closed
12/31/2011	11:22:39 AM	Bypass valve closed
12/31/2011	11:22:39 AM	Bubbler valve closed
12/31/2011	11:22:39 AM	Helium valve opened
12/31/2011	11:22:39 AM	Main Vac valve opened
12/31/2011	11:22:39 AM	Helium MFC set to  20.000000
12/31/2011	11:22:39 AM	H2 MFC set to  0.000000
12/31/2011	11:22:39 AM	BCl3 MFC set to  0.000000
12/31/2011	11:22:39 AM	PHl3 MFC set to  0.000000
12/31/2011	11:22:39 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:22:39 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:22:39 AM	Tube furnace set to 150
12/31/2011	11:23:09 AM	Helium valve closed
12/31/2011	11:23:09 AM	H2 valve closed
12/31/2011	11:23:09 AM	BCl3 valve closed
12/31/2011	11:23:09 AM	PH3 valve closed
12/31/2011	11:23:09 AM	SiCl4 pre valve closed
12/31/2011	11:23:09 AM	SiCl4 post valve closed
12/31/2011	11:23:09 AM	Bypass valve closed
12/31/2011	11:23:09 AM	Bubbler valve closed
12/31/2011	11:23:09 AM	Main Vac valve opened
12/31/2011	11:23:09 AM	Helium MFC set to  0.000000
12/31/2011	11:23:09 AM	H2 MFC set to  0.000000
12/31/2011	11:23:09 AM	BCl3 MFC set to  0.000000
12/31/2011	11:23:09 AM	PHl3 MFC set to  0.000000
12/31/2011	11:23:09 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:23:09 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:23:09 AM	Tube furnace set to 180
12/31/2011	11:23:14 AM	Run finished at 11:23 AM
12/31/2011	11:29:35 AM	Recipe started at 11:29 AM
12/31/2011	11:29:35 AM	Helium valve closed
12/31/2011	11:29:35 AM	H2 valve closed
12/31/2011	11:29:35 AM	BCl3 valve closed
12/31/2011	11:29:35 AM	PH3 valve closed
12/31/2011	11:29:35 AM	SiCl4 pre valve closed
12/31/2011	11:29:35 AM	SiCl4 post valve closed
12/31/2011	11:29:35 AM	Main Vac valve closed
12/31/2011	11:29:35 AM	Bubbler valve closed
12/31/2011	11:29:35 AM	Bypass valve opened
12/31/2011	11:29:35 AM	Helium MFC set to  0.000000
12/31/2011	11:29:35 AM	H2 MFC set to  0.000000
12/31/2011	11:29:35 AM	BCl3 MFC set to  0.000000
12/31/2011	11:29:35 AM	PHl3 MFC set to  0.000000
12/31/2011	11:29:35 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:29:35 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:29:35 AM	Tube furnace set to 180
12/31/2011	11:29:36 AM	Helium valve closed
12/31/2011	11:29:36 AM	H2 valve closed
12/31/2011	11:29:36 AM	BCl3 valve closed
12/31/2011	11:29:36 AM	PH3 valve closed
12/31/2011	11:29:36 AM	SiCl4 pre valve closed
12/31/2011	11:29:36 AM	SiCl4 post valve closed
12/31/2011	11:29:36 AM	Main Vac valve closed
12/31/2011	11:29:36 AM	Bubbler valve closed
12/31/2011	11:29:36 AM	Bypass valve opened
12/31/2011	11:29:36 AM	Helium MFC set to  0.000000
12/31/2011	11:29:36 AM	H2 MFC set to  0.000000
12/31/2011	11:29:36 AM	BCl3 MFC set to  0.000000
12/31/2011	11:29:36 AM	PHl3 MFC set to  0.000000
12/31/2011	11:29:36 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:29:36 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:29:37 AM	Tube furnace set to 150
12/31/2011	11:30:07 AM	Helium valve closed
12/31/2011	11:30:07 AM	H2 valve closed
12/31/2011	11:30:07 AM	BCl3 valve closed
12/31/2011	11:30:07 AM	PH3 valve closed
12/31/2011	11:30:07 AM	SiCl4 pre valve closed
12/31/2011	11:30:07 AM	SiCl4 post valve closed
12/31/2011	11:30:07 AM	Bypass valve closed
12/31/2011	11:30:07 AM	Bubbler valve closed
12/31/2011	11:30:07 AM	Main Vac valve opened
12/31/2011	11:30:07 AM	Helium MFC set to  0.000000
12/31/2011	11:30:07 AM	H2 MFC set to  0.000000
12/31/2011	11:30:07 AM	BCl3 MFC set to  0.000000
12/31/2011	11:30:07 AM	PHl3 MFC set to  0.000000
12/31/2011	11:30:07 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:30:07 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:30:07 AM	Tube furnace set to 180
12/31/2011	11:30:37 AM	H2 valve closed
12/31/2011	11:30:37 AM	BCl3 valve closed
12/31/2011	11:30:37 AM	PH3 valve closed
12/31/2011	11:30:37 AM	SiCl4 pre valve closed
12/31/2011	11:30:37 AM	SiCl4 post valve closed
12/31/2011	11:30:37 AM	Bypass valve closed
12/31/2011	11:30:37 AM	Bubbler valve closed
12/31/2011	11:30:37 AM	Helium valve opened
12/31/2011	11:30:37 AM	Main Vac valve opened
12/31/2011	11:30:37 AM	Helium MFC set to  20.000000
12/31/2011	11:30:37 AM	H2 MFC set to  0.000000
12/31/2011	11:30:37 AM	BCl3 MFC set to  0.000000
12/31/2011	11:30:37 AM	PHl3 MFC set to  0.000000
12/31/2011	11:30:37 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:30:37 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:30:37 AM	Tube furnace set to 180
12/31/2011	11:31:07 AM	Helium valve closed
12/31/2011	11:31:07 AM	H2 valve closed
12/31/2011	11:31:07 AM	BCl3 valve closed
12/31/2011	11:31:07 AM	PH3 valve closed
12/31/2011	11:31:07 AM	SiCl4 pre valve closed
12/31/2011	11:31:07 AM	SiCl4 post valve closed
12/31/2011	11:31:07 AM	Bypass valve closed
12/31/2011	11:31:07 AM	Bubbler valve closed
12/31/2011	11:31:07 AM	Main Vac valve opened
12/31/2011	11:31:07 AM	Helium MFC set to  0.000000
12/31/2011	11:31:07 AM	H2 MFC set to  0.000000
12/31/2011	11:31:07 AM	BCl3 MFC set to  0.000000
12/31/2011	11:31:07 AM	PHl3 MFC set to  0.000000
12/31/2011	11:31:07 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:31:07 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:31:07 AM	Tube furnace set to 150
12/31/2011	11:31:37 AM	H2 valve closed
12/31/2011	11:31:37 AM	BCl3 valve closed
12/31/2011	11:31:37 AM	PH3 valve closed
12/31/2011	11:31:37 AM	SiCl4 pre valve closed
12/31/2011	11:31:37 AM	SiCl4 post valve closed
12/31/2011	11:31:37 AM	Bypass valve closed
12/31/2011	11:31:37 AM	Bubbler valve closed
12/31/2011	11:31:37 AM	Helium valve opened
12/31/2011	11:31:37 AM	Main Vac valve opened
12/31/2011	11:31:37 AM	Helium MFC set to  20.000000
12/31/2011	11:31:37 AM	H2 MFC set to  0.000000
12/31/2011	11:31:37 AM	BCl3 MFC set to  0.000000
12/31/2011	11:31:37 AM	PHl3 MFC set to  0.000000
12/31/2011	11:31:37 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:31:37 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:31:37 AM	Tube furnace set to 180
12/31/2011	11:32:07 AM	Helium valve closed
12/31/2011	11:32:07 AM	H2 valve closed
12/31/2011	11:32:07 AM	BCl3 valve closed
12/31/2011	11:32:07 AM	PH3 valve closed
12/31/2011	11:32:07 AM	SiCl4 pre valve closed
12/31/2011	11:32:07 AM	SiCl4 post valve closed
12/31/2011	11:32:07 AM	Bypass valve closed
12/31/2011	11:32:07 AM	Bubbler valve closed
12/31/2011	11:32:07 AM	Main Vac valve opened
12/31/2011	11:32:07 AM	Helium MFC set to  0.000000
12/31/2011	11:32:07 AM	H2 MFC set to  0.000000
12/31/2011	11:32:07 AM	BCl3 MFC set to  0.000000
12/31/2011	11:32:07 AM	PHl3 MFC set to  0.000000
12/31/2011	11:32:07 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:32:07 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:32:08 AM	Tube furnace set to 150
12/31/2011	11:32:38 AM	H2 valve closed
12/31/2011	11:32:38 AM	BCl3 valve closed
12/31/2011	11:32:38 AM	PH3 valve closed
12/31/2011	11:32:38 AM	SiCl4 pre valve closed
12/31/2011	11:32:38 AM	SiCl4 post valve closed
12/31/2011	11:32:38 AM	Bypass valve closed
12/31/2011	11:32:38 AM	Bubbler valve closed
12/31/2011	11:32:38 AM	Helium valve opened
12/31/2011	11:32:38 AM	Main Vac valve opened
12/31/2011	11:32:38 AM	Helium MFC set to  20.000000
12/31/2011	11:32:38 AM	H2 MFC set to  0.000000
12/31/2011	11:32:38 AM	BCl3 MFC set to  0.000000
12/31/2011	11:32:38 AM	PHl3 MFC set to  0.000000
12/31/2011	11:32:38 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:32:38 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:32:38 AM	Tube furnace set to 150
12/31/2011	11:33:08 AM	Helium valve closed
12/31/2011	11:33:08 AM	H2 valve closed
12/31/2011	11:33:08 AM	BCl3 valve closed
12/31/2011	11:33:08 AM	PH3 valve closed
12/31/2011	11:33:08 AM	SiCl4 pre valve closed
12/31/2011	11:33:08 AM	SiCl4 post valve closed
12/31/2011	11:33:08 AM	Bypass valve closed
12/31/2011	11:33:08 AM	Bubbler valve closed
12/31/2011	11:33:08 AM	Main Vac valve opened
12/31/2011	11:33:08 AM	Helium MFC set to  0.000000
12/31/2011	11:33:08 AM	H2 MFC set to  0.000000
12/31/2011	11:33:08 AM	BCl3 MFC set to  0.000000
12/31/2011	11:33:08 AM	PHl3 MFC set to  0.000000
12/31/2011	11:33:08 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:33:08 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:33:08 AM	Tube furnace set to 150
12/31/2011	11:33:38 AM	H2 valve closed
12/31/2011	11:33:38 AM	BCl3 valve closed
12/31/2011	11:33:38 AM	PH3 valve closed
12/31/2011	11:33:38 AM	SiCl4 pre valve closed
12/31/2011	11:33:38 AM	SiCl4 post valve closed
12/31/2011	11:33:38 AM	Bypass valve closed
12/31/2011	11:33:38 AM	Bubbler valve closed
12/31/2011	11:33:38 AM	Helium valve opened
12/31/2011	11:33:38 AM	Main Vac valve opened
12/31/2011	11:33:38 AM	Helium MFC set to  20.000000
12/31/2011	11:33:38 AM	H2 MFC set to  0.000000
12/31/2011	11:33:38 AM	BCl3 MFC set to  0.000000
12/31/2011	11:33:38 AM	PHl3 MFC set to  0.000000
12/31/2011	11:33:38 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:33:38 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:33:38 AM	Tube furnace set to 180
12/31/2011	11:34:08 AM	Helium valve closed
12/31/2011	11:34:08 AM	H2 valve closed
12/31/2011	11:34:08 AM	BCl3 valve closed
12/31/2011	11:34:08 AM	PH3 valve closed
12/31/2011	11:34:08 AM	SiCl4 pre valve closed
12/31/2011	11:34:08 AM	SiCl4 post valve closed
12/31/2011	11:34:08 AM	Bypass valve closed
12/31/2011	11:34:08 AM	Bubbler valve closed
12/31/2011	11:34:08 AM	Main Vac valve opened
12/31/2011	11:34:08 AM	Helium MFC set to  0.000000
12/31/2011	11:34:08 AM	H2 MFC set to  0.000000
12/31/2011	11:34:08 AM	BCl3 MFC set to  0.000000
12/31/2011	11:34:08 AM	PHl3 MFC set to  0.000000
12/31/2011	11:34:08 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:34:08 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:34:08 AM	Tube furnace set to 150
12/31/2011	11:34:38 AM	H2 valve closed
12/31/2011	11:34:38 AM	BCl3 valve closed
12/31/2011	11:34:38 AM	PH3 valve closed
12/31/2011	11:34:38 AM	SiCl4 pre valve closed
12/31/2011	11:34:38 AM	SiCl4 post valve closed
12/31/2011	11:34:38 AM	Bypass valve closed
12/31/2011	11:34:38 AM	Bubbler valve closed
12/31/2011	11:34:38 AM	Helium valve opened
12/31/2011	11:34:38 AM	Main Vac valve opened
12/31/2011	11:34:38 AM	Helium MFC set to  20.000000
12/31/2011	11:34:38 AM	H2 MFC set to  0.000000
12/31/2011	11:34:38 AM	BCl3 MFC set to  0.000000
12/31/2011	11:34:38 AM	PHl3 MFC set to  0.000000
12/31/2011	11:34:38 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:34:38 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:34:39 AM	Tube furnace set to 150
12/31/2011	11:35:09 AM	Helium valve closed
12/31/2011	11:35:09 AM	H2 valve closed
12/31/2011	11:35:09 AM	BCl3 valve closed
12/31/2011	11:35:09 AM	PH3 valve closed
12/31/2011	11:35:09 AM	SiCl4 pre valve closed
12/31/2011	11:35:09 AM	SiCl4 post valve closed
12/31/2011	11:35:09 AM	Bypass valve closed
12/31/2011	11:35:09 AM	Bubbler valve closed
12/31/2011	11:35:09 AM	Main Vac valve opened
12/31/2011	11:35:09 AM	Helium MFC set to  0.000000
12/31/2011	11:35:09 AM	H2 MFC set to  0.000000
12/31/2011	11:35:09 AM	BCl3 MFC set to  0.000000
12/31/2011	11:35:09 AM	PHl3 MFC set to  0.000000
12/31/2011	11:35:09 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:35:09 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:35:09 AM	Tube furnace set to 150
12/31/2011	11:35:39 AM	H2 valve closed
12/31/2011	11:35:39 AM	BCl3 valve closed
12/31/2011	11:35:39 AM	PH3 valve closed
12/31/2011	11:35:39 AM	SiCl4 pre valve closed
12/31/2011	11:35:39 AM	SiCl4 post valve closed
12/31/2011	11:35:39 AM	Bypass valve closed
12/31/2011	11:35:39 AM	Bubbler valve closed
12/31/2011	11:35:39 AM	Helium valve opened
12/31/2011	11:35:39 AM	Main Vac valve opened
12/31/2011	11:35:39 AM	Helium MFC set to  20.000000
12/31/2011	11:35:39 AM	H2 MFC set to  0.000000
12/31/2011	11:35:39 AM	BCl3 MFC set to  0.000000
12/31/2011	11:35:39 AM	PHl3 MFC set to  0.000000
12/31/2011	11:35:39 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:35:39 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:35:39 AM	Tube furnace set to 150
12/31/2011	11:36:09 AM	Helium valve closed
12/31/2011	11:36:09 AM	H2 valve closed
12/31/2011	11:36:09 AM	BCl3 valve closed
12/31/2011	11:36:09 AM	PH3 valve closed
12/31/2011	11:36:09 AM	SiCl4 pre valve closed
12/31/2011	11:36:09 AM	SiCl4 post valve closed
12/31/2011	11:36:09 AM	Bypass valve closed
12/31/2011	11:36:09 AM	Bubbler valve closed
12/31/2011	11:36:09 AM	Main Vac valve opened
12/31/2011	11:36:09 AM	Helium MFC set to  0.000000
12/31/2011	11:36:09 AM	H2 MFC set to  0.000000
12/31/2011	11:36:09 AM	BCl3 MFC set to  0.000000
12/31/2011	11:36:09 AM	PHl3 MFC set to  0.000000
12/31/2011	11:36:09 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:36:09 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:36:09 AM	Tube furnace set to 150
12/31/2011	11:36:39 AM	H2 valve closed
12/31/2011	11:36:39 AM	BCl3 valve closed
12/31/2011	11:36:39 AM	PH3 valve closed
12/31/2011	11:36:39 AM	SiCl4 pre valve closed
12/31/2011	11:36:39 AM	SiCl4 post valve closed
12/31/2011	11:36:39 AM	Bypass valve closed
12/31/2011	11:36:39 AM	Bubbler valve closed
12/31/2011	11:36:39 AM	Helium valve opened
12/31/2011	11:36:39 AM	Main Vac valve opened
12/31/2011	11:36:39 AM	Helium MFC set to  20.000000
12/31/2011	11:36:39 AM	H2 MFC set to  0.000000
12/31/2011	11:36:39 AM	BCl3 MFC set to  0.000000
12/31/2011	11:36:39 AM	PHl3 MFC set to  0.000000
12/31/2011	11:36:39 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:36:39 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:36:39 AM	Tube furnace set to 150
12/31/2011	11:37:09 AM	Helium valve closed
12/31/2011	11:37:09 AM	H2 valve closed
12/31/2011	11:37:09 AM	BCl3 valve closed
12/31/2011	11:37:09 AM	PH3 valve closed
12/31/2011	11:37:09 AM	SiCl4 pre valve closed
12/31/2011	11:37:09 AM	SiCl4 post valve closed
12/31/2011	11:37:09 AM	Bypass valve closed
12/31/2011	11:37:09 AM	Bubbler valve closed
12/31/2011	11:37:09 AM	Main Vac valve opened
12/31/2011	11:37:09 AM	Helium MFC set to  0.000000
12/31/2011	11:37:09 AM	H2 MFC set to  0.000000
12/31/2011	11:37:09 AM	BCl3 MFC set to  0.000000
12/31/2011	11:37:09 AM	PHl3 MFC set to  0.000000
12/31/2011	11:37:09 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:37:09 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:37:10 AM	Tube furnace set to 150
12/31/2011	11:37:40 AM	H2 valve closed
12/31/2011	11:37:40 AM	BCl3 valve closed
12/31/2011	11:37:40 AM	PH3 valve closed
12/31/2011	11:37:40 AM	SiCl4 pre valve closed
12/31/2011	11:37:40 AM	SiCl4 post valve closed
12/31/2011	11:37:40 AM	Bypass valve closed
12/31/2011	11:37:40 AM	Bubbler valve closed
12/31/2011	11:37:40 AM	Helium valve opened
12/31/2011	11:37:40 AM	Main Vac valve opened
12/31/2011	11:37:40 AM	Helium MFC set to  20.000000
12/31/2011	11:37:40 AM	H2 MFC set to  0.000000
12/31/2011	11:37:40 AM	BCl3 MFC set to  0.000000
12/31/2011	11:37:40 AM	PHl3 MFC set to  0.000000
12/31/2011	11:37:40 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:37:40 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:37:40 AM	Tube furnace set to 150
12/31/2011	11:38:10 AM	Helium valve closed
12/31/2011	11:38:10 AM	H2 valve closed
12/31/2011	11:38:10 AM	BCl3 valve closed
12/31/2011	11:38:10 AM	PH3 valve closed
12/31/2011	11:38:10 AM	SiCl4 pre valve closed
12/31/2011	11:38:10 AM	SiCl4 post valve closed
12/31/2011	11:38:10 AM	Bypass valve closed
12/31/2011	11:38:10 AM	Bubbler valve closed
12/31/2011	11:38:10 AM	Main Vac valve opened
12/31/2011	11:38:10 AM	Helium MFC set to  0.000000
12/31/2011	11:38:10 AM	H2 MFC set to  0.000000
12/31/2011	11:38:10 AM	BCl3 MFC set to  0.000000
12/31/2011	11:38:10 AM	PHl3 MFC set to  0.000000
12/31/2011	11:38:10 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:38:10 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:38:10 AM	Tube furnace set to 150
12/31/2011	11:38:40 AM	H2 valve closed
12/31/2011	11:38:40 AM	BCl3 valve closed
12/31/2011	11:38:40 AM	PH3 valve closed
12/31/2011	11:38:40 AM	SiCl4 pre valve closed
12/31/2011	11:38:40 AM	SiCl4 post valve closed
12/31/2011	11:38:40 AM	Bypass valve closed
12/31/2011	11:38:40 AM	Bubbler valve closed
12/31/2011	11:38:40 AM	Helium valve opened
12/31/2011	11:38:40 AM	Main Vac valve opened
12/31/2011	11:38:40 AM	Helium MFC set to  20.000000
12/31/2011	11:38:40 AM	H2 MFC set to  0.000000
12/31/2011	11:38:40 AM	BCl3 MFC set to  0.000000
12/31/2011	11:38:40 AM	PHl3 MFC set to  0.000000
12/31/2011	11:38:40 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:38:40 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:38:40 AM	Tube furnace set to 150
12/31/2011	11:39:10 AM	Helium valve closed
12/31/2011	11:39:10 AM	H2 valve closed
12/31/2011	11:39:10 AM	BCl3 valve closed
12/31/2011	11:39:10 AM	PH3 valve closed
12/31/2011	11:39:10 AM	SiCl4 pre valve closed
12/31/2011	11:39:10 AM	SiCl4 post valve closed
12/31/2011	11:39:10 AM	Bypass valve closed
12/31/2011	11:39:10 AM	Bubbler valve closed
12/31/2011	11:39:10 AM	Main Vac valve opened
12/31/2011	11:39:10 AM	Helium MFC set to  0.000000
12/31/2011	11:39:10 AM	H2 MFC set to  0.000000
12/31/2011	11:39:10 AM	BCl3 MFC set to  0.000000
12/31/2011	11:39:10 AM	PHl3 MFC set to  0.000000
12/31/2011	11:39:10 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:39:10 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:39:11 AM	Tube furnace set to 150
12/31/2011	11:39:41 AM	H2 valve closed
12/31/2011	11:39:41 AM	BCl3 valve closed
12/31/2011	11:39:41 AM	PH3 valve closed
12/31/2011	11:39:41 AM	SiCl4 pre valve closed
12/31/2011	11:39:41 AM	SiCl4 post valve closed
12/31/2011	11:39:41 AM	Bypass valve closed
12/31/2011	11:39:41 AM	Bubbler valve closed
12/31/2011	11:39:41 AM	Helium valve opened
12/31/2011	11:39:41 AM	Main Vac valve opened
12/31/2011	11:39:41 AM	Helium MFC set to  20.000000
12/31/2011	11:39:41 AM	H2 MFC set to  0.000000
12/31/2011	11:39:41 AM	BCl3 MFC set to  0.000000
12/31/2011	11:39:41 AM	PHl3 MFC set to  0.000000
12/31/2011	11:39:41 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:39:41 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:39:41 AM	Tube furnace set to 150
12/31/2011	11:40:11 AM	Helium valve closed
12/31/2011	11:40:11 AM	H2 valve closed
12/31/2011	11:40:11 AM	BCl3 valve closed
12/31/2011	11:40:11 AM	PH3 valve closed
12/31/2011	11:40:11 AM	SiCl4 pre valve closed
12/31/2011	11:40:11 AM	SiCl4 post valve closed
12/31/2011	11:40:11 AM	Bypass valve closed
12/31/2011	11:40:11 AM	Bubbler valve closed
12/31/2011	11:40:11 AM	Main Vac valve opened
12/31/2011	11:40:11 AM	Helium MFC set to  0.000000
12/31/2011	11:40:11 AM	H2 MFC set to  0.000000
12/31/2011	11:40:11 AM	BCl3 MFC set to  0.000000
12/31/2011	11:40:11 AM	PHl3 MFC set to  0.000000
12/31/2011	11:40:11 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:40:11 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:40:11 AM	Tube furnace set to 150
12/31/2011	11:40:41 AM	H2 valve closed
12/31/2011	11:40:41 AM	BCl3 valve closed
12/31/2011	11:40:41 AM	PH3 valve closed
12/31/2011	11:40:41 AM	SiCl4 pre valve closed
12/31/2011	11:40:41 AM	SiCl4 post valve closed
12/31/2011	11:40:41 AM	Bypass valve closed
12/31/2011	11:40:41 AM	Bubbler valve closed
12/31/2011	11:40:41 AM	Helium valve opened
12/31/2011	11:40:41 AM	Main Vac valve opened
12/31/2011	11:40:41 AM	Helium MFC set to  20.000000
12/31/2011	11:40:41 AM	H2 MFC set to  0.000000
12/31/2011	11:40:41 AM	BCl3 MFC set to  0.000000
12/31/2011	11:40:41 AM	PHl3 MFC set to  0.000000
12/31/2011	11:40:41 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:40:41 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:40:41 AM	Tube furnace set to 150
12/31/2011	11:41:11 AM	Helium valve closed
12/31/2011	11:41:11 AM	H2 valve closed
12/31/2011	11:41:11 AM	BCl3 valve closed
12/31/2011	11:41:11 AM	PH3 valve closed
12/31/2011	11:41:11 AM	SiCl4 pre valve closed
12/31/2011	11:41:11 AM	SiCl4 post valve closed
12/31/2011	11:41:11 AM	Bypass valve closed
12/31/2011	11:41:11 AM	Bubbler valve closed
12/31/2011	11:41:11 AM	Main Vac valve opened
12/31/2011	11:41:11 AM	Helium MFC set to  0.000000
12/31/2011	11:41:11 AM	H2 MFC set to  0.000000
12/31/2011	11:41:11 AM	BCl3 MFC set to  0.000000
12/31/2011	11:41:11 AM	PHl3 MFC set to  0.000000
12/31/2011	11:41:11 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:41:11 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:41:11 AM	Tube furnace set to 150
12/31/2011	11:41:41 AM	H2 valve closed
12/31/2011	11:41:41 AM	BCl3 valve closed
12/31/2011	11:41:41 AM	PH3 valve closed
12/31/2011	11:41:41 AM	SiCl4 pre valve closed
12/31/2011	11:41:41 AM	SiCl4 post valve closed
12/31/2011	11:41:41 AM	Bypass valve closed
12/31/2011	11:41:41 AM	Bubbler valve closed
12/31/2011	11:41:41 AM	Helium valve opened
12/31/2011	11:41:41 AM	Main Vac valve opened
12/31/2011	11:41:41 AM	Helium MFC set to  20.000000
12/31/2011	11:41:41 AM	H2 MFC set to  0.000000
12/31/2011	11:41:41 AM	BCl3 MFC set to  0.000000
12/31/2011	11:41:41 AM	PHl3 MFC set to  0.000000
12/31/2011	11:41:41 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:41:41 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:41:42 AM	Tube furnace set to 150
12/31/2011	11:42:12 AM	Helium valve closed
12/31/2011	11:42:12 AM	H2 valve closed
12/31/2011	11:42:12 AM	BCl3 valve closed
12/31/2011	11:42:12 AM	PH3 valve closed
12/31/2011	11:42:12 AM	SiCl4 pre valve closed
12/31/2011	11:42:12 AM	SiCl4 post valve closed
12/31/2011	11:42:12 AM	Bypass valve closed
12/31/2011	11:42:12 AM	Bubbler valve closed
12/31/2011	11:42:12 AM	Main Vac valve opened
12/31/2011	11:42:12 AM	Helium MFC set to  0.000000
12/31/2011	11:42:12 AM	H2 MFC set to  0.000000
12/31/2011	11:42:12 AM	BCl3 MFC set to  0.000000
12/31/2011	11:42:12 AM	PHl3 MFC set to  0.000000
12/31/2011	11:42:12 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:42:12 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:42:12 AM	Tube furnace set to 150
12/31/2011	11:42:42 AM	H2 valve closed
12/31/2011	11:42:42 AM	BCl3 valve closed
12/31/2011	11:42:42 AM	PH3 valve closed
12/31/2011	11:42:42 AM	SiCl4 pre valve closed
12/31/2011	11:42:42 AM	SiCl4 post valve closed
12/31/2011	11:42:42 AM	Bypass valve closed
12/31/2011	11:42:42 AM	Bubbler valve closed
12/31/2011	11:42:42 AM	Helium valve opened
12/31/2011	11:42:42 AM	Main Vac valve opened
12/31/2011	11:42:42 AM	Helium MFC set to  20.000000
12/31/2011	11:42:42 AM	H2 MFC set to  0.000000
12/31/2011	11:42:42 AM	BCl3 MFC set to  0.000000
12/31/2011	11:42:42 AM	PHl3 MFC set to  0.000000
12/31/2011	11:42:42 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:42:42 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:42:42 AM	Tube furnace set to 150
12/31/2011	11:43:12 AM	Helium valve closed
12/31/2011	11:43:12 AM	H2 valve closed
12/31/2011	11:43:12 AM	BCl3 valve closed
12/31/2011	11:43:12 AM	PH3 valve closed
12/31/2011	11:43:12 AM	SiCl4 pre valve closed
12/31/2011	11:43:12 AM	SiCl4 post valve closed
12/31/2011	11:43:12 AM	Bypass valve closed
12/31/2011	11:43:12 AM	Bubbler valve closed
12/31/2011	11:43:12 AM	Main Vac valve opened
12/31/2011	11:43:12 AM	Helium MFC set to  0.000000
12/31/2011	11:43:12 AM	H2 MFC set to  0.000000
12/31/2011	11:43:12 AM	BCl3 MFC set to  0.000000
12/31/2011	11:43:12 AM	PHl3 MFC set to  0.000000
12/31/2011	11:43:12 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:43:12 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:43:12 AM	Tube furnace set to 150
12/31/2011	11:43:42 AM	H2 valve closed
12/31/2011	11:43:42 AM	BCl3 valve closed
12/31/2011	11:43:42 AM	PH3 valve closed
12/31/2011	11:43:42 AM	SiCl4 pre valve closed
12/31/2011	11:43:42 AM	SiCl4 post valve closed
12/31/2011	11:43:42 AM	Bypass valve closed
12/31/2011	11:43:42 AM	Bubbler valve closed
12/31/2011	11:43:42 AM	Helium valve opened
12/31/2011	11:43:42 AM	Main Vac valve opened
12/31/2011	11:43:42 AM	Helium MFC set to  20.000000
12/31/2011	11:43:42 AM	H2 MFC set to  0.000000
12/31/2011	11:43:42 AM	BCl3 MFC set to  0.000000
12/31/2011	11:43:42 AM	PHl3 MFC set to  0.000000
12/31/2011	11:43:42 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:43:42 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:43:42 AM	Tube furnace set to 150
12/31/2011	11:44:12 AM	Helium valve closed
12/31/2011	11:44:12 AM	H2 valve closed
12/31/2011	11:44:12 AM	BCl3 valve closed
12/31/2011	11:44:12 AM	PH3 valve closed
12/31/2011	11:44:12 AM	SiCl4 pre valve closed
12/31/2011	11:44:12 AM	SiCl4 post valve closed
12/31/2011	11:44:12 AM	Bypass valve closed
12/31/2011	11:44:12 AM	Bubbler valve closed
12/31/2011	11:44:12 AM	Main Vac valve opened
12/31/2011	11:44:12 AM	Helium MFC set to  0.000000
12/31/2011	11:44:12 AM	H2 MFC set to  0.000000
12/31/2011	11:44:12 AM	BCl3 MFC set to  0.000000
12/31/2011	11:44:12 AM	PHl3 MFC set to  0.000000
12/31/2011	11:44:12 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:44:12 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:44:13 AM	Tube furnace set to 150
12/31/2011	11:44:43 AM	H2 valve closed
12/31/2011	11:44:43 AM	BCl3 valve closed
12/31/2011	11:44:43 AM	PH3 valve closed
12/31/2011	11:44:43 AM	SiCl4 pre valve closed
12/31/2011	11:44:43 AM	SiCl4 post valve closed
12/31/2011	11:44:43 AM	Bypass valve closed
12/31/2011	11:44:43 AM	Bubbler valve closed
12/31/2011	11:44:43 AM	Helium valve opened
12/31/2011	11:44:43 AM	Main Vac valve opened
12/31/2011	11:44:43 AM	Helium MFC set to  20.000000
12/31/2011	11:44:43 AM	H2 MFC set to  0.000000
12/31/2011	11:44:43 AM	BCl3 MFC set to  0.000000
12/31/2011	11:44:43 AM	PHl3 MFC set to  0.000000
12/31/2011	11:44:43 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:44:43 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:44:43 AM	Tube furnace set to 150
12/31/2011	11:45:13 AM	Helium valve closed
12/31/2011	11:45:13 AM	H2 valve closed
12/31/2011	11:45:13 AM	BCl3 valve closed
12/31/2011	11:45:13 AM	PH3 valve closed
12/31/2011	11:45:13 AM	SiCl4 pre valve closed
12/31/2011	11:45:13 AM	SiCl4 post valve closed
12/31/2011	11:45:13 AM	Bypass valve closed
12/31/2011	11:45:13 AM	Bubbler valve closed
12/31/2011	11:45:13 AM	Main Vac valve opened
12/31/2011	11:45:13 AM	Helium MFC set to  0.000000
12/31/2011	11:45:13 AM	H2 MFC set to  0.000000
12/31/2011	11:45:13 AM	BCl3 MFC set to  0.000000
12/31/2011	11:45:13 AM	PHl3 MFC set to  0.000000
12/31/2011	11:45:13 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:45:13 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:45:13 AM	Tube furnace set to 150
12/31/2011	11:45:43 AM	H2 valve closed
12/31/2011	11:45:43 AM	BCl3 valve closed
12/31/2011	11:45:43 AM	PH3 valve closed
12/31/2011	11:45:43 AM	SiCl4 pre valve closed
12/31/2011	11:45:43 AM	SiCl4 post valve closed
12/31/2011	11:45:43 AM	Bypass valve closed
12/31/2011	11:45:43 AM	Bubbler valve closed
12/31/2011	11:45:43 AM	Helium valve opened
12/31/2011	11:45:43 AM	Main Vac valve opened
12/31/2011	11:45:43 AM	Helium MFC set to  20.000000
12/31/2011	11:45:43 AM	H2 MFC set to  0.000000
12/31/2011	11:45:43 AM	BCl3 MFC set to  0.000000
12/31/2011	11:45:43 AM	PHl3 MFC set to  0.000000
12/31/2011	11:45:43 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:45:43 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:45:43 AM	Tube furnace set to 150
12/31/2011	11:46:13 AM	Helium valve closed
12/31/2011	11:46:13 AM	H2 valve closed
12/31/2011	11:46:13 AM	BCl3 valve closed
12/31/2011	11:46:13 AM	PH3 valve closed
12/31/2011	11:46:13 AM	SiCl4 pre valve closed
12/31/2011	11:46:13 AM	SiCl4 post valve closed
12/31/2011	11:46:13 AM	Bypass valve closed
12/31/2011	11:46:13 AM	Bubbler valve closed
12/31/2011	11:46:13 AM	Main Vac valve opened
12/31/2011	11:46:13 AM	Helium MFC set to  0.000000
12/31/2011	11:46:13 AM	H2 MFC set to  0.000000
12/31/2011	11:46:13 AM	BCl3 MFC set to  0.000000
12/31/2011	11:46:13 AM	PHl3 MFC set to  0.000000
12/31/2011	11:46:13 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:46:13 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:46:14 AM	Tube furnace set to 150
12/31/2011	11:46:44 AM	H2 valve closed
12/31/2011	11:46:44 AM	BCl3 valve closed
12/31/2011	11:46:44 AM	PH3 valve closed
12/31/2011	11:46:44 AM	SiCl4 pre valve closed
12/31/2011	11:46:44 AM	SiCl4 post valve closed
12/31/2011	11:46:44 AM	Bypass valve closed
12/31/2011	11:46:44 AM	Bubbler valve closed
12/31/2011	11:46:44 AM	Helium valve opened
12/31/2011	11:46:44 AM	Main Vac valve opened
12/31/2011	11:46:44 AM	Helium MFC set to  20.000000
12/31/2011	11:46:44 AM	H2 MFC set to  0.000000
12/31/2011	11:46:44 AM	BCl3 MFC set to  0.000000
12/31/2011	11:46:44 AM	PHl3 MFC set to  0.000000
12/31/2011	11:46:44 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:46:44 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:46:44 AM	Tube furnace set to 150
12/31/2011	11:47:14 AM	Helium valve closed
12/31/2011	11:47:14 AM	H2 valve closed
12/31/2011	11:47:14 AM	BCl3 valve closed
12/31/2011	11:47:14 AM	PH3 valve closed
12/31/2011	11:47:14 AM	SiCl4 pre valve closed
12/31/2011	11:47:14 AM	SiCl4 post valve closed
12/31/2011	11:47:14 AM	Bypass valve closed
12/31/2011	11:47:14 AM	Bubbler valve closed
12/31/2011	11:47:14 AM	Main Vac valve opened
12/31/2011	11:47:14 AM	Helium MFC set to  0.000000
12/31/2011	11:47:14 AM	H2 MFC set to  0.000000
12/31/2011	11:47:14 AM	BCl3 MFC set to  0.000000
12/31/2011	11:47:14 AM	PHl3 MFC set to  0.000000
12/31/2011	11:47:14 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:47:14 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:47:14 AM	Tube furnace set to 150
12/31/2011	11:47:44 AM	H2 valve closed
12/31/2011	11:47:44 AM	BCl3 valve closed
12/31/2011	11:47:44 AM	PH3 valve closed
12/31/2011	11:47:44 AM	SiCl4 pre valve closed
12/31/2011	11:47:44 AM	SiCl4 post valve closed
12/31/2011	11:47:44 AM	Bypass valve closed
12/31/2011	11:47:44 AM	Bubbler valve closed
12/31/2011	11:47:44 AM	Helium valve opened
12/31/2011	11:47:44 AM	Main Vac valve opened
12/31/2011	11:47:44 AM	Helium MFC set to  20.000000
12/31/2011	11:47:44 AM	H2 MFC set to  0.000000
12/31/2011	11:47:44 AM	BCl3 MFC set to  0.000000
12/31/2011	11:47:44 AM	PHl3 MFC set to  0.000000
12/31/2011	11:47:44 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:47:44 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:47:44 AM	Tube furnace set to 150
12/31/2011	11:48:14 AM	Helium valve closed
12/31/2011	11:48:14 AM	H2 valve closed
12/31/2011	11:48:14 AM	BCl3 valve closed
12/31/2011	11:48:14 AM	PH3 valve closed
12/31/2011	11:48:14 AM	SiCl4 pre valve closed
12/31/2011	11:48:14 AM	SiCl4 post valve closed
12/31/2011	11:48:14 AM	Bypass valve closed
12/31/2011	11:48:14 AM	Bubbler valve closed
12/31/2011	11:48:14 AM	Main Vac valve opened
12/31/2011	11:48:14 AM	Helium MFC set to  0.000000
12/31/2011	11:48:14 AM	H2 MFC set to  0.000000
12/31/2011	11:48:14 AM	BCl3 MFC set to  0.000000
12/31/2011	11:48:14 AM	PHl3 MFC set to  0.000000
12/31/2011	11:48:14 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:48:14 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:48:14 AM	Tube furnace set to 150
12/31/2011	11:48:44 AM	H2 valve closed
12/31/2011	11:48:44 AM	BCl3 valve closed
12/31/2011	11:48:44 AM	PH3 valve closed
12/31/2011	11:48:44 AM	SiCl4 pre valve closed
12/31/2011	11:48:44 AM	SiCl4 post valve closed
12/31/2011	11:48:44 AM	Bypass valve closed
12/31/2011	11:48:44 AM	Bubbler valve closed
12/31/2011	11:48:44 AM	Helium valve opened
12/31/2011	11:48:44 AM	Main Vac valve opened
12/31/2011	11:48:44 AM	Helium MFC set to  20.000000
12/31/2011	11:48:44 AM	H2 MFC set to  0.000000
12/31/2011	11:48:44 AM	BCl3 MFC set to  0.000000
12/31/2011	11:48:44 AM	PHl3 MFC set to  0.000000
12/31/2011	11:48:44 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:48:44 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:48:45 AM	Tube furnace set to 150
12/31/2011	11:49:15 AM	Helium valve closed
12/31/2011	11:49:15 AM	H2 valve closed
12/31/2011	11:49:15 AM	BCl3 valve closed
12/31/2011	11:49:15 AM	PH3 valve closed
12/31/2011	11:49:15 AM	SiCl4 pre valve closed
12/31/2011	11:49:15 AM	SiCl4 post valve closed
12/31/2011	11:49:15 AM	Bypass valve closed
12/31/2011	11:49:15 AM	Bubbler valve closed
12/31/2011	11:49:15 AM	Main Vac valve opened
12/31/2011	11:49:15 AM	Helium MFC set to  0.000000
12/31/2011	11:49:15 AM	H2 MFC set to  0.000000
12/31/2011	11:49:15 AM	BCl3 MFC set to  0.000000
12/31/2011	11:49:15 AM	PHl3 MFC set to  0.000000
12/31/2011	11:49:15 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:49:15 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:49:15 AM	Tube furnace set to 150
12/31/2011	11:49:45 AM	H2 valve closed
12/31/2011	11:49:45 AM	BCl3 valve closed
12/31/2011	11:49:45 AM	PH3 valve closed
12/31/2011	11:49:45 AM	SiCl4 pre valve closed
12/31/2011	11:49:45 AM	SiCl4 post valve closed
12/31/2011	11:49:45 AM	Bypass valve closed
12/31/2011	11:49:45 AM	Bubbler valve closed
12/31/2011	11:49:45 AM	Helium valve opened
12/31/2011	11:49:45 AM	Main Vac valve opened
12/31/2011	11:49:45 AM	Helium MFC set to  20.000000
12/31/2011	11:49:45 AM	H2 MFC set to  0.000000
12/31/2011	11:49:45 AM	BCl3 MFC set to  0.000000
12/31/2011	11:49:45 AM	PHl3 MFC set to  0.000000
12/31/2011	11:49:45 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:49:45 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:49:45 AM	Tube furnace set to 150
12/31/2011	11:50:15 AM	Helium valve closed
12/31/2011	11:50:15 AM	H2 valve closed
12/31/2011	11:50:15 AM	BCl3 valve closed
12/31/2011	11:50:15 AM	PH3 valve closed
12/31/2011	11:50:15 AM	SiCl4 pre valve closed
12/31/2011	11:50:15 AM	SiCl4 post valve closed
12/31/2011	11:50:15 AM	Bypass valve closed
12/31/2011	11:50:15 AM	Bubbler valve closed
12/31/2011	11:50:15 AM	Main Vac valve opened
12/31/2011	11:50:15 AM	Helium MFC set to  0.000000
12/31/2011	11:50:15 AM	H2 MFC set to  0.000000
12/31/2011	11:50:15 AM	BCl3 MFC set to  0.000000
12/31/2011	11:50:15 AM	PHl3 MFC set to  0.000000
12/31/2011	11:50:15 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:50:15 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:50:15 AM	Tube furnace set to 180
12/31/2011	11:50:20 AM	Run finished at 11:50 AM
12/31/2011	11:54:38 AM	Main Vac valve closed
12/31/2011	11:54:50 AM	Main Vac valve opened
12/31/2011	11:55:48 AM	Recipe started at 11:55 AM
12/31/2011	11:55:48 AM	Helium valve closed
12/31/2011	11:55:48 AM	H2 valve closed
12/31/2011	11:55:48 AM	BCl3 valve closed
12/31/2011	11:55:48 AM	PH3 valve closed
12/31/2011	11:55:48 AM	SiCl4 pre valve closed
12/31/2011	11:55:48 AM	SiCl4 post valve closed
12/31/2011	11:55:48 AM	Main Vac valve closed
12/31/2011	11:55:48 AM	Bypass valve closed
12/31/2011	11:55:48 AM	Bubbler valve closed
12/31/2011	11:55:48 AM	Helium MFC set to  0.000000
12/31/2011	11:55:48 AM	H2 MFC set to  0.000000
12/31/2011	11:55:48 AM	BCl3 MFC set to  0.000000
12/31/2011	11:55:48 AM	PHl3 MFC set to  0.000000
12/31/2011	11:55:48 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:55:48 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:55:48 AM	Tube furnace set to 0
12/31/2011	11:55:51 AM	Helium valve closed
12/31/2011	11:55:51 AM	BCl3 valve closed
12/31/2011	11:55:51 AM	PH3 valve closed
12/31/2011	11:55:51 AM	SiCl4 pre valve closed
12/31/2011	11:55:51 AM	SiCl4 post valve closed
12/31/2011	11:55:51 AM	Main Vac valve closed
12/31/2011	11:55:51 AM	Bypass valve closed
12/31/2011	11:55:51 AM	Bubbler valve closed
12/31/2011	11:55:51 AM	H2 valve opened
12/31/2011	11:55:51 AM	Helium MFC set to  0.000000
12/31/2011	11:55:51 AM	H2 MFC set to  500.000000
12/31/2011	11:55:51 AM	BCl3 MFC set to  0.000000
12/31/2011	11:55:51 AM	PHl3 MFC set to  0.000000
12/31/2011	11:55:51 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:55:51 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:55:51 AM	Tube furnace set to 50
12/31/2011	11:56:56 AM	Helium valve closed
12/31/2011	11:56:56 AM	BCl3 valve closed
12/31/2011	11:56:56 AM	PH3 valve closed
12/31/2011	11:56:56 AM	SiCl4 pre valve closed
12/31/2011	11:56:56 AM	SiCl4 post valve closed
12/31/2011	11:56:56 AM	Main Vac valve closed
12/31/2011	11:56:56 AM	Bypass valve closed
12/31/2011	11:56:56 AM	H2 valve opened
12/31/2011	11:56:56 AM	Bubbler valve opened
12/31/2011	11:56:56 AM	Helium MFC set to  0.000000
12/31/2011	11:56:56 AM	H2 MFC set to  500.000000
12/31/2011	11:56:56 AM	BCl3 MFC set to  0.000000
12/31/2011	11:56:56 AM	PHl3 MFC set to  0.000000
12/31/2011	11:56:56 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:56:56 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:56:56 AM	Tube furnace set to 50
12/31/2011	11:56:57 AM	Helium valve closed
12/31/2011	11:56:57 AM	BCl3 valve closed
12/31/2011	11:56:57 AM	PH3 valve closed
12/31/2011	11:56:57 AM	SiCl4 pre valve closed
12/31/2011	11:56:57 AM	SiCl4 post valve closed
12/31/2011	11:56:57 AM	Main Vac valve closed
12/31/2011	11:56:57 AM	Bypass valve closed
12/31/2011	11:56:57 AM	H2 valve opened
12/31/2011	11:56:57 AM	Bubbler valve opened
12/31/2011	11:56:57 AM	Helium MFC set to  0.000000
12/31/2011	11:56:57 AM	H2 MFC set to  495.000000
12/31/2011	11:56:57 AM	BCl3 MFC set to  0.000000
12/31/2011	11:56:57 AM	PHl3 MFC set to  0.000000
12/31/2011	11:56:57 AM	SiCl4 MFC set to  0.000000
12/31/2011	11:56:57 AM	Bypass solenoid MFC set to  0.000000
12/31/2011	11:56:57 AM	Tube furnace set to 1000
12/31/2011	12:16:57 PM	Helium valve closed
12/31/2011	12:16:57 PM	PH3 valve closed
12/31/2011	12:16:57 PM	Main Vac valve closed
12/31/2011	12:16:57 PM	Bypass valve closed
12/31/2011	12:16:57 PM	H2 valve opened
12/31/2011	12:16:57 PM	BCl3 valve opened
12/31/2011	12:16:57 PM	SiCl4 pre valve opened
12/31/2011	12:16:57 PM	SiCl4 post valve opened
12/31/2011	12:16:57 PM	Bubbler valve opened
12/31/2011	12:16:57 PM	Helium MFC set to  0.000000
12/31/2011	12:16:57 PM	H2 MFC set to  495.000000
12/31/2011	12:16:57 PM	BCl3 MFC set to  5.000000
12/31/2011	12:16:57 PM	PHl3 MFC set to  0.000000
12/31/2011	12:16:57 PM	SiCl4 MFC set to  25.000000
12/31/2011	12:16:57 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:16:57 PM	Tube furnace set to 1000
12/31/2011	12:31:57 PM	Helium valve closed
12/31/2011	12:31:57 PM	BCl3 valve closed
12/31/2011	12:31:57 PM	PH3 valve closed
12/31/2011	12:31:57 PM	SiCl4 pre valve closed
12/31/2011	12:31:57 PM	SiCl4 post valve closed
12/31/2011	12:31:57 PM	Main Vac valve closed
12/31/2011	12:31:57 PM	Bypass valve closed
12/31/2011	12:31:57 PM	H2 valve opened
12/31/2011	12:31:57 PM	Bubbler valve opened
12/31/2011	12:31:57 PM	Helium MFC set to  0.000000
12/31/2011	12:31:57 PM	H2 MFC set to  480.000000
12/31/2011	12:31:57 PM	BCl3 MFC set to  0.000000
12/31/2011	12:31:57 PM	PHl3 MFC set to  0.000000
12/31/2011	12:31:57 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:31:57 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:31:57 PM	Tube furnace set to 750
12/31/2011	12:41:57 PM	H2 valve closed
12/31/2011	12:41:57 PM	BCl3 valve closed
12/31/2011	12:41:57 PM	PH3 valve closed
12/31/2011	12:41:57 PM	SiCl4 pre valve closed
12/31/2011	12:41:57 PM	SiCl4 post valve closed
12/31/2011	12:41:57 PM	Main Vac valve closed
12/31/2011	12:41:57 PM	Bypass valve closed
12/31/2011	12:41:57 PM	Helium valve opened
12/31/2011	12:41:57 PM	Bubbler valve opened
12/31/2011	12:41:57 PM	Helium MFC set to  400.000000
12/31/2011	12:41:57 PM	H2 MFC set to  0.000000
12/31/2011	12:41:57 PM	BCl3 MFC set to  0.000000
12/31/2011	12:41:57 PM	PHl3 MFC set to  0.000000
12/31/2011	12:41:57 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:41:57 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:41:58 PM	Tube furnace set to 0
12/31/2011	12:48:55 PM	Run aborted at 12:48 PM
12/31/2011	12:48:55 PM	Helium valve closed
12/31/2011	12:48:55 PM	H2 valve closed
12/31/2011	12:48:55 PM	BCl3 valve closed
12/31/2011	12:48:55 PM	PH3 valve closed
12/31/2011	12:48:55 PM	SiCl4 pre valve closed
12/31/2011	12:48:55 PM	SiCl4 post valve closed
12/31/2011	12:48:55 PM	Bypass valve closed
12/31/2011	12:48:55 PM	Main Vac valve closed
12/31/2011	12:48:55 PM	Bubbler valve closed
12/31/2011	12:48:55 PM	Helium MFC set to  0.000000
12/31/2011	12:48:55 PM	H2 MFC set to  0.000000
12/31/2011	12:48:55 PM	BCl3 MFC set to  0.000000
12/31/2011	12:48:55 PM	PHl3 MFC set to  0.000000
12/31/2011	12:48:55 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:48:55 PM	Tube furnace set to 0
12/31/2011	12:48:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/31/2011	12:49:00 PM	Recipe started at 12:49 PM
12/31/2011	12:49:00 PM	Helium valve closed
12/31/2011	12:49:00 PM	H2 valve closed
12/31/2011	12:49:00 PM	BCl3 valve closed
12/31/2011	12:49:00 PM	PH3 valve closed
12/31/2011	12:49:00 PM	SiCl4 pre valve closed
12/31/2011	12:49:00 PM	SiCl4 post valve closed
12/31/2011	12:49:00 PM	Main Vac valve closed
12/31/2011	12:49:00 PM	Bypass valve closed
12/31/2011	12:49:00 PM	Bubbler valve closed
12/31/2011	12:49:00 PM	Helium MFC set to  0.000000
12/31/2011	12:49:00 PM	H2 MFC set to  0.000000
12/31/2011	12:49:00 PM	BCl3 MFC set to  0.000000
12/31/2011	12:49:00 PM	PHl3 MFC set to  0.000000
12/31/2011	12:49:00 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:49:00 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:49:00 PM	Tube furnace set to 0
12/31/2011	12:49:03 PM	H2 valve closed
12/31/2011	12:49:03 PM	BCl3 valve closed
12/31/2011	12:49:03 PM	PH3 valve closed
12/31/2011	12:49:03 PM	SiCl4 pre valve closed
12/31/2011	12:49:03 PM	SiCl4 post valve closed
12/31/2011	12:49:03 PM	Main Vac valve closed
12/31/2011	12:49:03 PM	Bypass valve closed
12/31/2011	12:49:03 PM	Bubbler valve closed
12/31/2011	12:49:03 PM	Helium valve opened
12/31/2011	12:49:03 PM	Helium MFC set to  500.000000
12/31/2011	12:49:03 PM	H2 MFC set to  0.000000
12/31/2011	12:49:03 PM	BCl3 MFC set to  0.000000
12/31/2011	12:49:03 PM	PHl3 MFC set to  0.000000
12/31/2011	12:49:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:49:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:49:04 PM	Tube furnace set to 0
12/31/2011	12:49:04 PM	Helium valve closed
12/31/2011	12:49:04 PM	H2 valve closed
12/31/2011	12:49:04 PM	BCl3 valve closed
12/31/2011	12:49:04 PM	PH3 valve closed
12/31/2011	12:49:04 PM	SiCl4 pre valve closed
12/31/2011	12:49:04 PM	SiCl4 post valve closed
12/31/2011	12:49:04 PM	Main Vac valve closed
12/31/2011	12:49:04 PM	Bypass valve closed
12/31/2011	12:49:04 PM	Bubbler valve closed
12/31/2011	12:49:04 PM	Helium MFC set to  0.000000
12/31/2011	12:49:04 PM	H2 MFC set to  0.000000
12/31/2011	12:49:04 PM	BCl3 MFC set to  0.000000
12/31/2011	12:49:04 PM	PHl3 MFC set to  0.000000
12/31/2011	12:49:04 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:49:04 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:49:04 PM	Tube furnace set to 0
12/31/2011	12:49:05 PM	Run finished at 12:49 PM
12/31/2011	12:49:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/31/2011	12:53:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	12:53:03 PM	Recipe started at 12:53 PM
12/31/2011	12:53:03 PM	Helium valve closed
12/31/2011	12:53:03 PM	H2 valve closed
12/31/2011	12:53:03 PM	BCl3 valve closed
12/31/2011	12:53:03 PM	PH3 valve closed
12/31/2011	12:53:03 PM	SiCl4 pre valve closed
12/31/2011	12:53:03 PM	SiCl4 post valve closed
12/31/2011	12:53:03 PM	Main Vac valve closed
12/31/2011	12:53:03 PM	Bubbler valve closed
12/31/2011	12:53:03 PM	Bypass valve opened
12/31/2011	12:53:03 PM	Helium MFC set to  0.000000
12/31/2011	12:53:03 PM	H2 MFC set to  0.000000
12/31/2011	12:53:03 PM	BCl3 MFC set to  0.000000
12/31/2011	12:53:03 PM	PHl3 MFC set to  0.000000
12/31/2011	12:53:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:53:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:53:03 PM	Tube furnace set to 0
12/31/2011	12:55:13 PM	Helium valve closed
12/31/2011	12:55:13 PM	H2 valve closed
12/31/2011	12:55:13 PM	BCl3 valve closed
12/31/2011	12:55:13 PM	PH3 valve closed
12/31/2011	12:55:13 PM	SiCl4 pre valve closed
12/31/2011	12:55:13 PM	SiCl4 post valve closed
12/31/2011	12:55:13 PM	Main Vac valve closed
12/31/2011	12:55:13 PM	Bubbler valve closed
12/31/2011	12:55:13 PM	Bypass valve opened
12/31/2011	12:55:13 PM	Helium MFC set to  0.000000
12/31/2011	12:55:13 PM	H2 MFC set to  0.000000
12/31/2011	12:55:13 PM	BCl3 MFC set to  0.000000
12/31/2011	12:55:13 PM	PHl3 MFC set to  0.000000
12/31/2011	12:55:13 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:55:13 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:55:14 PM	Tube furnace set to 0
12/31/2011	12:56:14 PM	Helium valve closed
12/31/2011	12:56:14 PM	H2 valve closed
12/31/2011	12:56:14 PM	BCl3 valve closed
12/31/2011	12:56:14 PM	PH3 valve closed
12/31/2011	12:56:14 PM	SiCl4 pre valve closed
12/31/2011	12:56:14 PM	SiCl4 post valve closed
12/31/2011	12:56:14 PM	Bypass valve closed
12/31/2011	12:56:14 PM	Bubbler valve closed
12/31/2011	12:56:14 PM	Main Vac valve opened
12/31/2011	12:56:14 PM	Helium MFC set to  0.000000
12/31/2011	12:56:14 PM	H2 MFC set to  0.000000
12/31/2011	12:56:14 PM	BCl3 MFC set to  0.000000
12/31/2011	12:56:14 PM	PHl3 MFC set to  0.000000
12/31/2011	12:56:14 PM	SiCl4 MFC set to  0.000000
12/31/2011	12:56:14 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	12:56:14 PM	Tube furnace set to 0
12/31/2011	12:56:15 PM	Run finished at 12:56 PM
12/31/2011	12:56:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	1:15:29 PM	Recipe started at 1:15 PM
12/31/2011	1:15:29 PM	Helium valve closed
12/31/2011	1:15:29 PM	H2 valve closed
12/31/2011	1:15:29 PM	BCl3 valve closed
12/31/2011	1:15:29 PM	PH3 valve closed
12/31/2011	1:15:29 PM	SiCl4 pre valve closed
12/31/2011	1:15:29 PM	SiCl4 post valve closed
12/31/2011	1:15:29 PM	Main Vac valve closed
12/31/2011	1:15:29 PM	Bubbler valve closed
12/31/2011	1:15:29 PM	Bypass valve opened
12/31/2011	1:15:29 PM	Helium MFC set to  0.000000
12/31/2011	1:15:29 PM	H2 MFC set to  0.000000
12/31/2011	1:15:29 PM	BCl3 MFC set to  0.000000
12/31/2011	1:15:29 PM	PHl3 MFC set to  0.000000
12/31/2011	1:15:29 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:15:29 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:15:29 PM	Tube furnace set to 180
12/31/2011	1:15:33 PM	Helium valve closed
12/31/2011	1:15:33 PM	H2 valve closed
12/31/2011	1:15:33 PM	BCl3 valve closed
12/31/2011	1:15:33 PM	PH3 valve closed
12/31/2011	1:15:33 PM	SiCl4 pre valve closed
12/31/2011	1:15:33 PM	SiCl4 post valve closed
12/31/2011	1:15:33 PM	Main Vac valve closed
12/31/2011	1:15:33 PM	Bubbler valve closed
12/31/2011	1:15:33 PM	Bypass valve opened
12/31/2011	1:15:33 PM	Helium MFC set to  0.000000
12/31/2011	1:15:33 PM	H2 MFC set to  0.000000
12/31/2011	1:15:33 PM	BCl3 MFC set to  0.000000
12/31/2011	1:15:33 PM	PHl3 MFC set to  0.000000
12/31/2011	1:15:33 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:15:33 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:15:33 PM	Tube furnace set to 150
12/31/2011	1:16:03 PM	Helium valve closed
12/31/2011	1:16:03 PM	H2 valve closed
12/31/2011	1:16:03 PM	BCl3 valve closed
12/31/2011	1:16:03 PM	PH3 valve closed
12/31/2011	1:16:03 PM	SiCl4 pre valve closed
12/31/2011	1:16:03 PM	SiCl4 post valve closed
12/31/2011	1:16:03 PM	Bypass valve closed
12/31/2011	1:16:03 PM	Bubbler valve closed
12/31/2011	1:16:03 PM	Main Vac valve opened
12/31/2011	1:16:03 PM	Helium MFC set to  0.000000
12/31/2011	1:16:03 PM	H2 MFC set to  0.000000
12/31/2011	1:16:03 PM	BCl3 MFC set to  0.000000
12/31/2011	1:16:03 PM	PHl3 MFC set to  0.000000
12/31/2011	1:16:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:16:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:16:03 PM	Tube furnace set to 180
12/31/2011	1:16:33 PM	H2 valve closed
12/31/2011	1:16:33 PM	BCl3 valve closed
12/31/2011	1:16:33 PM	PH3 valve closed
12/31/2011	1:16:33 PM	SiCl4 pre valve closed
12/31/2011	1:16:33 PM	SiCl4 post valve closed
12/31/2011	1:16:33 PM	Bypass valve closed
12/31/2011	1:16:33 PM	Bubbler valve closed
12/31/2011	1:16:33 PM	Helium valve opened
12/31/2011	1:16:33 PM	Main Vac valve opened
12/31/2011	1:16:33 PM	Helium MFC set to  20.000000
12/31/2011	1:16:33 PM	H2 MFC set to  0.000000
12/31/2011	1:16:33 PM	BCl3 MFC set to  0.000000
12/31/2011	1:16:33 PM	PHl3 MFC set to  0.000000
12/31/2011	1:16:33 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:16:33 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:16:33 PM	Tube furnace set to 180
12/31/2011	1:17:03 PM	Helium valve closed
12/31/2011	1:17:03 PM	H2 valve closed
12/31/2011	1:17:03 PM	BCl3 valve closed
12/31/2011	1:17:03 PM	PH3 valve closed
12/31/2011	1:17:03 PM	SiCl4 pre valve closed
12/31/2011	1:17:03 PM	SiCl4 post valve closed
12/31/2011	1:17:03 PM	Bypass valve closed
12/31/2011	1:17:03 PM	Bubbler valve closed
12/31/2011	1:17:03 PM	Main Vac valve opened
12/31/2011	1:17:03 PM	Helium MFC set to  0.000000
12/31/2011	1:17:03 PM	H2 MFC set to  0.000000
12/31/2011	1:17:03 PM	BCl3 MFC set to  0.000000
12/31/2011	1:17:03 PM	PHl3 MFC set to  0.000000
12/31/2011	1:17:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:17:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:17:04 PM	Tube furnace set to 150
12/31/2011	1:17:34 PM	H2 valve closed
12/31/2011	1:17:34 PM	BCl3 valve closed
12/31/2011	1:17:34 PM	PH3 valve closed
12/31/2011	1:17:34 PM	SiCl4 pre valve closed
12/31/2011	1:17:34 PM	SiCl4 post valve closed
12/31/2011	1:17:34 PM	Bypass valve closed
12/31/2011	1:17:34 PM	Bubbler valve closed
12/31/2011	1:17:34 PM	Helium valve opened
12/31/2011	1:17:34 PM	Main Vac valve opened
12/31/2011	1:17:34 PM	Helium MFC set to  20.000000
12/31/2011	1:17:34 PM	H2 MFC set to  0.000000
12/31/2011	1:17:34 PM	BCl3 MFC set to  0.000000
12/31/2011	1:17:34 PM	PHl3 MFC set to  0.000000
12/31/2011	1:17:34 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:17:34 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:17:34 PM	Tube furnace set to 180
12/31/2011	1:18:04 PM	Helium valve closed
12/31/2011	1:18:04 PM	H2 valve closed
12/31/2011	1:18:04 PM	BCl3 valve closed
12/31/2011	1:18:04 PM	PH3 valve closed
12/31/2011	1:18:04 PM	SiCl4 pre valve closed
12/31/2011	1:18:04 PM	SiCl4 post valve closed
12/31/2011	1:18:04 PM	Bypass valve closed
12/31/2011	1:18:04 PM	Bubbler valve closed
12/31/2011	1:18:04 PM	Main Vac valve opened
12/31/2011	1:18:04 PM	Helium MFC set to  0.000000
12/31/2011	1:18:04 PM	H2 MFC set to  0.000000
12/31/2011	1:18:04 PM	BCl3 MFC set to  0.000000
12/31/2011	1:18:04 PM	PHl3 MFC set to  0.000000
12/31/2011	1:18:04 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:18:04 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:18:04 PM	Tube furnace set to 150
12/31/2011	1:18:34 PM	H2 valve closed
12/31/2011	1:18:34 PM	BCl3 valve closed
12/31/2011	1:18:34 PM	PH3 valve closed
12/31/2011	1:18:34 PM	SiCl4 pre valve closed
12/31/2011	1:18:34 PM	SiCl4 post valve closed
12/31/2011	1:18:34 PM	Bypass valve closed
12/31/2011	1:18:34 PM	Bubbler valve closed
12/31/2011	1:18:34 PM	Helium valve opened
12/31/2011	1:18:34 PM	Main Vac valve opened
12/31/2011	1:18:34 PM	Helium MFC set to  20.000000
12/31/2011	1:18:34 PM	H2 MFC set to  0.000000
12/31/2011	1:18:34 PM	BCl3 MFC set to  0.000000
12/31/2011	1:18:34 PM	PHl3 MFC set to  0.000000
12/31/2011	1:18:34 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:18:34 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:18:34 PM	Tube furnace set to 150
12/31/2011	1:19:04 PM	Helium valve closed
12/31/2011	1:19:04 PM	H2 valve closed
12/31/2011	1:19:04 PM	BCl3 valve closed
12/31/2011	1:19:04 PM	PH3 valve closed
12/31/2011	1:19:04 PM	SiCl4 pre valve closed
12/31/2011	1:19:04 PM	SiCl4 post valve closed
12/31/2011	1:19:04 PM	Bypass valve closed
12/31/2011	1:19:04 PM	Bubbler valve closed
12/31/2011	1:19:04 PM	Main Vac valve opened
12/31/2011	1:19:04 PM	Helium MFC set to  0.000000
12/31/2011	1:19:04 PM	H2 MFC set to  0.000000
12/31/2011	1:19:04 PM	BCl3 MFC set to  0.000000
12/31/2011	1:19:04 PM	PHl3 MFC set to  0.000000
12/31/2011	1:19:04 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:19:04 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:19:04 PM	Tube furnace set to 150
12/31/2011	1:19:34 PM	H2 valve closed
12/31/2011	1:19:34 PM	BCl3 valve closed
12/31/2011	1:19:34 PM	PH3 valve closed
12/31/2011	1:19:34 PM	SiCl4 pre valve closed
12/31/2011	1:19:34 PM	SiCl4 post valve closed
12/31/2011	1:19:34 PM	Bypass valve closed
12/31/2011	1:19:34 PM	Bubbler valve closed
12/31/2011	1:19:34 PM	Helium valve opened
12/31/2011	1:19:34 PM	Main Vac valve opened
12/31/2011	1:19:34 PM	Helium MFC set to  20.000000
12/31/2011	1:19:34 PM	H2 MFC set to  0.000000
12/31/2011	1:19:34 PM	BCl3 MFC set to  0.000000
12/31/2011	1:19:34 PM	PHl3 MFC set to  0.000000
12/31/2011	1:19:34 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:19:34 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:19:35 PM	Tube furnace set to 180
12/31/2011	1:20:05 PM	Helium valve closed
12/31/2011	1:20:05 PM	H2 valve closed
12/31/2011	1:20:05 PM	BCl3 valve closed
12/31/2011	1:20:05 PM	PH3 valve closed
12/31/2011	1:20:05 PM	SiCl4 pre valve closed
12/31/2011	1:20:05 PM	SiCl4 post valve closed
12/31/2011	1:20:05 PM	Bypass valve closed
12/31/2011	1:20:05 PM	Bubbler valve closed
12/31/2011	1:20:05 PM	Main Vac valve opened
12/31/2011	1:20:05 PM	Helium MFC set to  0.000000
12/31/2011	1:20:05 PM	H2 MFC set to  0.000000
12/31/2011	1:20:05 PM	BCl3 MFC set to  0.000000
12/31/2011	1:20:05 PM	PHl3 MFC set to  0.000000
12/31/2011	1:20:05 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:20:05 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:20:05 PM	Tube furnace set to 150
12/31/2011	1:20:35 PM	H2 valve closed
12/31/2011	1:20:35 PM	BCl3 valve closed
12/31/2011	1:20:35 PM	PH3 valve closed
12/31/2011	1:20:35 PM	SiCl4 pre valve closed
12/31/2011	1:20:35 PM	SiCl4 post valve closed
12/31/2011	1:20:35 PM	Bypass valve closed
12/31/2011	1:20:35 PM	Bubbler valve closed
12/31/2011	1:20:35 PM	Helium valve opened
12/31/2011	1:20:35 PM	Main Vac valve opened
12/31/2011	1:20:35 PM	Helium MFC set to  20.000000
12/31/2011	1:20:35 PM	H2 MFC set to  0.000000
12/31/2011	1:20:35 PM	BCl3 MFC set to  0.000000
12/31/2011	1:20:35 PM	PHl3 MFC set to  0.000000
12/31/2011	1:20:35 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:20:35 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:20:35 PM	Tube furnace set to 150
12/31/2011	1:21:05 PM	Helium valve closed
12/31/2011	1:21:05 PM	H2 valve closed
12/31/2011	1:21:05 PM	BCl3 valve closed
12/31/2011	1:21:05 PM	PH3 valve closed
12/31/2011	1:21:05 PM	SiCl4 pre valve closed
12/31/2011	1:21:05 PM	SiCl4 post valve closed
12/31/2011	1:21:05 PM	Bypass valve closed
12/31/2011	1:21:05 PM	Bubbler valve closed
12/31/2011	1:21:05 PM	Main Vac valve opened
12/31/2011	1:21:05 PM	Helium MFC set to  0.000000
12/31/2011	1:21:05 PM	H2 MFC set to  0.000000
12/31/2011	1:21:05 PM	BCl3 MFC set to  0.000000
12/31/2011	1:21:05 PM	PHl3 MFC set to  0.000000
12/31/2011	1:21:05 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:21:05 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:21:05 PM	Tube furnace set to 150
12/31/2011	1:21:35 PM	H2 valve closed
12/31/2011	1:21:35 PM	BCl3 valve closed
12/31/2011	1:21:35 PM	PH3 valve closed
12/31/2011	1:21:35 PM	SiCl4 pre valve closed
12/31/2011	1:21:35 PM	SiCl4 post valve closed
12/31/2011	1:21:35 PM	Bypass valve closed
12/31/2011	1:21:35 PM	Bubbler valve closed
12/31/2011	1:21:35 PM	Helium valve opened
12/31/2011	1:21:35 PM	Main Vac valve opened
12/31/2011	1:21:35 PM	Helium MFC set to  20.000000
12/31/2011	1:21:35 PM	H2 MFC set to  0.000000
12/31/2011	1:21:35 PM	BCl3 MFC set to  0.000000
12/31/2011	1:21:35 PM	PHl3 MFC set to  0.000000
12/31/2011	1:21:35 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:21:35 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:21:35 PM	Tube furnace set to 150
12/31/2011	1:22:05 PM	Helium valve closed
12/31/2011	1:22:05 PM	H2 valve closed
12/31/2011	1:22:05 PM	BCl3 valve closed
12/31/2011	1:22:05 PM	PH3 valve closed
12/31/2011	1:22:05 PM	SiCl4 pre valve closed
12/31/2011	1:22:05 PM	SiCl4 post valve closed
12/31/2011	1:22:05 PM	Bypass valve closed
12/31/2011	1:22:05 PM	Bubbler valve closed
12/31/2011	1:22:05 PM	Main Vac valve opened
12/31/2011	1:22:05 PM	Helium MFC set to  0.000000
12/31/2011	1:22:05 PM	H2 MFC set to  0.000000
12/31/2011	1:22:05 PM	BCl3 MFC set to  0.000000
12/31/2011	1:22:05 PM	PHl3 MFC set to  0.000000
12/31/2011	1:22:06 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:22:06 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:22:06 PM	Tube furnace set to 150
12/31/2011	1:22:36 PM	H2 valve closed
12/31/2011	1:22:36 PM	BCl3 valve closed
12/31/2011	1:22:36 PM	PH3 valve closed
12/31/2011	1:22:36 PM	SiCl4 pre valve closed
12/31/2011	1:22:36 PM	SiCl4 post valve closed
12/31/2011	1:22:36 PM	Bypass valve closed
12/31/2011	1:22:36 PM	Bubbler valve closed
12/31/2011	1:22:36 PM	Helium valve opened
12/31/2011	1:22:36 PM	Main Vac valve opened
12/31/2011	1:22:36 PM	Helium MFC set to  20.000000
12/31/2011	1:22:36 PM	H2 MFC set to  0.000000
12/31/2011	1:22:36 PM	BCl3 MFC set to  0.000000
12/31/2011	1:22:36 PM	PHl3 MFC set to  0.000000
12/31/2011	1:22:36 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:22:36 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:22:36 PM	Tube furnace set to 150
12/31/2011	1:23:06 PM	Helium valve closed
12/31/2011	1:23:06 PM	H2 valve closed
12/31/2011	1:23:06 PM	BCl3 valve closed
12/31/2011	1:23:06 PM	PH3 valve closed
12/31/2011	1:23:06 PM	SiCl4 pre valve closed
12/31/2011	1:23:06 PM	SiCl4 post valve closed
12/31/2011	1:23:06 PM	Bypass valve closed
12/31/2011	1:23:06 PM	Bubbler valve closed
12/31/2011	1:23:06 PM	Main Vac valve opened
12/31/2011	1:23:06 PM	Helium MFC set to  0.000000
12/31/2011	1:23:06 PM	H2 MFC set to  0.000000
12/31/2011	1:23:06 PM	BCl3 MFC set to  0.000000
12/31/2011	1:23:06 PM	PHl3 MFC set to  0.000000
12/31/2011	1:23:06 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:23:06 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:23:06 PM	Tube furnace set to 150
12/31/2011	1:23:36 PM	H2 valve closed
12/31/2011	1:23:36 PM	BCl3 valve closed
12/31/2011	1:23:36 PM	PH3 valve closed
12/31/2011	1:23:36 PM	SiCl4 pre valve closed
12/31/2011	1:23:36 PM	SiCl4 post valve closed
12/31/2011	1:23:36 PM	Bypass valve closed
12/31/2011	1:23:36 PM	Bubbler valve closed
12/31/2011	1:23:36 PM	Helium valve opened
12/31/2011	1:23:36 PM	Main Vac valve opened
12/31/2011	1:23:36 PM	Helium MFC set to  20.000000
12/31/2011	1:23:36 PM	H2 MFC set to  0.000000
12/31/2011	1:23:36 PM	BCl3 MFC set to  0.000000
12/31/2011	1:23:36 PM	PHl3 MFC set to  0.000000
12/31/2011	1:23:36 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:23:36 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:23:36 PM	Tube furnace set to 150
12/31/2011	1:24:06 PM	Helium valve closed
12/31/2011	1:24:06 PM	H2 valve closed
12/31/2011	1:24:06 PM	BCl3 valve closed
12/31/2011	1:24:06 PM	PH3 valve closed
12/31/2011	1:24:06 PM	SiCl4 pre valve closed
12/31/2011	1:24:06 PM	SiCl4 post valve closed
12/31/2011	1:24:06 PM	Bypass valve closed
12/31/2011	1:24:06 PM	Bubbler valve closed
12/31/2011	1:24:06 PM	Main Vac valve opened
12/31/2011	1:24:06 PM	Helium MFC set to  0.000000
12/31/2011	1:24:06 PM	H2 MFC set to  0.000000
12/31/2011	1:24:06 PM	BCl3 MFC set to  0.000000
12/31/2011	1:24:06 PM	PHl3 MFC set to  0.000000
12/31/2011	1:24:06 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:24:06 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:24:07 PM	Tube furnace set to 150
12/31/2011	1:24:37 PM	H2 valve closed
12/31/2011	1:24:37 PM	BCl3 valve closed
12/31/2011	1:24:37 PM	PH3 valve closed
12/31/2011	1:24:37 PM	SiCl4 pre valve closed
12/31/2011	1:24:37 PM	SiCl4 post valve closed
12/31/2011	1:24:37 PM	Bypass valve closed
12/31/2011	1:24:37 PM	Bubbler valve closed
12/31/2011	1:24:37 PM	Helium valve opened
12/31/2011	1:24:37 PM	Main Vac valve opened
12/31/2011	1:24:37 PM	Helium MFC set to  20.000000
12/31/2011	1:24:37 PM	H2 MFC set to  0.000000
12/31/2011	1:24:37 PM	BCl3 MFC set to  0.000000
12/31/2011	1:24:37 PM	PHl3 MFC set to  0.000000
12/31/2011	1:24:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:24:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:24:37 PM	Tube furnace set to 150
12/31/2011	1:25:07 PM	Helium valve closed
12/31/2011	1:25:07 PM	H2 valve closed
12/31/2011	1:25:07 PM	BCl3 valve closed
12/31/2011	1:25:07 PM	PH3 valve closed
12/31/2011	1:25:07 PM	SiCl4 pre valve closed
12/31/2011	1:25:07 PM	SiCl4 post valve closed
12/31/2011	1:25:07 PM	Bypass valve closed
12/31/2011	1:25:07 PM	Bubbler valve closed
12/31/2011	1:25:07 PM	Main Vac valve opened
12/31/2011	1:25:07 PM	Helium MFC set to  0.000000
12/31/2011	1:25:07 PM	H2 MFC set to  0.000000
12/31/2011	1:25:07 PM	BCl3 MFC set to  0.000000
12/31/2011	1:25:07 PM	PHl3 MFC set to  0.000000
12/31/2011	1:25:07 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:25:07 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:25:07 PM	Tube furnace set to 150
12/31/2011	1:25:37 PM	H2 valve closed
12/31/2011	1:25:37 PM	BCl3 valve closed
12/31/2011	1:25:37 PM	PH3 valve closed
12/31/2011	1:25:37 PM	SiCl4 pre valve closed
12/31/2011	1:25:37 PM	SiCl4 post valve closed
12/31/2011	1:25:37 PM	Bypass valve closed
12/31/2011	1:25:37 PM	Bubbler valve closed
12/31/2011	1:25:37 PM	Helium valve opened
12/31/2011	1:25:37 PM	Main Vac valve opened
12/31/2011	1:25:37 PM	Helium MFC set to  20.000000
12/31/2011	1:25:37 PM	H2 MFC set to  0.000000
12/31/2011	1:25:37 PM	BCl3 MFC set to  0.000000
12/31/2011	1:25:37 PM	PHl3 MFC set to  0.000000
12/31/2011	1:25:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:25:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:25:37 PM	Tube furnace set to 150
12/31/2011	1:26:07 PM	Helium valve closed
12/31/2011	1:26:07 PM	H2 valve closed
12/31/2011	1:26:07 PM	BCl3 valve closed
12/31/2011	1:26:07 PM	PH3 valve closed
12/31/2011	1:26:07 PM	SiCl4 pre valve closed
12/31/2011	1:26:07 PM	SiCl4 post valve closed
12/31/2011	1:26:07 PM	Bypass valve closed
12/31/2011	1:26:07 PM	Bubbler valve closed
12/31/2011	1:26:07 PM	Main Vac valve opened
12/31/2011	1:26:07 PM	Helium MFC set to  0.000000
12/31/2011	1:26:07 PM	H2 MFC set to  0.000000
12/31/2011	1:26:07 PM	BCl3 MFC set to  0.000000
12/31/2011	1:26:07 PM	PHl3 MFC set to  0.000000
12/31/2011	1:26:07 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:26:07 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:26:07 PM	Tube furnace set to 150
12/31/2011	1:26:37 PM	H2 valve closed
12/31/2011	1:26:37 PM	BCl3 valve closed
12/31/2011	1:26:37 PM	PH3 valve closed
12/31/2011	1:26:37 PM	SiCl4 pre valve closed
12/31/2011	1:26:37 PM	SiCl4 post valve closed
12/31/2011	1:26:37 PM	Bypass valve closed
12/31/2011	1:26:37 PM	Bubbler valve closed
12/31/2011	1:26:37 PM	Helium valve opened
12/31/2011	1:26:37 PM	Main Vac valve opened
12/31/2011	1:26:37 PM	Helium MFC set to  20.000000
12/31/2011	1:26:37 PM	H2 MFC set to  0.000000
12/31/2011	1:26:37 PM	BCl3 MFC set to  0.000000
12/31/2011	1:26:37 PM	PHl3 MFC set to  0.000000
12/31/2011	1:26:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:26:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:26:38 PM	Tube furnace set to 150
12/31/2011	1:27:08 PM	Helium valve closed
12/31/2011	1:27:08 PM	H2 valve closed
12/31/2011	1:27:08 PM	BCl3 valve closed
12/31/2011	1:27:08 PM	PH3 valve closed
12/31/2011	1:27:08 PM	SiCl4 pre valve closed
12/31/2011	1:27:08 PM	SiCl4 post valve closed
12/31/2011	1:27:08 PM	Bypass valve closed
12/31/2011	1:27:08 PM	Bubbler valve closed
12/31/2011	1:27:08 PM	Main Vac valve opened
12/31/2011	1:27:08 PM	Helium MFC set to  0.000000
12/31/2011	1:27:08 PM	H2 MFC set to  0.000000
12/31/2011	1:27:08 PM	BCl3 MFC set to  0.000000
12/31/2011	1:27:08 PM	PHl3 MFC set to  0.000000
12/31/2011	1:27:08 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:27:08 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:27:08 PM	Tube furnace set to 150
12/31/2011	1:27:38 PM	H2 valve closed
12/31/2011	1:27:38 PM	BCl3 valve closed
12/31/2011	1:27:38 PM	PH3 valve closed
12/31/2011	1:27:38 PM	SiCl4 pre valve closed
12/31/2011	1:27:38 PM	SiCl4 post valve closed
12/31/2011	1:27:38 PM	Bypass valve closed
12/31/2011	1:27:38 PM	Bubbler valve closed
12/31/2011	1:27:38 PM	Helium valve opened
12/31/2011	1:27:38 PM	Main Vac valve opened
12/31/2011	1:27:38 PM	Helium MFC set to  20.000000
12/31/2011	1:27:38 PM	H2 MFC set to  0.000000
12/31/2011	1:27:38 PM	BCl3 MFC set to  0.000000
12/31/2011	1:27:38 PM	PHl3 MFC set to  0.000000
12/31/2011	1:27:38 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:27:38 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:27:38 PM	Tube furnace set to 150
12/31/2011	1:28:08 PM	Helium valve closed
12/31/2011	1:28:08 PM	H2 valve closed
12/31/2011	1:28:08 PM	BCl3 valve closed
12/31/2011	1:28:08 PM	PH3 valve closed
12/31/2011	1:28:08 PM	SiCl4 pre valve closed
12/31/2011	1:28:08 PM	SiCl4 post valve closed
12/31/2011	1:28:08 PM	Bypass valve closed
12/31/2011	1:28:08 PM	Bubbler valve closed
12/31/2011	1:28:08 PM	Main Vac valve opened
12/31/2011	1:28:08 PM	Helium MFC set to  0.000000
12/31/2011	1:28:08 PM	H2 MFC set to  0.000000
12/31/2011	1:28:08 PM	BCl3 MFC set to  0.000000
12/31/2011	1:28:08 PM	PHl3 MFC set to  0.000000
12/31/2011	1:28:08 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:28:08 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:28:08 PM	Tube furnace set to 150
12/31/2011	1:28:38 PM	H2 valve closed
12/31/2011	1:28:38 PM	BCl3 valve closed
12/31/2011	1:28:38 PM	PH3 valve closed
12/31/2011	1:28:38 PM	SiCl4 pre valve closed
12/31/2011	1:28:38 PM	SiCl4 post valve closed
12/31/2011	1:28:38 PM	Bypass valve closed
12/31/2011	1:28:38 PM	Bubbler valve closed
12/31/2011	1:28:38 PM	Helium valve opened
12/31/2011	1:28:38 PM	Main Vac valve opened
12/31/2011	1:28:38 PM	Helium MFC set to  20.000000
12/31/2011	1:28:38 PM	H2 MFC set to  0.000000
12/31/2011	1:28:38 PM	BCl3 MFC set to  0.000000
12/31/2011	1:28:38 PM	PHl3 MFC set to  0.000000
12/31/2011	1:28:38 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:28:38 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:28:38 PM	Tube furnace set to 150
12/31/2011	1:29:08 PM	Helium valve closed
12/31/2011	1:29:08 PM	H2 valve closed
12/31/2011	1:29:08 PM	BCl3 valve closed
12/31/2011	1:29:08 PM	PH3 valve closed
12/31/2011	1:29:08 PM	SiCl4 pre valve closed
12/31/2011	1:29:08 PM	SiCl4 post valve closed
12/31/2011	1:29:08 PM	Bypass valve closed
12/31/2011	1:29:08 PM	Bubbler valve closed
12/31/2011	1:29:08 PM	Main Vac valve opened
12/31/2011	1:29:08 PM	Helium MFC set to  0.000000
12/31/2011	1:29:08 PM	H2 MFC set to  0.000000
12/31/2011	1:29:08 PM	BCl3 MFC set to  0.000000
12/31/2011	1:29:08 PM	PHl3 MFC set to  0.000000
12/31/2011	1:29:08 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:29:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:29:09 PM	Tube furnace set to 150
12/31/2011	1:29:39 PM	H2 valve closed
12/31/2011	1:29:39 PM	BCl3 valve closed
12/31/2011	1:29:39 PM	PH3 valve closed
12/31/2011	1:29:39 PM	SiCl4 pre valve closed
12/31/2011	1:29:39 PM	SiCl4 post valve closed
12/31/2011	1:29:39 PM	Bypass valve closed
12/31/2011	1:29:39 PM	Bubbler valve closed
12/31/2011	1:29:39 PM	Helium valve opened
12/31/2011	1:29:39 PM	Main Vac valve opened
12/31/2011	1:29:39 PM	Helium MFC set to  20.000000
12/31/2011	1:29:39 PM	H2 MFC set to  0.000000
12/31/2011	1:29:39 PM	BCl3 MFC set to  0.000000
12/31/2011	1:29:39 PM	PHl3 MFC set to  0.000000
12/31/2011	1:29:39 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:29:39 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:29:39 PM	Tube furnace set to 150
12/31/2011	1:30:09 PM	Helium valve closed
12/31/2011	1:30:09 PM	H2 valve closed
12/31/2011	1:30:09 PM	BCl3 valve closed
12/31/2011	1:30:09 PM	PH3 valve closed
12/31/2011	1:30:09 PM	SiCl4 pre valve closed
12/31/2011	1:30:09 PM	SiCl4 post valve closed
12/31/2011	1:30:09 PM	Bypass valve closed
12/31/2011	1:30:09 PM	Bubbler valve closed
12/31/2011	1:30:09 PM	Main Vac valve opened
12/31/2011	1:30:09 PM	Helium MFC set to  0.000000
12/31/2011	1:30:09 PM	H2 MFC set to  0.000000
12/31/2011	1:30:09 PM	BCl3 MFC set to  0.000000
12/31/2011	1:30:09 PM	PHl3 MFC set to  0.000000
12/31/2011	1:30:09 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:30:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:30:09 PM	Tube furnace set to 150
12/31/2011	1:30:39 PM	H2 valve closed
12/31/2011	1:30:39 PM	BCl3 valve closed
12/31/2011	1:30:39 PM	PH3 valve closed
12/31/2011	1:30:39 PM	SiCl4 pre valve closed
12/31/2011	1:30:39 PM	SiCl4 post valve closed
12/31/2011	1:30:39 PM	Bypass valve closed
12/31/2011	1:30:39 PM	Bubbler valve closed
12/31/2011	1:30:39 PM	Helium valve opened
12/31/2011	1:30:39 PM	Main Vac valve opened
12/31/2011	1:30:39 PM	Helium MFC set to  20.000000
12/31/2011	1:30:39 PM	H2 MFC set to  0.000000
12/31/2011	1:30:39 PM	BCl3 MFC set to  0.000000
12/31/2011	1:30:39 PM	PHl3 MFC set to  0.000000
12/31/2011	1:30:39 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:30:39 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:30:39 PM	Tube furnace set to 150
12/31/2011	1:31:09 PM	Helium valve closed
12/31/2011	1:31:09 PM	H2 valve closed
12/31/2011	1:31:09 PM	BCl3 valve closed
12/31/2011	1:31:09 PM	PH3 valve closed
12/31/2011	1:31:09 PM	SiCl4 pre valve closed
12/31/2011	1:31:09 PM	SiCl4 post valve closed
12/31/2011	1:31:09 PM	Bypass valve closed
12/31/2011	1:31:09 PM	Bubbler valve closed
12/31/2011	1:31:09 PM	Main Vac valve opened
12/31/2011	1:31:09 PM	Helium MFC set to  0.000000
12/31/2011	1:31:09 PM	H2 MFC set to  0.000000
12/31/2011	1:31:09 PM	BCl3 MFC set to  0.000000
12/31/2011	1:31:09 PM	PHl3 MFC set to  0.000000
12/31/2011	1:31:09 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:31:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:31:10 PM	Tube furnace set to 150
12/31/2011	1:31:40 PM	H2 valve closed
12/31/2011	1:31:40 PM	BCl3 valve closed
12/31/2011	1:31:40 PM	PH3 valve closed
12/31/2011	1:31:40 PM	SiCl4 pre valve closed
12/31/2011	1:31:40 PM	SiCl4 post valve closed
12/31/2011	1:31:40 PM	Bypass valve closed
12/31/2011	1:31:40 PM	Bubbler valve closed
12/31/2011	1:31:40 PM	Helium valve opened
12/31/2011	1:31:40 PM	Main Vac valve opened
12/31/2011	1:31:40 PM	Helium MFC set to  20.000000
12/31/2011	1:31:40 PM	H2 MFC set to  0.000000
12/31/2011	1:31:40 PM	BCl3 MFC set to  0.000000
12/31/2011	1:31:40 PM	PHl3 MFC set to  0.000000
12/31/2011	1:31:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:31:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:31:40 PM	Tube furnace set to 150
12/31/2011	1:32:10 PM	Helium valve closed
12/31/2011	1:32:10 PM	H2 valve closed
12/31/2011	1:32:10 PM	BCl3 valve closed
12/31/2011	1:32:10 PM	PH3 valve closed
12/31/2011	1:32:10 PM	SiCl4 pre valve closed
12/31/2011	1:32:10 PM	SiCl4 post valve closed
12/31/2011	1:32:10 PM	Bypass valve closed
12/31/2011	1:32:10 PM	Bubbler valve closed
12/31/2011	1:32:10 PM	Main Vac valve opened
12/31/2011	1:32:10 PM	Helium MFC set to  0.000000
12/31/2011	1:32:10 PM	H2 MFC set to  0.000000
12/31/2011	1:32:10 PM	BCl3 MFC set to  0.000000
12/31/2011	1:32:10 PM	PHl3 MFC set to  0.000000
12/31/2011	1:32:10 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:32:10 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:32:10 PM	Tube furnace set to 150
12/31/2011	1:32:40 PM	H2 valve closed
12/31/2011	1:32:40 PM	BCl3 valve closed
12/31/2011	1:32:40 PM	PH3 valve closed
12/31/2011	1:32:40 PM	SiCl4 pre valve closed
12/31/2011	1:32:40 PM	SiCl4 post valve closed
12/31/2011	1:32:40 PM	Bypass valve closed
12/31/2011	1:32:40 PM	Bubbler valve closed
12/31/2011	1:32:40 PM	Helium valve opened
12/31/2011	1:32:40 PM	Main Vac valve opened
12/31/2011	1:32:40 PM	Helium MFC set to  20.000000
12/31/2011	1:32:40 PM	H2 MFC set to  0.000000
12/31/2011	1:32:40 PM	BCl3 MFC set to  0.000000
12/31/2011	1:32:40 PM	PHl3 MFC set to  0.000000
12/31/2011	1:32:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:32:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:32:40 PM	Tube furnace set to 150
12/31/2011	1:33:10 PM	Helium valve closed
12/31/2011	1:33:10 PM	H2 valve closed
12/31/2011	1:33:10 PM	BCl3 valve closed
12/31/2011	1:33:10 PM	PH3 valve closed
12/31/2011	1:33:10 PM	SiCl4 pre valve closed
12/31/2011	1:33:10 PM	SiCl4 post valve closed
12/31/2011	1:33:10 PM	Bypass valve closed
12/31/2011	1:33:10 PM	Bubbler valve closed
12/31/2011	1:33:10 PM	Main Vac valve opened
12/31/2011	1:33:10 PM	Helium MFC set to  0.000000
12/31/2011	1:33:10 PM	H2 MFC set to  0.000000
12/31/2011	1:33:10 PM	BCl3 MFC set to  0.000000
12/31/2011	1:33:10 PM	PHl3 MFC set to  0.000000
12/31/2011	1:33:10 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:33:10 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:33:10 PM	Tube furnace set to 150
12/31/2011	1:33:40 PM	H2 valve closed
12/31/2011	1:33:40 PM	BCl3 valve closed
12/31/2011	1:33:40 PM	PH3 valve closed
12/31/2011	1:33:40 PM	SiCl4 pre valve closed
12/31/2011	1:33:40 PM	SiCl4 post valve closed
12/31/2011	1:33:40 PM	Bypass valve closed
12/31/2011	1:33:40 PM	Bubbler valve closed
12/31/2011	1:33:40 PM	Helium valve opened
12/31/2011	1:33:40 PM	Main Vac valve opened
12/31/2011	1:33:40 PM	Helium MFC set to  20.000000
12/31/2011	1:33:40 PM	H2 MFC set to  0.000000
12/31/2011	1:33:40 PM	BCl3 MFC set to  0.000000
12/31/2011	1:33:40 PM	PHl3 MFC set to  0.000000
12/31/2011	1:33:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:33:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:33:41 PM	Tube furnace set to 150
12/31/2011	1:34:11 PM	Helium valve closed
12/31/2011	1:34:11 PM	H2 valve closed
12/31/2011	1:34:11 PM	BCl3 valve closed
12/31/2011	1:34:11 PM	PH3 valve closed
12/31/2011	1:34:11 PM	SiCl4 pre valve closed
12/31/2011	1:34:11 PM	SiCl4 post valve closed
12/31/2011	1:34:11 PM	Bypass valve closed
12/31/2011	1:34:11 PM	Bubbler valve closed
12/31/2011	1:34:11 PM	Main Vac valve opened
12/31/2011	1:34:11 PM	Helium MFC set to  0.000000
12/31/2011	1:34:11 PM	H2 MFC set to  0.000000
12/31/2011	1:34:11 PM	BCl3 MFC set to  0.000000
12/31/2011	1:34:11 PM	PHl3 MFC set to  0.000000
12/31/2011	1:34:11 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:34:11 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:34:11 PM	Tube furnace set to 150
12/31/2011	1:34:41 PM	H2 valve closed
12/31/2011	1:34:41 PM	BCl3 valve closed
12/31/2011	1:34:41 PM	PH3 valve closed
12/31/2011	1:34:41 PM	SiCl4 pre valve closed
12/31/2011	1:34:41 PM	SiCl4 post valve closed
12/31/2011	1:34:41 PM	Bypass valve closed
12/31/2011	1:34:41 PM	Bubbler valve closed
12/31/2011	1:34:41 PM	Helium valve opened
12/31/2011	1:34:41 PM	Main Vac valve opened
12/31/2011	1:34:41 PM	Helium MFC set to  20.000000
12/31/2011	1:34:41 PM	H2 MFC set to  0.000000
12/31/2011	1:34:41 PM	BCl3 MFC set to  0.000000
12/31/2011	1:34:41 PM	PHl3 MFC set to  0.000000
12/31/2011	1:34:41 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:34:41 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:34:41 PM	Tube furnace set to 150
12/31/2011	1:35:11 PM	Helium valve closed
12/31/2011	1:35:11 PM	H2 valve closed
12/31/2011	1:35:11 PM	BCl3 valve closed
12/31/2011	1:35:11 PM	PH3 valve closed
12/31/2011	1:35:11 PM	SiCl4 pre valve closed
12/31/2011	1:35:11 PM	SiCl4 post valve closed
12/31/2011	1:35:11 PM	Bypass valve closed
12/31/2011	1:35:11 PM	Bubbler valve closed
12/31/2011	1:35:11 PM	Main Vac valve opened
12/31/2011	1:35:11 PM	Helium MFC set to  0.000000
12/31/2011	1:35:11 PM	H2 MFC set to  0.000000
12/31/2011	1:35:11 PM	BCl3 MFC set to  0.000000
12/31/2011	1:35:11 PM	PHl3 MFC set to  0.000000
12/31/2011	1:35:11 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:35:11 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:35:11 PM	Tube furnace set to 150
12/31/2011	1:35:41 PM	H2 valve closed
12/31/2011	1:35:41 PM	BCl3 valve closed
12/31/2011	1:35:41 PM	PH3 valve closed
12/31/2011	1:35:41 PM	SiCl4 pre valve closed
12/31/2011	1:35:41 PM	SiCl4 post valve closed
12/31/2011	1:35:41 PM	Bypass valve closed
12/31/2011	1:35:41 PM	Bubbler valve closed
12/31/2011	1:35:41 PM	Helium valve opened
12/31/2011	1:35:41 PM	Main Vac valve opened
12/31/2011	1:35:41 PM	Helium MFC set to  20.000000
12/31/2011	1:35:41 PM	H2 MFC set to  0.000000
12/31/2011	1:35:41 PM	BCl3 MFC set to  0.000000
12/31/2011	1:35:41 PM	PHl3 MFC set to  0.000000
12/31/2011	1:35:41 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:35:41 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:35:41 PM	Tube furnace set to 150
12/31/2011	1:36:11 PM	Helium valve closed
12/31/2011	1:36:11 PM	H2 valve closed
12/31/2011	1:36:11 PM	BCl3 valve closed
12/31/2011	1:36:11 PM	PH3 valve closed
12/31/2011	1:36:11 PM	SiCl4 pre valve closed
12/31/2011	1:36:11 PM	SiCl4 post valve closed
12/31/2011	1:36:11 PM	Bypass valve closed
12/31/2011	1:36:11 PM	Bubbler valve closed
12/31/2011	1:36:11 PM	Main Vac valve opened
12/31/2011	1:36:11 PM	Helium MFC set to  0.000000
12/31/2011	1:36:11 PM	H2 MFC set to  0.000000
12/31/2011	1:36:11 PM	BCl3 MFC set to  0.000000
12/31/2011	1:36:11 PM	PHl3 MFC set to  0.000000
12/31/2011	1:36:12 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:36:12 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:36:12 PM	Tube furnace set to 180
12/31/2011	1:36:17 PM	Run finished at 1:36 PM
12/31/2011	1:50:33 PM	Recipe started at 1:50 PM
12/31/2011	1:50:33 PM	Helium valve closed
12/31/2011	1:50:33 PM	H2 valve closed
12/31/2011	1:50:33 PM	BCl3 valve closed
12/31/2011	1:50:33 PM	PH3 valve closed
12/31/2011	1:50:33 PM	SiCl4 pre valve closed
12/31/2011	1:50:33 PM	SiCl4 post valve closed
12/31/2011	1:50:33 PM	Main Vac valve closed
12/31/2011	1:50:33 PM	Bubbler valve closed
12/31/2011	1:50:33 PM	Bypass valve opened
12/31/2011	1:50:33 PM	Helium MFC set to  0.000000
12/31/2011	1:50:33 PM	H2 MFC set to  0.000000
12/31/2011	1:50:33 PM	BCl3 MFC set to  0.000000
12/31/2011	1:50:33 PM	PHl3 MFC set to  0.000000
12/31/2011	1:50:33 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:50:33 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:50:33 PM	Tube furnace set to 180
12/31/2011	1:50:36 PM	Helium valve closed
12/31/2011	1:50:36 PM	H2 valve closed
12/31/2011	1:50:36 PM	BCl3 valve closed
12/31/2011	1:50:36 PM	PH3 valve closed
12/31/2011	1:50:36 PM	SiCl4 pre valve closed
12/31/2011	1:50:36 PM	SiCl4 post valve closed
12/31/2011	1:50:36 PM	Main Vac valve closed
12/31/2011	1:50:36 PM	Bubbler valve closed
12/31/2011	1:50:36 PM	Bypass valve opened
12/31/2011	1:50:36 PM	Helium MFC set to  0.000000
12/31/2011	1:50:36 PM	H2 MFC set to  0.000000
12/31/2011	1:50:36 PM	BCl3 MFC set to  0.000000
12/31/2011	1:50:36 PM	PHl3 MFC set to  0.000000
12/31/2011	1:50:36 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:50:36 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:50:36 PM	Tube furnace set to 150
12/31/2011	1:51:06 PM	Helium valve closed
12/31/2011	1:51:06 PM	H2 valve closed
12/31/2011	1:51:06 PM	BCl3 valve closed
12/31/2011	1:51:06 PM	PH3 valve closed
12/31/2011	1:51:06 PM	SiCl4 pre valve closed
12/31/2011	1:51:06 PM	SiCl4 post valve closed
12/31/2011	1:51:06 PM	Bypass valve closed
12/31/2011	1:51:06 PM	Bubbler valve closed
12/31/2011	1:51:06 PM	Main Vac valve opened
12/31/2011	1:51:06 PM	Helium MFC set to  0.000000
12/31/2011	1:51:06 PM	H2 MFC set to  0.000000
12/31/2011	1:51:06 PM	BCl3 MFC set to  0.000000
12/31/2011	1:51:06 PM	PHl3 MFC set to  0.000000
12/31/2011	1:51:06 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:51:06 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:51:06 PM	Tube furnace set to 180
12/31/2011	1:51:36 PM	H2 valve closed
12/31/2011	1:51:36 PM	BCl3 valve closed
12/31/2011	1:51:36 PM	PH3 valve closed
12/31/2011	1:51:36 PM	SiCl4 pre valve closed
12/31/2011	1:51:36 PM	SiCl4 post valve closed
12/31/2011	1:51:36 PM	Bypass valve closed
12/31/2011	1:51:36 PM	Bubbler valve closed
12/31/2011	1:51:36 PM	Helium valve opened
12/31/2011	1:51:36 PM	Main Vac valve opened
12/31/2011	1:51:36 PM	Helium MFC set to  20.000000
12/31/2011	1:51:36 PM	H2 MFC set to  0.000000
12/31/2011	1:51:37 PM	BCl3 MFC set to  0.000000
12/31/2011	1:51:37 PM	PHl3 MFC set to  0.000000
12/31/2011	1:51:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:51:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:51:37 PM	Tube furnace set to 180
12/31/2011	1:52:07 PM	Helium valve closed
12/31/2011	1:52:07 PM	H2 valve closed
12/31/2011	1:52:07 PM	BCl3 valve closed
12/31/2011	1:52:07 PM	PH3 valve closed
12/31/2011	1:52:07 PM	SiCl4 pre valve closed
12/31/2011	1:52:07 PM	SiCl4 post valve closed
12/31/2011	1:52:07 PM	Bypass valve closed
12/31/2011	1:52:07 PM	Bubbler valve closed
12/31/2011	1:52:07 PM	Main Vac valve opened
12/31/2011	1:52:07 PM	Helium MFC set to  0.000000
12/31/2011	1:52:07 PM	H2 MFC set to  0.000000
12/31/2011	1:52:07 PM	BCl3 MFC set to  0.000000
12/31/2011	1:52:07 PM	PHl3 MFC set to  0.000000
12/31/2011	1:52:07 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:52:07 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:52:07 PM	Tube furnace set to 150
12/31/2011	1:52:37 PM	H2 valve closed
12/31/2011	1:52:37 PM	BCl3 valve closed
12/31/2011	1:52:37 PM	PH3 valve closed
12/31/2011	1:52:37 PM	SiCl4 pre valve closed
12/31/2011	1:52:37 PM	SiCl4 post valve closed
12/31/2011	1:52:37 PM	Bypass valve closed
12/31/2011	1:52:37 PM	Bubbler valve closed
12/31/2011	1:52:37 PM	Helium valve opened
12/31/2011	1:52:37 PM	Main Vac valve opened
12/31/2011	1:52:37 PM	Helium MFC set to  20.000000
12/31/2011	1:52:37 PM	H2 MFC set to  0.000000
12/31/2011	1:52:37 PM	BCl3 MFC set to  0.000000
12/31/2011	1:52:37 PM	PHl3 MFC set to  0.000000
12/31/2011	1:52:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:52:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:52:37 PM	Tube furnace set to 180
12/31/2011	1:53:07 PM	Helium valve closed
12/31/2011	1:53:07 PM	H2 valve closed
12/31/2011	1:53:07 PM	BCl3 valve closed
12/31/2011	1:53:07 PM	PH3 valve closed
12/31/2011	1:53:07 PM	SiCl4 pre valve closed
12/31/2011	1:53:07 PM	SiCl4 post valve closed
12/31/2011	1:53:07 PM	Bypass valve closed
12/31/2011	1:53:07 PM	Bubbler valve closed
12/31/2011	1:53:07 PM	Main Vac valve opened
12/31/2011	1:53:07 PM	Helium MFC set to  0.000000
12/31/2011	1:53:07 PM	H2 MFC set to  0.000000
12/31/2011	1:53:07 PM	BCl3 MFC set to  0.000000
12/31/2011	1:53:07 PM	PHl3 MFC set to  0.000000
12/31/2011	1:53:07 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:53:07 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:53:07 PM	Tube furnace set to 150
12/31/2011	1:53:37 PM	H2 valve closed
12/31/2011	1:53:37 PM	BCl3 valve closed
12/31/2011	1:53:37 PM	PH3 valve closed
12/31/2011	1:53:37 PM	SiCl4 pre valve closed
12/31/2011	1:53:37 PM	SiCl4 post valve closed
12/31/2011	1:53:37 PM	Bypass valve closed
12/31/2011	1:53:37 PM	Bubbler valve closed
12/31/2011	1:53:37 PM	Helium valve opened
12/31/2011	1:53:37 PM	Main Vac valve opened
12/31/2011	1:53:37 PM	Helium MFC set to  20.000000
12/31/2011	1:53:37 PM	H2 MFC set to  0.000000
12/31/2011	1:53:37 PM	BCl3 MFC set to  0.000000
12/31/2011	1:53:37 PM	PHl3 MFC set to  0.000000
12/31/2011	1:53:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:53:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:53:37 PM	Tube furnace set to 150
12/31/2011	1:54:07 PM	Helium valve closed
12/31/2011	1:54:07 PM	H2 valve closed
12/31/2011	1:54:07 PM	BCl3 valve closed
12/31/2011	1:54:07 PM	PH3 valve closed
12/31/2011	1:54:07 PM	SiCl4 pre valve closed
12/31/2011	1:54:07 PM	SiCl4 post valve closed
12/31/2011	1:54:07 PM	Bypass valve closed
12/31/2011	1:54:07 PM	Bubbler valve closed
12/31/2011	1:54:07 PM	Main Vac valve opened
12/31/2011	1:54:07 PM	Helium MFC set to  0.000000
12/31/2011	1:54:07 PM	H2 MFC set to  0.000000
12/31/2011	1:54:07 PM	BCl3 MFC set to  0.000000
12/31/2011	1:54:07 PM	PHl3 MFC set to  0.000000
12/31/2011	1:54:07 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:54:08 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:54:08 PM	Tube furnace set to 150
12/31/2011	1:54:38 PM	H2 valve closed
12/31/2011	1:54:38 PM	BCl3 valve closed
12/31/2011	1:54:38 PM	PH3 valve closed
12/31/2011	1:54:38 PM	SiCl4 pre valve closed
12/31/2011	1:54:38 PM	SiCl4 post valve closed
12/31/2011	1:54:38 PM	Bypass valve closed
12/31/2011	1:54:38 PM	Bubbler valve closed
12/31/2011	1:54:38 PM	Helium valve opened
12/31/2011	1:54:38 PM	Main Vac valve opened
12/31/2011	1:54:38 PM	Helium MFC set to  20.000000
12/31/2011	1:54:38 PM	H2 MFC set to  0.000000
12/31/2011	1:54:38 PM	BCl3 MFC set to  0.000000
12/31/2011	1:54:38 PM	PHl3 MFC set to  0.000000
12/31/2011	1:54:38 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:54:38 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:54:38 PM	Tube furnace set to 180
12/31/2011	1:55:08 PM	Helium valve closed
12/31/2011	1:55:08 PM	H2 valve closed
12/31/2011	1:55:08 PM	BCl3 valve closed
12/31/2011	1:55:08 PM	PH3 valve closed
12/31/2011	1:55:08 PM	SiCl4 pre valve closed
12/31/2011	1:55:08 PM	SiCl4 post valve closed
12/31/2011	1:55:08 PM	Bypass valve closed
12/31/2011	1:55:08 PM	Bubbler valve closed
12/31/2011	1:55:08 PM	Main Vac valve opened
12/31/2011	1:55:08 PM	Helium MFC set to  0.000000
12/31/2011	1:55:08 PM	H2 MFC set to  0.000000
12/31/2011	1:55:08 PM	BCl3 MFC set to  0.000000
12/31/2011	1:55:08 PM	PHl3 MFC set to  0.000000
12/31/2011	1:55:08 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:55:08 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:55:08 PM	Tube furnace set to 150
12/31/2011	1:55:38 PM	H2 valve closed
12/31/2011	1:55:38 PM	BCl3 valve closed
12/31/2011	1:55:38 PM	PH3 valve closed
12/31/2011	1:55:38 PM	SiCl4 pre valve closed
12/31/2011	1:55:38 PM	SiCl4 post valve closed
12/31/2011	1:55:38 PM	Bypass valve closed
12/31/2011	1:55:38 PM	Bubbler valve closed
12/31/2011	1:55:38 PM	Helium valve opened
12/31/2011	1:55:38 PM	Main Vac valve opened
12/31/2011	1:55:38 PM	Helium MFC set to  20.000000
12/31/2011	1:55:38 PM	H2 MFC set to  0.000000
12/31/2011	1:55:38 PM	BCl3 MFC set to  0.000000
12/31/2011	1:55:38 PM	PHl3 MFC set to  0.000000
12/31/2011	1:55:38 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:55:38 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:55:38 PM	Tube furnace set to 150
12/31/2011	1:56:08 PM	Helium valve closed
12/31/2011	1:56:08 PM	H2 valve closed
12/31/2011	1:56:08 PM	BCl3 valve closed
12/31/2011	1:56:08 PM	PH3 valve closed
12/31/2011	1:56:08 PM	SiCl4 pre valve closed
12/31/2011	1:56:08 PM	SiCl4 post valve closed
12/31/2011	1:56:08 PM	Bypass valve closed
12/31/2011	1:56:08 PM	Bubbler valve closed
12/31/2011	1:56:08 PM	Main Vac valve opened
12/31/2011	1:56:08 PM	Helium MFC set to  0.000000
12/31/2011	1:56:08 PM	H2 MFC set to  0.000000
12/31/2011	1:56:08 PM	BCl3 MFC set to  0.000000
12/31/2011	1:56:08 PM	PHl3 MFC set to  0.000000
12/31/2011	1:56:08 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:56:08 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:56:08 PM	Tube furnace set to 150
12/31/2011	1:56:38 PM	H2 valve closed
12/31/2011	1:56:38 PM	BCl3 valve closed
12/31/2011	1:56:38 PM	PH3 valve closed
12/31/2011	1:56:38 PM	SiCl4 pre valve closed
12/31/2011	1:56:38 PM	SiCl4 post valve closed
12/31/2011	1:56:38 PM	Bypass valve closed
12/31/2011	1:56:38 PM	Bubbler valve closed
12/31/2011	1:56:38 PM	Helium valve opened
12/31/2011	1:56:38 PM	Main Vac valve opened
12/31/2011	1:56:38 PM	Helium MFC set to  20.000000
12/31/2011	1:56:38 PM	H2 MFC set to  0.000000
12/31/2011	1:56:38 PM	BCl3 MFC set to  0.000000
12/31/2011	1:56:39 PM	PHl3 MFC set to  0.000000
12/31/2011	1:56:39 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:56:39 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:56:39 PM	Tube furnace set to 150
12/31/2011	1:57:09 PM	Helium valve closed
12/31/2011	1:57:09 PM	H2 valve closed
12/31/2011	1:57:09 PM	BCl3 valve closed
12/31/2011	1:57:09 PM	PH3 valve closed
12/31/2011	1:57:09 PM	SiCl4 pre valve closed
12/31/2011	1:57:09 PM	SiCl4 post valve closed
12/31/2011	1:57:09 PM	Bypass valve closed
12/31/2011	1:57:09 PM	Bubbler valve closed
12/31/2011	1:57:09 PM	Main Vac valve opened
12/31/2011	1:57:09 PM	Helium MFC set to  0.000000
12/31/2011	1:57:09 PM	H2 MFC set to  0.000000
12/31/2011	1:57:09 PM	BCl3 MFC set to  0.000000
12/31/2011	1:57:09 PM	PHl3 MFC set to  0.000000
12/31/2011	1:57:09 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:57:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:57:09 PM	Tube furnace set to 150
12/31/2011	1:57:39 PM	H2 valve closed
12/31/2011	1:57:39 PM	BCl3 valve closed
12/31/2011	1:57:39 PM	PH3 valve closed
12/31/2011	1:57:39 PM	SiCl4 pre valve closed
12/31/2011	1:57:39 PM	SiCl4 post valve closed
12/31/2011	1:57:39 PM	Bypass valve closed
12/31/2011	1:57:39 PM	Bubbler valve closed
12/31/2011	1:57:39 PM	Helium valve opened
12/31/2011	1:57:39 PM	Main Vac valve opened
12/31/2011	1:57:39 PM	Helium MFC set to  20.000000
12/31/2011	1:57:39 PM	H2 MFC set to  0.000000
12/31/2011	1:57:39 PM	BCl3 MFC set to  0.000000
12/31/2011	1:57:39 PM	PHl3 MFC set to  0.000000
12/31/2011	1:57:39 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:57:39 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:57:39 PM	Tube furnace set to 150
12/31/2011	1:58:09 PM	Helium valve closed
12/31/2011	1:58:09 PM	H2 valve closed
12/31/2011	1:58:09 PM	BCl3 valve closed
12/31/2011	1:58:09 PM	PH3 valve closed
12/31/2011	1:58:09 PM	SiCl4 pre valve closed
12/31/2011	1:58:09 PM	SiCl4 post valve closed
12/31/2011	1:58:09 PM	Bypass valve closed
12/31/2011	1:58:09 PM	Bubbler valve closed
12/31/2011	1:58:09 PM	Main Vac valve opened
12/31/2011	1:58:09 PM	Helium MFC set to  0.000000
12/31/2011	1:58:09 PM	H2 MFC set to  0.000000
12/31/2011	1:58:09 PM	BCl3 MFC set to  0.000000
12/31/2011	1:58:09 PM	PHl3 MFC set to  0.000000
12/31/2011	1:58:09 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:58:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:58:09 PM	Tube furnace set to 150
12/31/2011	1:58:39 PM	H2 valve closed
12/31/2011	1:58:39 PM	BCl3 valve closed
12/31/2011	1:58:39 PM	PH3 valve closed
12/31/2011	1:58:39 PM	SiCl4 pre valve closed
12/31/2011	1:58:39 PM	SiCl4 post valve closed
12/31/2011	1:58:39 PM	Bypass valve closed
12/31/2011	1:58:39 PM	Bubbler valve closed
12/31/2011	1:58:39 PM	Helium valve opened
12/31/2011	1:58:39 PM	Main Vac valve opened
12/31/2011	1:58:39 PM	Helium MFC set to  20.000000
12/31/2011	1:58:39 PM	H2 MFC set to  0.000000
12/31/2011	1:58:39 PM	BCl3 MFC set to  0.000000
12/31/2011	1:58:39 PM	PHl3 MFC set to  0.000000
12/31/2011	1:58:39 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:58:39 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:58:39 PM	Tube furnace set to 150
12/31/2011	1:59:09 PM	Helium valve closed
12/31/2011	1:59:09 PM	H2 valve closed
12/31/2011	1:59:09 PM	BCl3 valve closed
12/31/2011	1:59:09 PM	PH3 valve closed
12/31/2011	1:59:09 PM	SiCl4 pre valve closed
12/31/2011	1:59:09 PM	SiCl4 post valve closed
12/31/2011	1:59:09 PM	Bypass valve closed
12/31/2011	1:59:09 PM	Bubbler valve closed
12/31/2011	1:59:09 PM	Main Vac valve opened
12/31/2011	1:59:09 PM	Helium MFC set to  0.000000
12/31/2011	1:59:09 PM	H2 MFC set to  0.000000
12/31/2011	1:59:09 PM	BCl3 MFC set to  0.000000
12/31/2011	1:59:09 PM	PHl3 MFC set to  0.000000
12/31/2011	1:59:09 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:59:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:59:10 PM	Tube furnace set to 150
12/31/2011	1:59:40 PM	H2 valve closed
12/31/2011	1:59:40 PM	BCl3 valve closed
12/31/2011	1:59:40 PM	PH3 valve closed
12/31/2011	1:59:40 PM	SiCl4 pre valve closed
12/31/2011	1:59:40 PM	SiCl4 post valve closed
12/31/2011	1:59:40 PM	Bypass valve closed
12/31/2011	1:59:40 PM	Bubbler valve closed
12/31/2011	1:59:40 PM	Helium valve opened
12/31/2011	1:59:40 PM	Main Vac valve opened
12/31/2011	1:59:40 PM	Helium MFC set to  20.000000
12/31/2011	1:59:40 PM	H2 MFC set to  0.000000
12/31/2011	1:59:40 PM	BCl3 MFC set to  0.000000
12/31/2011	1:59:40 PM	PHl3 MFC set to  0.000000
12/31/2011	1:59:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	1:59:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	1:59:40 PM	Tube furnace set to 150
12/31/2011	2:00:10 PM	Helium valve closed
12/31/2011	2:00:10 PM	H2 valve closed
12/31/2011	2:00:10 PM	BCl3 valve closed
12/31/2011	2:00:10 PM	PH3 valve closed
12/31/2011	2:00:10 PM	SiCl4 pre valve closed
12/31/2011	2:00:10 PM	SiCl4 post valve closed
12/31/2011	2:00:10 PM	Bypass valve closed
12/31/2011	2:00:10 PM	Bubbler valve closed
12/31/2011	2:00:10 PM	Main Vac valve opened
12/31/2011	2:00:10 PM	Helium MFC set to  0.000000
12/31/2011	2:00:10 PM	H2 MFC set to  0.000000
12/31/2011	2:00:10 PM	BCl3 MFC set to  0.000000
12/31/2011	2:00:10 PM	PHl3 MFC set to  0.000000
12/31/2011	2:00:10 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:00:10 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:00:10 PM	Tube furnace set to 150
12/31/2011	2:00:40 PM	H2 valve closed
12/31/2011	2:00:40 PM	BCl3 valve closed
12/31/2011	2:00:40 PM	PH3 valve closed
12/31/2011	2:00:40 PM	SiCl4 pre valve closed
12/31/2011	2:00:40 PM	SiCl4 post valve closed
12/31/2011	2:00:40 PM	Bypass valve closed
12/31/2011	2:00:40 PM	Bubbler valve closed
12/31/2011	2:00:40 PM	Helium valve opened
12/31/2011	2:00:40 PM	Main Vac valve opened
12/31/2011	2:00:40 PM	Helium MFC set to  20.000000
12/31/2011	2:00:40 PM	H2 MFC set to  0.000000
12/31/2011	2:00:40 PM	BCl3 MFC set to  0.000000
12/31/2011	2:00:40 PM	PHl3 MFC set to  0.000000
12/31/2011	2:00:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:00:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:00:40 PM	Tube furnace set to 150
12/31/2011	2:01:10 PM	Helium valve closed
12/31/2011	2:01:10 PM	H2 valve closed
12/31/2011	2:01:10 PM	BCl3 valve closed
12/31/2011	2:01:10 PM	PH3 valve closed
12/31/2011	2:01:10 PM	SiCl4 pre valve closed
12/31/2011	2:01:10 PM	SiCl4 post valve closed
12/31/2011	2:01:10 PM	Bypass valve closed
12/31/2011	2:01:10 PM	Bubbler valve closed
12/31/2011	2:01:10 PM	Main Vac valve opened
12/31/2011	2:01:10 PM	Helium MFC set to  0.000000
12/31/2011	2:01:10 PM	H2 MFC set to  0.000000
12/31/2011	2:01:10 PM	BCl3 MFC set to  0.000000
12/31/2011	2:01:10 PM	PHl3 MFC set to  0.000000
12/31/2011	2:01:10 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:01:10 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:01:10 PM	Tube furnace set to 150
12/31/2011	2:01:41 PM	H2 valve closed
12/31/2011	2:01:41 PM	BCl3 valve closed
12/31/2011	2:01:41 PM	PH3 valve closed
12/31/2011	2:01:41 PM	SiCl4 pre valve closed
12/31/2011	2:01:41 PM	SiCl4 post valve closed
12/31/2011	2:01:41 PM	Bypass valve closed
12/31/2011	2:01:41 PM	Bubbler valve closed
12/31/2011	2:01:41 PM	Helium valve opened
12/31/2011	2:01:41 PM	Main Vac valve opened
12/31/2011	2:01:41 PM	Helium MFC set to  20.000000
12/31/2011	2:01:41 PM	H2 MFC set to  0.000000
12/31/2011	2:01:41 PM	BCl3 MFC set to  0.000000
12/31/2011	2:01:41 PM	PHl3 MFC set to  0.000000
12/31/2011	2:01:41 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:01:41 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:01:41 PM	Tube furnace set to 150
12/31/2011	2:02:11 PM	Helium valve closed
12/31/2011	2:02:11 PM	H2 valve closed
12/31/2011	2:02:11 PM	BCl3 valve closed
12/31/2011	2:02:11 PM	PH3 valve closed
12/31/2011	2:02:11 PM	SiCl4 pre valve closed
12/31/2011	2:02:11 PM	SiCl4 post valve closed
12/31/2011	2:02:11 PM	Bypass valve closed
12/31/2011	2:02:11 PM	Bubbler valve closed
12/31/2011	2:02:11 PM	Main Vac valve opened
12/31/2011	2:02:11 PM	Helium MFC set to  0.000000
12/31/2011	2:02:11 PM	H2 MFC set to  0.000000
12/31/2011	2:02:11 PM	BCl3 MFC set to  0.000000
12/31/2011	2:02:11 PM	PHl3 MFC set to  0.000000
12/31/2011	2:02:11 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:02:11 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:02:11 PM	Tube furnace set to 150
12/31/2011	2:02:41 PM	H2 valve closed
12/31/2011	2:02:41 PM	BCl3 valve closed
12/31/2011	2:02:41 PM	PH3 valve closed
12/31/2011	2:02:41 PM	SiCl4 pre valve closed
12/31/2011	2:02:41 PM	SiCl4 post valve closed
12/31/2011	2:02:41 PM	Bypass valve closed
12/31/2011	2:02:41 PM	Bubbler valve closed
12/31/2011	2:02:41 PM	Helium valve opened
12/31/2011	2:02:41 PM	Main Vac valve opened
12/31/2011	2:02:41 PM	Helium MFC set to  20.000000
12/31/2011	2:02:41 PM	H2 MFC set to  0.000000
12/31/2011	2:02:41 PM	BCl3 MFC set to  0.000000
12/31/2011	2:02:41 PM	PHl3 MFC set to  0.000000
12/31/2011	2:02:41 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:02:41 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:02:41 PM	Tube furnace set to 150
12/31/2011	2:03:11 PM	Helium valve closed
12/31/2011	2:03:11 PM	H2 valve closed
12/31/2011	2:03:11 PM	BCl3 valve closed
12/31/2011	2:03:11 PM	PH3 valve closed
12/31/2011	2:03:11 PM	SiCl4 pre valve closed
12/31/2011	2:03:11 PM	SiCl4 post valve closed
12/31/2011	2:03:11 PM	Bypass valve closed
12/31/2011	2:03:11 PM	Bubbler valve closed
12/31/2011	2:03:11 PM	Main Vac valve opened
12/31/2011	2:03:11 PM	Helium MFC set to  0.000000
12/31/2011	2:03:11 PM	H2 MFC set to  0.000000
12/31/2011	2:03:11 PM	BCl3 MFC set to  0.000000
12/31/2011	2:03:11 PM	PHl3 MFC set to  0.000000
12/31/2011	2:03:11 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:03:11 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:03:11 PM	Tube furnace set to 150
12/31/2011	2:03:41 PM	H2 valve closed
12/31/2011	2:03:41 PM	BCl3 valve closed
12/31/2011	2:03:41 PM	PH3 valve closed
12/31/2011	2:03:41 PM	SiCl4 pre valve closed
12/31/2011	2:03:41 PM	SiCl4 post valve closed
12/31/2011	2:03:41 PM	Bypass valve closed
12/31/2011	2:03:41 PM	Bubbler valve closed
12/31/2011	2:03:41 PM	Helium valve opened
12/31/2011	2:03:41 PM	Main Vac valve opened
12/31/2011	2:03:41 PM	Helium MFC set to  20.000000
12/31/2011	2:03:41 PM	H2 MFC set to  0.000000
12/31/2011	2:03:41 PM	BCl3 MFC set to  0.000000
12/31/2011	2:03:41 PM	PHl3 MFC set to  0.000000
12/31/2011	2:03:41 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:03:41 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:03:42 PM	Tube furnace set to 150
12/31/2011	2:04:12 PM	Helium valve closed
12/31/2011	2:04:12 PM	H2 valve closed
12/31/2011	2:04:12 PM	BCl3 valve closed
12/31/2011	2:04:12 PM	PH3 valve closed
12/31/2011	2:04:12 PM	SiCl4 pre valve closed
12/31/2011	2:04:12 PM	SiCl4 post valve closed
12/31/2011	2:04:12 PM	Bypass valve closed
12/31/2011	2:04:12 PM	Bubbler valve closed
12/31/2011	2:04:12 PM	Main Vac valve opened
12/31/2011	2:04:12 PM	Helium MFC set to  0.000000
12/31/2011	2:04:12 PM	H2 MFC set to  0.000000
12/31/2011	2:04:12 PM	BCl3 MFC set to  0.000000
12/31/2011	2:04:12 PM	PHl3 MFC set to  0.000000
12/31/2011	2:04:12 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:04:12 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:04:12 PM	Tube furnace set to 150
12/31/2011	2:04:42 PM	H2 valve closed
12/31/2011	2:04:42 PM	BCl3 valve closed
12/31/2011	2:04:42 PM	PH3 valve closed
12/31/2011	2:04:42 PM	SiCl4 pre valve closed
12/31/2011	2:04:42 PM	SiCl4 post valve closed
12/31/2011	2:04:42 PM	Bypass valve closed
12/31/2011	2:04:42 PM	Bubbler valve closed
12/31/2011	2:04:42 PM	Helium valve opened
12/31/2011	2:04:42 PM	Main Vac valve opened
12/31/2011	2:04:42 PM	Helium MFC set to  20.000000
12/31/2011	2:04:42 PM	H2 MFC set to  0.000000
12/31/2011	2:04:42 PM	BCl3 MFC set to  0.000000
12/31/2011	2:04:42 PM	PHl3 MFC set to  0.000000
12/31/2011	2:04:42 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:04:42 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:04:42 PM	Tube furnace set to 150
12/31/2011	2:05:12 PM	Helium valve closed
12/31/2011	2:05:12 PM	H2 valve closed
12/31/2011	2:05:12 PM	BCl3 valve closed
12/31/2011	2:05:12 PM	PH3 valve closed
12/31/2011	2:05:12 PM	SiCl4 pre valve closed
12/31/2011	2:05:12 PM	SiCl4 post valve closed
12/31/2011	2:05:12 PM	Bypass valve closed
12/31/2011	2:05:12 PM	Bubbler valve closed
12/31/2011	2:05:12 PM	Main Vac valve opened
12/31/2011	2:05:12 PM	Helium MFC set to  0.000000
12/31/2011	2:05:12 PM	H2 MFC set to  0.000000
12/31/2011	2:05:12 PM	BCl3 MFC set to  0.000000
12/31/2011	2:05:12 PM	PHl3 MFC set to  0.000000
12/31/2011	2:05:12 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:05:12 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:05:12 PM	Tube furnace set to 150
12/31/2011	2:05:42 PM	H2 valve closed
12/31/2011	2:05:42 PM	BCl3 valve closed
12/31/2011	2:05:42 PM	PH3 valve closed
12/31/2011	2:05:42 PM	SiCl4 pre valve closed
12/31/2011	2:05:42 PM	SiCl4 post valve closed
12/31/2011	2:05:42 PM	Bypass valve closed
12/31/2011	2:05:42 PM	Bubbler valve closed
12/31/2011	2:05:42 PM	Helium valve opened
12/31/2011	2:05:42 PM	Main Vac valve opened
12/31/2011	2:05:42 PM	Helium MFC set to  20.000000
12/31/2011	2:05:42 PM	H2 MFC set to  0.000000
12/31/2011	2:05:42 PM	BCl3 MFC set to  0.000000
12/31/2011	2:05:42 PM	PHl3 MFC set to  0.000000
12/31/2011	2:05:42 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:05:42 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:05:42 PM	Tube furnace set to 150
12/31/2011	2:06:12 PM	Helium valve closed
12/31/2011	2:06:12 PM	H2 valve closed
12/31/2011	2:06:12 PM	BCl3 valve closed
12/31/2011	2:06:12 PM	PH3 valve closed
12/31/2011	2:06:12 PM	SiCl4 pre valve closed
12/31/2011	2:06:12 PM	SiCl4 post valve closed
12/31/2011	2:06:12 PM	Bypass valve closed
12/31/2011	2:06:12 PM	Bubbler valve closed
12/31/2011	2:06:12 PM	Main Vac valve opened
12/31/2011	2:06:12 PM	Helium MFC set to  0.000000
12/31/2011	2:06:12 PM	H2 MFC set to  0.000000
12/31/2011	2:06:12 PM	BCl3 MFC set to  0.000000
12/31/2011	2:06:12 PM	PHl3 MFC set to  0.000000
12/31/2011	2:06:12 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:06:12 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:06:13 PM	Tube furnace set to 150
12/31/2011	2:06:43 PM	H2 valve closed
12/31/2011	2:06:43 PM	BCl3 valve closed
12/31/2011	2:06:43 PM	PH3 valve closed
12/31/2011	2:06:43 PM	SiCl4 pre valve closed
12/31/2011	2:06:43 PM	SiCl4 post valve closed
12/31/2011	2:06:43 PM	Bypass valve closed
12/31/2011	2:06:43 PM	Bubbler valve closed
12/31/2011	2:06:43 PM	Helium valve opened
12/31/2011	2:06:43 PM	Main Vac valve opened
12/31/2011	2:06:43 PM	Helium MFC set to  20.000000
12/31/2011	2:06:43 PM	H2 MFC set to  0.000000
12/31/2011	2:06:43 PM	BCl3 MFC set to  0.000000
12/31/2011	2:06:43 PM	PHl3 MFC set to  0.000000
12/31/2011	2:06:43 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:06:43 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:06:43 PM	Tube furnace set to 150
12/31/2011	2:07:13 PM	Helium valve closed
12/31/2011	2:07:13 PM	H2 valve closed
12/31/2011	2:07:13 PM	BCl3 valve closed
12/31/2011	2:07:13 PM	PH3 valve closed
12/31/2011	2:07:13 PM	SiCl4 pre valve closed
12/31/2011	2:07:13 PM	SiCl4 post valve closed
12/31/2011	2:07:13 PM	Bypass valve closed
12/31/2011	2:07:13 PM	Bubbler valve closed
12/31/2011	2:07:13 PM	Main Vac valve opened
12/31/2011	2:07:13 PM	Helium MFC set to  0.000000
12/31/2011	2:07:13 PM	H2 MFC set to  0.000000
12/31/2011	2:07:13 PM	BCl3 MFC set to  0.000000
12/31/2011	2:07:13 PM	PHl3 MFC set to  0.000000
12/31/2011	2:07:13 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:07:13 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:07:13 PM	Tube furnace set to 150
12/31/2011	2:07:43 PM	H2 valve closed
12/31/2011	2:07:43 PM	BCl3 valve closed
12/31/2011	2:07:43 PM	PH3 valve closed
12/31/2011	2:07:43 PM	SiCl4 pre valve closed
12/31/2011	2:07:43 PM	SiCl4 post valve closed
12/31/2011	2:07:43 PM	Bypass valve closed
12/31/2011	2:07:43 PM	Bubbler valve closed
12/31/2011	2:07:43 PM	Helium valve opened
12/31/2011	2:07:43 PM	Main Vac valve opened
12/31/2011	2:07:43 PM	Helium MFC set to  20.000000
12/31/2011	2:07:43 PM	H2 MFC set to  0.000000
12/31/2011	2:07:43 PM	BCl3 MFC set to  0.000000
12/31/2011	2:07:43 PM	PHl3 MFC set to  0.000000
12/31/2011	2:07:43 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:07:43 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:07:43 PM	Tube furnace set to 150
12/31/2011	2:08:13 PM	Helium valve closed
12/31/2011	2:08:13 PM	H2 valve closed
12/31/2011	2:08:13 PM	BCl3 valve closed
12/31/2011	2:08:13 PM	PH3 valve closed
12/31/2011	2:08:13 PM	SiCl4 pre valve closed
12/31/2011	2:08:13 PM	SiCl4 post valve closed
12/31/2011	2:08:13 PM	Bypass valve closed
12/31/2011	2:08:13 PM	Bubbler valve closed
12/31/2011	2:08:13 PM	Main Vac valve opened
12/31/2011	2:08:13 PM	Helium MFC set to  0.000000
12/31/2011	2:08:13 PM	H2 MFC set to  0.000000
12/31/2011	2:08:13 PM	BCl3 MFC set to  0.000000
12/31/2011	2:08:13 PM	PHl3 MFC set to  0.000000
12/31/2011	2:08:13 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:08:13 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:08:14 PM	Tube furnace set to 150
12/31/2011	2:08:44 PM	H2 valve closed
12/31/2011	2:08:44 PM	BCl3 valve closed
12/31/2011	2:08:44 PM	PH3 valve closed
12/31/2011	2:08:44 PM	SiCl4 pre valve closed
12/31/2011	2:08:44 PM	SiCl4 post valve closed
12/31/2011	2:08:44 PM	Bypass valve closed
12/31/2011	2:08:44 PM	Bubbler valve closed
12/31/2011	2:08:44 PM	Helium valve opened
12/31/2011	2:08:44 PM	Main Vac valve opened
12/31/2011	2:08:44 PM	Helium MFC set to  20.000000
12/31/2011	2:08:44 PM	H2 MFC set to  0.000000
12/31/2011	2:08:44 PM	BCl3 MFC set to  0.000000
12/31/2011	2:08:44 PM	PHl3 MFC set to  0.000000
12/31/2011	2:08:44 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:08:44 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:08:44 PM	Tube furnace set to 150
12/31/2011	2:09:14 PM	Helium valve closed
12/31/2011	2:09:14 PM	H2 valve closed
12/31/2011	2:09:14 PM	BCl3 valve closed
12/31/2011	2:09:14 PM	PH3 valve closed
12/31/2011	2:09:14 PM	SiCl4 pre valve closed
12/31/2011	2:09:14 PM	SiCl4 post valve closed
12/31/2011	2:09:14 PM	Bypass valve closed
12/31/2011	2:09:14 PM	Bubbler valve closed
12/31/2011	2:09:14 PM	Main Vac valve opened
12/31/2011	2:09:14 PM	Helium MFC set to  0.000000
12/31/2011	2:09:14 PM	H2 MFC set to  0.000000
12/31/2011	2:09:14 PM	BCl3 MFC set to  0.000000
12/31/2011	2:09:14 PM	PHl3 MFC set to  0.000000
12/31/2011	2:09:14 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:09:14 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:09:14 PM	Tube furnace set to 150
12/31/2011	2:09:44 PM	H2 valve closed
12/31/2011	2:09:44 PM	BCl3 valve closed
12/31/2011	2:09:44 PM	PH3 valve closed
12/31/2011	2:09:44 PM	SiCl4 pre valve closed
12/31/2011	2:09:44 PM	SiCl4 post valve closed
12/31/2011	2:09:44 PM	Bypass valve closed
12/31/2011	2:09:44 PM	Bubbler valve closed
12/31/2011	2:09:44 PM	Helium valve opened
12/31/2011	2:09:44 PM	Main Vac valve opened
12/31/2011	2:09:44 PM	Helium MFC set to  20.000000
12/31/2011	2:09:44 PM	H2 MFC set to  0.000000
12/31/2011	2:09:44 PM	BCl3 MFC set to  0.000000
12/31/2011	2:09:44 PM	PHl3 MFC set to  0.000000
12/31/2011	2:09:44 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:09:44 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:09:44 PM	Tube furnace set to 150
12/31/2011	2:10:14 PM	Helium valve closed
12/31/2011	2:10:14 PM	H2 valve closed
12/31/2011	2:10:14 PM	BCl3 valve closed
12/31/2011	2:10:14 PM	PH3 valve closed
12/31/2011	2:10:14 PM	SiCl4 pre valve closed
12/31/2011	2:10:14 PM	SiCl4 post valve closed
12/31/2011	2:10:14 PM	Bypass valve closed
12/31/2011	2:10:14 PM	Bubbler valve closed
12/31/2011	2:10:14 PM	Main Vac valve opened
12/31/2011	2:10:14 PM	Helium MFC set to  0.000000
12/31/2011	2:10:14 PM	H2 MFC set to  0.000000
12/31/2011	2:10:14 PM	BCl3 MFC set to  0.000000
12/31/2011	2:10:14 PM	PHl3 MFC set to  0.000000
12/31/2011	2:10:14 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:10:14 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:10:14 PM	Tube furnace set to 150
12/31/2011	2:10:44 PM	H2 valve closed
12/31/2011	2:10:44 PM	BCl3 valve closed
12/31/2011	2:10:44 PM	PH3 valve closed
12/31/2011	2:10:44 PM	SiCl4 pre valve closed
12/31/2011	2:10:44 PM	SiCl4 post valve closed
12/31/2011	2:10:44 PM	Bypass valve closed
12/31/2011	2:10:44 PM	Bubbler valve closed
12/31/2011	2:10:44 PM	Helium valve opened
12/31/2011	2:10:44 PM	Main Vac valve opened
12/31/2011	2:10:44 PM	Helium MFC set to  20.000000
12/31/2011	2:10:44 PM	H2 MFC set to  0.000000
12/31/2011	2:10:44 PM	BCl3 MFC set to  0.000000
12/31/2011	2:10:44 PM	PHl3 MFC set to  0.000000
12/31/2011	2:10:44 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:10:44 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:10:45 PM	Tube furnace set to 150
12/31/2011	2:11:15 PM	Helium valve closed
12/31/2011	2:11:15 PM	H2 valve closed
12/31/2011	2:11:15 PM	BCl3 valve closed
12/31/2011	2:11:15 PM	PH3 valve closed
12/31/2011	2:11:15 PM	SiCl4 pre valve closed
12/31/2011	2:11:15 PM	SiCl4 post valve closed
12/31/2011	2:11:15 PM	Bypass valve closed
12/31/2011	2:11:15 PM	Bubbler valve closed
12/31/2011	2:11:15 PM	Main Vac valve opened
12/31/2011	2:11:15 PM	Helium MFC set to  0.000000
12/31/2011	2:11:15 PM	H2 MFC set to  0.000000
12/31/2011	2:11:15 PM	BCl3 MFC set to  0.000000
12/31/2011	2:11:15 PM	PHl3 MFC set to  0.000000
12/31/2011	2:11:15 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:11:15 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:11:15 PM	Tube furnace set to 180
12/31/2011	2:11:20 PM	Run finished at 2:11 PM
12/31/2011	2:27:19 PM	Main Vac valve closed
12/31/2011	2:27:30 PM	Main Vac valve opened
12/31/2011	2:28:50 PM	Recipe started at 2:28 PM
12/31/2011	2:28:50 PM	Helium valve closed
12/31/2011	2:28:50 PM	H2 valve closed
12/31/2011	2:28:50 PM	BCl3 valve closed
12/31/2011	2:28:50 PM	PH3 valve closed
12/31/2011	2:28:50 PM	SiCl4 pre valve closed
12/31/2011	2:28:50 PM	SiCl4 post valve closed
12/31/2011	2:28:50 PM	Main Vac valve closed
12/31/2011	2:28:50 PM	Bypass valve closed
12/31/2011	2:28:50 PM	Bubbler valve closed
12/31/2011	2:28:50 PM	Helium MFC set to  0.000000
12/31/2011	2:28:50 PM	H2 MFC set to  0.000000
12/31/2011	2:28:50 PM	BCl3 MFC set to  0.000000
12/31/2011	2:28:50 PM	PHl3 MFC set to  0.000000
12/31/2011	2:28:50 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:28:50 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:28:51 PM	Tube furnace set to 0
12/31/2011	2:28:54 PM	Helium valve closed
12/31/2011	2:28:54 PM	BCl3 valve closed
12/31/2011	2:28:54 PM	PH3 valve closed
12/31/2011	2:28:54 PM	SiCl4 pre valve closed
12/31/2011	2:28:54 PM	SiCl4 post valve closed
12/31/2011	2:28:54 PM	Main Vac valve closed
12/31/2011	2:28:54 PM	Bypass valve closed
12/31/2011	2:28:54 PM	Bubbler valve closed
12/31/2011	2:28:54 PM	H2 valve opened
12/31/2011	2:28:54 PM	Helium MFC set to  0.000000
12/31/2011	2:28:54 PM	H2 MFC set to  500.000000
12/31/2011	2:28:54 PM	BCl3 MFC set to  0.000000
12/31/2011	2:28:54 PM	PHl3 MFC set to  0.000000
12/31/2011	2:28:54 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:28:54 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:28:54 PM	Tube furnace set to 50
12/31/2011	2:29:59 PM	Helium valve closed
12/31/2011	2:29:59 PM	BCl3 valve closed
12/31/2011	2:29:59 PM	PH3 valve closed
12/31/2011	2:29:59 PM	SiCl4 pre valve closed
12/31/2011	2:29:59 PM	SiCl4 post valve closed
12/31/2011	2:29:59 PM	Main Vac valve closed
12/31/2011	2:29:59 PM	Bypass valve closed
12/31/2011	2:29:59 PM	H2 valve opened
12/31/2011	2:29:59 PM	Bubbler valve opened
12/31/2011	2:29:59 PM	Helium MFC set to  0.000000
12/31/2011	2:29:59 PM	H2 MFC set to  500.000000
12/31/2011	2:29:59 PM	BCl3 MFC set to  0.000000
12/31/2011	2:29:59 PM	PHl3 MFC set to  0.000000
12/31/2011	2:29:59 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:29:59 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:29:59 PM	Tube furnace set to 50
12/31/2011	2:30:00 PM	Helium valve closed
12/31/2011	2:30:00 PM	BCl3 valve closed
12/31/2011	2:30:00 PM	PH3 valve closed
12/31/2011	2:30:00 PM	SiCl4 pre valve closed
12/31/2011	2:30:00 PM	SiCl4 post valve closed
12/31/2011	2:30:00 PM	Main Vac valve closed
12/31/2011	2:30:00 PM	Bypass valve closed
12/31/2011	2:30:00 PM	H2 valve opened
12/31/2011	2:30:00 PM	Bubbler valve opened
12/31/2011	2:30:00 PM	Helium MFC set to  0.000000
12/31/2011	2:30:00 PM	H2 MFC set to  500.000000
12/31/2011	2:30:00 PM	BCl3 MFC set to  0.000000
12/31/2011	2:30:00 PM	PHl3 MFC set to  0.000000
12/31/2011	2:30:00 PM	SiCl4 MFC set to  0.000000
12/31/2011	2:30:00 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:30:00 PM	Tube furnace set to 1000
12/31/2011	2:50:00 PM	Helium valve closed
12/31/2011	2:50:00 PM	BCl3 valve closed
12/31/2011	2:50:00 PM	PH3 valve closed
12/31/2011	2:50:00 PM	Main Vac valve closed
12/31/2011	2:50:00 PM	Bypass valve closed
12/31/2011	2:50:00 PM	H2 valve opened
12/31/2011	2:50:00 PM	SiCl4 pre valve opened
12/31/2011	2:50:00 PM	SiCl4 post valve opened
12/31/2011	2:50:00 PM	Bubbler valve opened
12/31/2011	2:50:01 PM	Helium MFC set to  0.000000
12/31/2011	2:50:01 PM	H2 MFC set to  500.000000
12/31/2011	2:50:01 PM	BCl3 MFC set to  0.000000
12/31/2011	2:50:01 PM	PHl3 MFC set to  0.000000
12/31/2011	2:50:01 PM	SiCl4 MFC set to  45.000000
12/31/2011	2:50:01 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	2:50:01 PM	Tube furnace set to 1000
12/31/2011	3:05:01 PM	Helium valve closed
12/31/2011	3:05:01 PM	BCl3 valve closed
12/31/2011	3:05:01 PM	PH3 valve closed
12/31/2011	3:05:01 PM	SiCl4 pre valve closed
12/31/2011	3:05:01 PM	SiCl4 post valve closed
12/31/2011	3:05:01 PM	Main Vac valve closed
12/31/2011	3:05:01 PM	Bypass valve closed
12/31/2011	3:05:01 PM	H2 valve opened
12/31/2011	3:05:01 PM	Bubbler valve opened
12/31/2011	3:05:01 PM	Helium MFC set to  0.000000
12/31/2011	3:05:01 PM	H2 MFC set to  480.000000
12/31/2011	3:05:01 PM	BCl3 MFC set to  0.000000
12/31/2011	3:05:01 PM	PHl3 MFC set to  0.000000
12/31/2011	3:05:01 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:05:01 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:05:01 PM	Tube furnace set to 750
12/31/2011	3:15:01 PM	H2 valve closed
12/31/2011	3:15:01 PM	BCl3 valve closed
12/31/2011	3:15:01 PM	PH3 valve closed
12/31/2011	3:15:01 PM	SiCl4 pre valve closed
12/31/2011	3:15:01 PM	SiCl4 post valve closed
12/31/2011	3:15:01 PM	Main Vac valve closed
12/31/2011	3:15:01 PM	Bypass valve closed
12/31/2011	3:15:01 PM	Helium valve opened
12/31/2011	3:15:01 PM	Bubbler valve opened
12/31/2011	3:15:01 PM	Helium MFC set to  400.000000
12/31/2011	3:15:01 PM	H2 MFC set to  0.000000
12/31/2011	3:15:01 PM	BCl3 MFC set to  0.000000
12/31/2011	3:15:01 PM	PHl3 MFC set to  0.000000
12/31/2011	3:15:01 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:15:01 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:15:01 PM	Tube furnace set to 0
12/31/2011	3:19:31 PM	Run aborted at 3:19 PM
12/31/2011	3:19:31 PM	Helium valve closed
12/31/2011	3:19:31 PM	H2 valve closed
12/31/2011	3:19:31 PM	BCl3 valve closed
12/31/2011	3:19:31 PM	PH3 valve closed
12/31/2011	3:19:31 PM	SiCl4 pre valve closed
12/31/2011	3:19:31 PM	SiCl4 post valve closed
12/31/2011	3:19:31 PM	Bypass valve closed
12/31/2011	3:19:31 PM	Main Vac valve closed
12/31/2011	3:19:31 PM	Bubbler valve closed
12/31/2011	3:19:31 PM	Helium MFC set to  0.000000
12/31/2011	3:19:31 PM	H2 MFC set to  0.000000
12/31/2011	3:19:31 PM	BCl3 MFC set to  0.000000
12/31/2011	3:19:31 PM	PHl3 MFC set to  0.000000
12/31/2011	3:19:31 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:19:31 PM	Tube furnace set to 0
12/31/2011	3:19:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/31/2011	3:19:36 PM	Recipe started at 3:19 PM
12/31/2011	3:19:36 PM	Helium valve closed
12/31/2011	3:19:36 PM	H2 valve closed
12/31/2011	3:19:36 PM	BCl3 valve closed
12/31/2011	3:19:36 PM	PH3 valve closed
12/31/2011	3:19:36 PM	SiCl4 pre valve closed
12/31/2011	3:19:36 PM	SiCl4 post valve closed
12/31/2011	3:19:36 PM	Main Vac valve closed
12/31/2011	3:19:36 PM	Bypass valve closed
12/31/2011	3:19:36 PM	Bubbler valve closed
12/31/2011	3:19:36 PM	Helium MFC set to  0.000000
12/31/2011	3:19:36 PM	H2 MFC set to  0.000000
12/31/2011	3:19:36 PM	BCl3 MFC set to  0.000000
12/31/2011	3:19:36 PM	PHl3 MFC set to  0.000000
12/31/2011	3:19:36 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:19:36 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:19:36 PM	Tube furnace set to 0
12/31/2011	3:19:39 PM	H2 valve closed
12/31/2011	3:19:39 PM	BCl3 valve closed
12/31/2011	3:19:39 PM	PH3 valve closed
12/31/2011	3:19:39 PM	SiCl4 pre valve closed
12/31/2011	3:19:39 PM	SiCl4 post valve closed
12/31/2011	3:19:39 PM	Main Vac valve closed
12/31/2011	3:19:39 PM	Bypass valve closed
12/31/2011	3:19:39 PM	Bubbler valve closed
12/31/2011	3:19:39 PM	Helium valve opened
12/31/2011	3:19:39 PM	Helium MFC set to  500.000000
12/31/2011	3:19:39 PM	H2 MFC set to  0.000000
12/31/2011	3:19:39 PM	BCl3 MFC set to  0.000000
12/31/2011	3:19:39 PM	PHl3 MFC set to  0.000000
12/31/2011	3:19:39 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:19:39 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:19:39 PM	Tube furnace set to 0
12/31/2011	3:19:40 PM	Helium valve closed
12/31/2011	3:19:40 PM	H2 valve closed
12/31/2011	3:19:40 PM	BCl3 valve closed
12/31/2011	3:19:40 PM	PH3 valve closed
12/31/2011	3:19:40 PM	SiCl4 pre valve closed
12/31/2011	3:19:40 PM	SiCl4 post valve closed
12/31/2011	3:19:40 PM	Main Vac valve closed
12/31/2011	3:19:40 PM	Bypass valve closed
12/31/2011	3:19:40 PM	Bubbler valve closed
12/31/2011	3:19:40 PM	Helium MFC set to  0.000000
12/31/2011	3:19:40 PM	H2 MFC set to  0.000000
12/31/2011	3:19:40 PM	BCl3 MFC set to  0.000000
12/31/2011	3:19:40 PM	PHl3 MFC set to  0.000000
12/31/2011	3:19:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:19:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:19:40 PM	Tube furnace set to 0
12/31/2011	3:19:41 PM	Run finished at 3:19 PM
12/31/2011	3:19:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/31/2011	3:23:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	3:23:47 PM	Recipe started at 3:23 PM
12/31/2011	3:23:47 PM	Helium valve closed
12/31/2011	3:23:47 PM	H2 valve closed
12/31/2011	3:23:47 PM	BCl3 valve closed
12/31/2011	3:23:47 PM	PH3 valve closed
12/31/2011	3:23:47 PM	SiCl4 pre valve closed
12/31/2011	3:23:47 PM	SiCl4 post valve closed
12/31/2011	3:23:47 PM	Main Vac valve closed
12/31/2011	3:23:47 PM	Bubbler valve closed
12/31/2011	3:23:47 PM	Bypass valve opened
12/31/2011	3:23:47 PM	Helium MFC set to  0.000000
12/31/2011	3:23:47 PM	H2 MFC set to  0.000000
12/31/2011	3:23:47 PM	BCl3 MFC set to  0.000000
12/31/2011	3:23:47 PM	PHl3 MFC set to  0.000000
12/31/2011	3:23:47 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:23:47 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:23:47 PM	Tube furnace set to 0
12/31/2011	3:26:00 PM	Helium valve closed
12/31/2011	3:26:00 PM	H2 valve closed
12/31/2011	3:26:00 PM	BCl3 valve closed
12/31/2011	3:26:00 PM	PH3 valve closed
12/31/2011	3:26:00 PM	SiCl4 pre valve closed
12/31/2011	3:26:00 PM	SiCl4 post valve closed
12/31/2011	3:26:00 PM	Main Vac valve closed
12/31/2011	3:26:00 PM	Bubbler valve closed
12/31/2011	3:26:00 PM	Bypass valve opened
12/31/2011	3:26:00 PM	Helium MFC set to  0.000000
12/31/2011	3:26:00 PM	H2 MFC set to  0.000000
12/31/2011	3:26:00 PM	BCl3 MFC set to  0.000000
12/31/2011	3:26:00 PM	PHl3 MFC set to  0.000000
12/31/2011	3:26:00 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:26:00 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:26:00 PM	Tube furnace set to 0
12/31/2011	3:27:00 PM	Helium valve closed
12/31/2011	3:27:00 PM	H2 valve closed
12/31/2011	3:27:00 PM	BCl3 valve closed
12/31/2011	3:27:00 PM	PH3 valve closed
12/31/2011	3:27:00 PM	SiCl4 pre valve closed
12/31/2011	3:27:00 PM	SiCl4 post valve closed
12/31/2011	3:27:00 PM	Bypass valve closed
12/31/2011	3:27:00 PM	Bubbler valve closed
12/31/2011	3:27:00 PM	Main Vac valve opened
12/31/2011	3:27:00 PM	Helium MFC set to  0.000000
12/31/2011	3:27:00 PM	H2 MFC set to  0.000000
12/31/2011	3:27:00 PM	BCl3 MFC set to  0.000000
12/31/2011	3:27:00 PM	PHl3 MFC set to  0.000000
12/31/2011	3:27:00 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:27:00 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:27:00 PM	Tube furnace set to 0
12/31/2011	3:27:01 PM	Run finished at 3:27 PM
12/31/2011	3:27:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	3:28:29 PM	Recipe started at 3:28 PM
12/31/2011	3:28:29 PM	Helium valve closed
12/31/2011	3:28:29 PM	H2 valve closed
12/31/2011	3:28:29 PM	BCl3 valve closed
12/31/2011	3:28:29 PM	PH3 valve closed
12/31/2011	3:28:29 PM	SiCl4 pre valve closed
12/31/2011	3:28:29 PM	SiCl4 post valve closed
12/31/2011	3:28:29 PM	Main Vac valve closed
12/31/2011	3:28:29 PM	Bubbler valve closed
12/31/2011	3:28:29 PM	Bypass valve opened
12/31/2011	3:28:29 PM	Helium MFC set to  0.000000
12/31/2011	3:28:29 PM	H2 MFC set to  0.000000
12/31/2011	3:28:29 PM	BCl3 MFC set to  0.000000
12/31/2011	3:28:29 PM	PHl3 MFC set to  0.000000
12/31/2011	3:28:29 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:28:29 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:28:29 PM	Tube furnace set to 180
12/31/2011	3:28:32 PM	Helium valve closed
12/31/2011	3:28:32 PM	H2 valve closed
12/31/2011	3:28:32 PM	BCl3 valve closed
12/31/2011	3:28:32 PM	PH3 valve closed
12/31/2011	3:28:32 PM	SiCl4 pre valve closed
12/31/2011	3:28:32 PM	SiCl4 post valve closed
12/31/2011	3:28:32 PM	Main Vac valve closed
12/31/2011	3:28:32 PM	Bubbler valve closed
12/31/2011	3:28:32 PM	Bypass valve opened
12/31/2011	3:28:32 PM	Helium MFC set to  0.000000
12/31/2011	3:28:32 PM	H2 MFC set to  0.000000
12/31/2011	3:28:32 PM	BCl3 MFC set to  0.000000
12/31/2011	3:28:32 PM	PHl3 MFC set to  0.000000
12/31/2011	3:28:32 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:28:32 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:28:33 PM	Tube furnace set to 150
12/31/2011	3:29:03 PM	Helium valve closed
12/31/2011	3:29:03 PM	H2 valve closed
12/31/2011	3:29:03 PM	BCl3 valve closed
12/31/2011	3:29:03 PM	PH3 valve closed
12/31/2011	3:29:03 PM	SiCl4 pre valve closed
12/31/2011	3:29:03 PM	SiCl4 post valve closed
12/31/2011	3:29:03 PM	Bypass valve closed
12/31/2011	3:29:03 PM	Bubbler valve closed
12/31/2011	3:29:03 PM	Main Vac valve opened
12/31/2011	3:29:03 PM	Helium MFC set to  0.000000
12/31/2011	3:29:03 PM	H2 MFC set to  0.000000
12/31/2011	3:29:03 PM	BCl3 MFC set to  0.000000
12/31/2011	3:29:03 PM	PHl3 MFC set to  0.000000
12/31/2011	3:29:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:29:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:29:03 PM	Tube furnace set to 180
12/31/2011	3:29:33 PM	H2 valve closed
12/31/2011	3:29:33 PM	BCl3 valve closed
12/31/2011	3:29:33 PM	PH3 valve closed
12/31/2011	3:29:33 PM	SiCl4 pre valve closed
12/31/2011	3:29:33 PM	SiCl4 post valve closed
12/31/2011	3:29:33 PM	Bypass valve closed
12/31/2011	3:29:33 PM	Bubbler valve closed
12/31/2011	3:29:33 PM	Helium valve opened
12/31/2011	3:29:33 PM	Main Vac valve opened
12/31/2011	3:29:33 PM	Helium MFC set to  20.000000
12/31/2011	3:29:33 PM	H2 MFC set to  0.000000
12/31/2011	3:29:33 PM	BCl3 MFC set to  0.000000
12/31/2011	3:29:33 PM	PHl3 MFC set to  0.000000
12/31/2011	3:29:33 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:29:33 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:29:33 PM	Tube furnace set to 180
12/31/2011	3:30:03 PM	Helium valve closed
12/31/2011	3:30:03 PM	H2 valve closed
12/31/2011	3:30:03 PM	BCl3 valve closed
12/31/2011	3:30:03 PM	PH3 valve closed
12/31/2011	3:30:03 PM	SiCl4 pre valve closed
12/31/2011	3:30:03 PM	SiCl4 post valve closed
12/31/2011	3:30:03 PM	Bypass valve closed
12/31/2011	3:30:03 PM	Bubbler valve closed
12/31/2011	3:30:03 PM	Main Vac valve opened
12/31/2011	3:30:03 PM	Helium MFC set to  0.000000
12/31/2011	3:30:03 PM	H2 MFC set to  0.000000
12/31/2011	3:30:03 PM	BCl3 MFC set to  0.000000
12/31/2011	3:30:03 PM	PHl3 MFC set to  0.000000
12/31/2011	3:30:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:30:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:30:03 PM	Tube furnace set to 150
12/31/2011	3:30:33 PM	H2 valve closed
12/31/2011	3:30:33 PM	BCl3 valve closed
12/31/2011	3:30:33 PM	PH3 valve closed
12/31/2011	3:30:33 PM	SiCl4 pre valve closed
12/31/2011	3:30:33 PM	SiCl4 post valve closed
12/31/2011	3:30:33 PM	Bypass valve closed
12/31/2011	3:30:33 PM	Bubbler valve closed
12/31/2011	3:30:33 PM	Helium valve opened
12/31/2011	3:30:33 PM	Main Vac valve opened
12/31/2011	3:30:33 PM	Helium MFC set to  20.000000
12/31/2011	3:30:33 PM	H2 MFC set to  0.000000
12/31/2011	3:30:33 PM	BCl3 MFC set to  0.000000
12/31/2011	3:30:33 PM	PHl3 MFC set to  0.000000
12/31/2011	3:30:33 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:30:33 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:30:33 PM	Tube furnace set to 180
12/31/2011	3:31:03 PM	Helium valve closed
12/31/2011	3:31:03 PM	H2 valve closed
12/31/2011	3:31:03 PM	BCl3 valve closed
12/31/2011	3:31:03 PM	PH3 valve closed
12/31/2011	3:31:03 PM	SiCl4 pre valve closed
12/31/2011	3:31:03 PM	SiCl4 post valve closed
12/31/2011	3:31:03 PM	Bypass valve closed
12/31/2011	3:31:03 PM	Bubbler valve closed
12/31/2011	3:31:03 PM	Main Vac valve opened
12/31/2011	3:31:03 PM	Helium MFC set to  0.000000
12/31/2011	3:31:03 PM	H2 MFC set to  0.000000
12/31/2011	3:31:03 PM	BCl3 MFC set to  0.000000
12/31/2011	3:31:03 PM	PHl3 MFC set to  0.000000
12/31/2011	3:31:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:31:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:31:04 PM	Tube furnace set to 150
12/31/2011	3:31:34 PM	H2 valve closed
12/31/2011	3:31:34 PM	BCl3 valve closed
12/31/2011	3:31:34 PM	PH3 valve closed
12/31/2011	3:31:34 PM	SiCl4 pre valve closed
12/31/2011	3:31:34 PM	SiCl4 post valve closed
12/31/2011	3:31:34 PM	Bypass valve closed
12/31/2011	3:31:34 PM	Bubbler valve closed
12/31/2011	3:31:34 PM	Helium valve opened
12/31/2011	3:31:34 PM	Main Vac valve opened
12/31/2011	3:31:34 PM	Helium MFC set to  20.000000
12/31/2011	3:31:34 PM	H2 MFC set to  0.000000
12/31/2011	3:31:34 PM	BCl3 MFC set to  0.000000
12/31/2011	3:31:34 PM	PHl3 MFC set to  0.000000
12/31/2011	3:31:34 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:31:34 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:31:34 PM	Tube furnace set to 150
12/31/2011	3:32:04 PM	Helium valve closed
12/31/2011	3:32:04 PM	H2 valve closed
12/31/2011	3:32:04 PM	BCl3 valve closed
12/31/2011	3:32:04 PM	PH3 valve closed
12/31/2011	3:32:04 PM	SiCl4 pre valve closed
12/31/2011	3:32:04 PM	SiCl4 post valve closed
12/31/2011	3:32:04 PM	Bypass valve closed
12/31/2011	3:32:04 PM	Bubbler valve closed
12/31/2011	3:32:04 PM	Main Vac valve opened
12/31/2011	3:32:04 PM	Helium MFC set to  0.000000
12/31/2011	3:32:04 PM	H2 MFC set to  0.000000
12/31/2011	3:32:04 PM	BCl3 MFC set to  0.000000
12/31/2011	3:32:04 PM	PHl3 MFC set to  0.000000
12/31/2011	3:32:04 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:32:04 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:32:04 PM	Tube furnace set to 150
12/31/2011	3:32:34 PM	H2 valve closed
12/31/2011	3:32:34 PM	BCl3 valve closed
12/31/2011	3:32:34 PM	PH3 valve closed
12/31/2011	3:32:34 PM	SiCl4 pre valve closed
12/31/2011	3:32:34 PM	SiCl4 post valve closed
12/31/2011	3:32:34 PM	Bypass valve closed
12/31/2011	3:32:34 PM	Bubbler valve closed
12/31/2011	3:32:34 PM	Helium valve opened
12/31/2011	3:32:34 PM	Main Vac valve opened
12/31/2011	3:32:34 PM	Helium MFC set to  20.000000
12/31/2011	3:32:34 PM	H2 MFC set to  0.000000
12/31/2011	3:32:34 PM	BCl3 MFC set to  0.000000
12/31/2011	3:32:34 PM	PHl3 MFC set to  0.000000
12/31/2011	3:32:34 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:32:34 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:32:34 PM	Tube furnace set to 180
12/31/2011	3:33:04 PM	Helium valve closed
12/31/2011	3:33:04 PM	H2 valve closed
12/31/2011	3:33:04 PM	BCl3 valve closed
12/31/2011	3:33:04 PM	PH3 valve closed
12/31/2011	3:33:04 PM	SiCl4 pre valve closed
12/31/2011	3:33:04 PM	SiCl4 post valve closed
12/31/2011	3:33:04 PM	Bypass valve closed
12/31/2011	3:33:04 PM	Bubbler valve closed
12/31/2011	3:33:04 PM	Main Vac valve opened
12/31/2011	3:33:04 PM	Helium MFC set to  0.000000
12/31/2011	3:33:04 PM	H2 MFC set to  0.000000
12/31/2011	3:33:04 PM	BCl3 MFC set to  0.000000
12/31/2011	3:33:04 PM	PHl3 MFC set to  0.000000
12/31/2011	3:33:04 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:33:04 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:33:04 PM	Tube furnace set to 150
12/31/2011	3:33:34 PM	H2 valve closed
12/31/2011	3:33:34 PM	BCl3 valve closed
12/31/2011	3:33:34 PM	PH3 valve closed
12/31/2011	3:33:34 PM	SiCl4 pre valve closed
12/31/2011	3:33:34 PM	SiCl4 post valve closed
12/31/2011	3:33:34 PM	Bypass valve closed
12/31/2011	3:33:34 PM	Bubbler valve closed
12/31/2011	3:33:34 PM	Helium valve opened
12/31/2011	3:33:34 PM	Main Vac valve opened
12/31/2011	3:33:34 PM	Helium MFC set to  20.000000
12/31/2011	3:33:34 PM	H2 MFC set to  0.000000
12/31/2011	3:33:34 PM	BCl3 MFC set to  0.000000
12/31/2011	3:33:34 PM	PHl3 MFC set to  0.000000
12/31/2011	3:33:34 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:33:34 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:33:35 PM	Tube furnace set to 150
12/31/2011	3:34:05 PM	Helium valve closed
12/31/2011	3:34:05 PM	H2 valve closed
12/31/2011	3:34:05 PM	BCl3 valve closed
12/31/2011	3:34:05 PM	PH3 valve closed
12/31/2011	3:34:05 PM	SiCl4 pre valve closed
12/31/2011	3:34:05 PM	SiCl4 post valve closed
12/31/2011	3:34:05 PM	Bypass valve closed
12/31/2011	3:34:05 PM	Bubbler valve closed
12/31/2011	3:34:05 PM	Main Vac valve opened
12/31/2011	3:34:05 PM	Helium MFC set to  0.000000
12/31/2011	3:34:05 PM	H2 MFC set to  0.000000
12/31/2011	3:34:05 PM	BCl3 MFC set to  0.000000
12/31/2011	3:34:05 PM	PHl3 MFC set to  0.000000
12/31/2011	3:34:05 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:34:05 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:34:05 PM	Tube furnace set to 150
12/31/2011	3:34:35 PM	H2 valve closed
12/31/2011	3:34:35 PM	BCl3 valve closed
12/31/2011	3:34:35 PM	PH3 valve closed
12/31/2011	3:34:35 PM	SiCl4 pre valve closed
12/31/2011	3:34:35 PM	SiCl4 post valve closed
12/31/2011	3:34:35 PM	Bypass valve closed
12/31/2011	3:34:35 PM	Bubbler valve closed
12/31/2011	3:34:35 PM	Helium valve opened
12/31/2011	3:34:35 PM	Main Vac valve opened
12/31/2011	3:34:35 PM	Helium MFC set to  20.000000
12/31/2011	3:34:35 PM	H2 MFC set to  0.000000
12/31/2011	3:34:35 PM	BCl3 MFC set to  0.000000
12/31/2011	3:34:35 PM	PHl3 MFC set to  0.000000
12/31/2011	3:34:35 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:34:35 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:34:35 PM	Tube furnace set to 150
12/31/2011	3:35:05 PM	Helium valve closed
12/31/2011	3:35:05 PM	H2 valve closed
12/31/2011	3:35:05 PM	BCl3 valve closed
12/31/2011	3:35:05 PM	PH3 valve closed
12/31/2011	3:35:05 PM	SiCl4 pre valve closed
12/31/2011	3:35:05 PM	SiCl4 post valve closed
12/31/2011	3:35:05 PM	Bypass valve closed
12/31/2011	3:35:05 PM	Bubbler valve closed
12/31/2011	3:35:05 PM	Main Vac valve opened
12/31/2011	3:35:05 PM	Helium MFC set to  0.000000
12/31/2011	3:35:05 PM	H2 MFC set to  0.000000
12/31/2011	3:35:05 PM	BCl3 MFC set to  0.000000
12/31/2011	3:35:05 PM	PHl3 MFC set to  0.000000
12/31/2011	3:35:05 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:35:05 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:35:05 PM	Tube furnace set to 150
12/31/2011	3:35:35 PM	H2 valve closed
12/31/2011	3:35:35 PM	BCl3 valve closed
12/31/2011	3:35:35 PM	PH3 valve closed
12/31/2011	3:35:35 PM	SiCl4 pre valve closed
12/31/2011	3:35:35 PM	SiCl4 post valve closed
12/31/2011	3:35:35 PM	Bypass valve closed
12/31/2011	3:35:35 PM	Bubbler valve closed
12/31/2011	3:35:35 PM	Helium valve opened
12/31/2011	3:35:35 PM	Main Vac valve opened
12/31/2011	3:35:35 PM	Helium MFC set to  20.000000
12/31/2011	3:35:35 PM	H2 MFC set to  0.000000
12/31/2011	3:35:35 PM	BCl3 MFC set to  0.000000
12/31/2011	3:35:35 PM	PHl3 MFC set to  0.000000
12/31/2011	3:35:35 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:35:35 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:35:35 PM	Tube furnace set to 150
12/31/2011	3:36:05 PM	Helium valve closed
12/31/2011	3:36:05 PM	H2 valve closed
12/31/2011	3:36:05 PM	BCl3 valve closed
12/31/2011	3:36:05 PM	PH3 valve closed
12/31/2011	3:36:06 PM	SiCl4 pre valve closed
12/31/2011	3:36:06 PM	SiCl4 post valve closed
12/31/2011	3:36:06 PM	Bypass valve closed
12/31/2011	3:36:06 PM	Bubbler valve closed
12/31/2011	3:36:06 PM	Main Vac valve opened
12/31/2011	3:36:06 PM	Helium MFC set to  0.000000
12/31/2011	3:36:06 PM	H2 MFC set to  0.000000
12/31/2011	3:36:06 PM	BCl3 MFC set to  0.000000
12/31/2011	3:36:06 PM	PHl3 MFC set to  0.000000
12/31/2011	3:36:06 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:36:06 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:36:06 PM	Tube furnace set to 150
12/31/2011	3:36:36 PM	H2 valve closed
12/31/2011	3:36:36 PM	BCl3 valve closed
12/31/2011	3:36:36 PM	PH3 valve closed
12/31/2011	3:36:36 PM	SiCl4 pre valve closed
12/31/2011	3:36:36 PM	SiCl4 post valve closed
12/31/2011	3:36:36 PM	Bypass valve closed
12/31/2011	3:36:36 PM	Bubbler valve closed
12/31/2011	3:36:36 PM	Helium valve opened
12/31/2011	3:36:36 PM	Main Vac valve opened
12/31/2011	3:36:36 PM	Helium MFC set to  20.000000
12/31/2011	3:36:36 PM	H2 MFC set to  0.000000
12/31/2011	3:36:36 PM	BCl3 MFC set to  0.000000
12/31/2011	3:36:36 PM	PHl3 MFC set to  0.000000
12/31/2011	3:36:36 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:36:36 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:36:36 PM	Tube furnace set to 150
12/31/2011	3:37:06 PM	Helium valve closed
12/31/2011	3:37:06 PM	H2 valve closed
12/31/2011	3:37:06 PM	BCl3 valve closed
12/31/2011	3:37:06 PM	PH3 valve closed
12/31/2011	3:37:06 PM	SiCl4 pre valve closed
12/31/2011	3:37:06 PM	SiCl4 post valve closed
12/31/2011	3:37:06 PM	Bypass valve closed
12/31/2011	3:37:06 PM	Bubbler valve closed
12/31/2011	3:37:06 PM	Main Vac valve opened
12/31/2011	3:37:06 PM	Helium MFC set to  0.000000
12/31/2011	3:37:06 PM	H2 MFC set to  0.000000
12/31/2011	3:37:06 PM	BCl3 MFC set to  0.000000
12/31/2011	3:37:06 PM	PHl3 MFC set to  0.000000
12/31/2011	3:37:06 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:37:06 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:37:06 PM	Tube furnace set to 150
12/31/2011	3:37:36 PM	H2 valve closed
12/31/2011	3:37:36 PM	BCl3 valve closed
12/31/2011	3:37:36 PM	PH3 valve closed
12/31/2011	3:37:36 PM	SiCl4 pre valve closed
12/31/2011	3:37:36 PM	SiCl4 post valve closed
12/31/2011	3:37:36 PM	Bypass valve closed
12/31/2011	3:37:36 PM	Bubbler valve closed
12/31/2011	3:37:36 PM	Helium valve opened
12/31/2011	3:37:36 PM	Main Vac valve opened
12/31/2011	3:37:36 PM	Helium MFC set to  20.000000
12/31/2011	3:37:36 PM	H2 MFC set to  0.000000
12/31/2011	3:37:36 PM	BCl3 MFC set to  0.000000
12/31/2011	3:37:36 PM	PHl3 MFC set to  0.000000
12/31/2011	3:37:36 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:37:36 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:37:36 PM	Tube furnace set to 150
12/31/2011	3:38:06 PM	Helium valve closed
12/31/2011	3:38:06 PM	H2 valve closed
12/31/2011	3:38:06 PM	BCl3 valve closed
12/31/2011	3:38:06 PM	PH3 valve closed
12/31/2011	3:38:06 PM	SiCl4 pre valve closed
12/31/2011	3:38:06 PM	SiCl4 post valve closed
12/31/2011	3:38:06 PM	Bypass valve closed
12/31/2011	3:38:06 PM	Bubbler valve closed
12/31/2011	3:38:06 PM	Main Vac valve opened
12/31/2011	3:38:06 PM	Helium MFC set to  0.000000
12/31/2011	3:38:06 PM	H2 MFC set to  0.000000
12/31/2011	3:38:06 PM	BCl3 MFC set to  0.000000
12/31/2011	3:38:06 PM	PHl3 MFC set to  0.000000
12/31/2011	3:38:06 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:38:06 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:38:07 PM	Tube furnace set to 150
12/31/2011	3:38:37 PM	H2 valve closed
12/31/2011	3:38:37 PM	BCl3 valve closed
12/31/2011	3:38:37 PM	PH3 valve closed
12/31/2011	3:38:37 PM	SiCl4 pre valve closed
12/31/2011	3:38:37 PM	SiCl4 post valve closed
12/31/2011	3:38:37 PM	Bypass valve closed
12/31/2011	3:38:37 PM	Bubbler valve closed
12/31/2011	3:38:37 PM	Helium valve opened
12/31/2011	3:38:37 PM	Main Vac valve opened
12/31/2011	3:38:37 PM	Helium MFC set to  20.000000
12/31/2011	3:38:37 PM	H2 MFC set to  0.000000
12/31/2011	3:38:37 PM	BCl3 MFC set to  0.000000
12/31/2011	3:38:37 PM	PHl3 MFC set to  0.000000
12/31/2011	3:38:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:38:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:38:37 PM	Tube furnace set to 150
12/31/2011	3:39:07 PM	Helium valve closed
12/31/2011	3:39:07 PM	H2 valve closed
12/31/2011	3:39:07 PM	BCl3 valve closed
12/31/2011	3:39:07 PM	PH3 valve closed
12/31/2011	3:39:07 PM	SiCl4 pre valve closed
12/31/2011	3:39:07 PM	SiCl4 post valve closed
12/31/2011	3:39:07 PM	Bypass valve closed
12/31/2011	3:39:07 PM	Bubbler valve closed
12/31/2011	3:39:07 PM	Main Vac valve opened
12/31/2011	3:39:07 PM	Helium MFC set to  0.000000
12/31/2011	3:39:07 PM	H2 MFC set to  0.000000
12/31/2011	3:39:07 PM	BCl3 MFC set to  0.000000
12/31/2011	3:39:07 PM	PHl3 MFC set to  0.000000
12/31/2011	3:39:07 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:39:07 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:39:07 PM	Tube furnace set to 150
12/31/2011	3:39:37 PM	H2 valve closed
12/31/2011	3:39:37 PM	BCl3 valve closed
12/31/2011	3:39:37 PM	PH3 valve closed
12/31/2011	3:39:37 PM	SiCl4 pre valve closed
12/31/2011	3:39:37 PM	SiCl4 post valve closed
12/31/2011	3:39:37 PM	Bypass valve closed
12/31/2011	3:39:37 PM	Bubbler valve closed
12/31/2011	3:39:37 PM	Helium valve opened
12/31/2011	3:39:37 PM	Main Vac valve opened
12/31/2011	3:39:37 PM	Helium MFC set to  20.000000
12/31/2011	3:39:37 PM	H2 MFC set to  0.000000
12/31/2011	3:39:37 PM	BCl3 MFC set to  0.000000
12/31/2011	3:39:37 PM	PHl3 MFC set to  0.000000
12/31/2011	3:39:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:39:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:39:37 PM	Tube furnace set to 150
12/31/2011	3:40:07 PM	Helium valve closed
12/31/2011	3:40:07 PM	H2 valve closed
12/31/2011	3:40:07 PM	BCl3 valve closed
12/31/2011	3:40:07 PM	PH3 valve closed
12/31/2011	3:40:07 PM	SiCl4 pre valve closed
12/31/2011	3:40:07 PM	SiCl4 post valve closed
12/31/2011	3:40:07 PM	Bypass valve closed
12/31/2011	3:40:07 PM	Bubbler valve closed
12/31/2011	3:40:07 PM	Main Vac valve opened
12/31/2011	3:40:07 PM	Helium MFC set to  0.000000
12/31/2011	3:40:07 PM	H2 MFC set to  0.000000
12/31/2011	3:40:07 PM	BCl3 MFC set to  0.000000
12/31/2011	3:40:07 PM	PHl3 MFC set to  0.000000
12/31/2011	3:40:07 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:40:07 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:40:07 PM	Tube furnace set to 150
12/31/2011	3:40:37 PM	H2 valve closed
12/31/2011	3:40:37 PM	BCl3 valve closed
12/31/2011	3:40:37 PM	PH3 valve closed
12/31/2011	3:40:37 PM	SiCl4 pre valve closed
12/31/2011	3:40:37 PM	SiCl4 post valve closed
12/31/2011	3:40:37 PM	Bypass valve closed
12/31/2011	3:40:37 PM	Bubbler valve closed
12/31/2011	3:40:37 PM	Helium valve opened
12/31/2011	3:40:37 PM	Main Vac valve opened
12/31/2011	3:40:37 PM	Helium MFC set to  20.000000
12/31/2011	3:40:37 PM	H2 MFC set to  0.000000
12/31/2011	3:40:37 PM	BCl3 MFC set to  0.000000
12/31/2011	3:40:37 PM	PHl3 MFC set to  0.000000
12/31/2011	3:40:37 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:40:37 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:40:38 PM	Tube furnace set to 150
12/31/2011	3:41:08 PM	Helium valve closed
12/31/2011	3:41:08 PM	H2 valve closed
12/31/2011	3:41:08 PM	BCl3 valve closed
12/31/2011	3:41:08 PM	PH3 valve closed
12/31/2011	3:41:08 PM	SiCl4 pre valve closed
12/31/2011	3:41:08 PM	SiCl4 post valve closed
12/31/2011	3:41:08 PM	Bypass valve closed
12/31/2011	3:41:08 PM	Bubbler valve closed
12/31/2011	3:41:08 PM	Main Vac valve opened
12/31/2011	3:41:08 PM	Helium MFC set to  0.000000
12/31/2011	3:41:08 PM	H2 MFC set to  0.000000
12/31/2011	3:41:08 PM	BCl3 MFC set to  0.000000
12/31/2011	3:41:08 PM	PHl3 MFC set to  0.000000
12/31/2011	3:41:08 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:41:08 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:41:08 PM	Tube furnace set to 150
12/31/2011	3:41:38 PM	H2 valve closed
12/31/2011	3:41:38 PM	BCl3 valve closed
12/31/2011	3:41:38 PM	PH3 valve closed
12/31/2011	3:41:38 PM	SiCl4 pre valve closed
12/31/2011	3:41:38 PM	SiCl4 post valve closed
12/31/2011	3:41:38 PM	Bypass valve closed
12/31/2011	3:41:38 PM	Bubbler valve closed
12/31/2011	3:41:38 PM	Helium valve opened
12/31/2011	3:41:38 PM	Main Vac valve opened
12/31/2011	3:41:38 PM	Helium MFC set to  20.000000
12/31/2011	3:41:38 PM	H2 MFC set to  0.000000
12/31/2011	3:41:38 PM	BCl3 MFC set to  0.000000
12/31/2011	3:41:38 PM	PHl3 MFC set to  0.000000
12/31/2011	3:41:38 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:41:38 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:41:38 PM	Tube furnace set to 150
12/31/2011	3:42:08 PM	Helium valve closed
12/31/2011	3:42:08 PM	H2 valve closed
12/31/2011	3:42:08 PM	BCl3 valve closed
12/31/2011	3:42:08 PM	PH3 valve closed
12/31/2011	3:42:08 PM	SiCl4 pre valve closed
12/31/2011	3:42:08 PM	SiCl4 post valve closed
12/31/2011	3:42:08 PM	Bypass valve closed
12/31/2011	3:42:08 PM	Bubbler valve closed
12/31/2011	3:42:08 PM	Main Vac valve opened
12/31/2011	3:42:08 PM	Helium MFC set to  0.000000
12/31/2011	3:42:08 PM	H2 MFC set to  0.000000
12/31/2011	3:42:08 PM	BCl3 MFC set to  0.000000
12/31/2011	3:42:08 PM	PHl3 MFC set to  0.000000
12/31/2011	3:42:08 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:42:08 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:42:08 PM	Tube furnace set to 150
12/31/2011	3:42:38 PM	H2 valve closed
12/31/2011	3:42:38 PM	BCl3 valve closed
12/31/2011	3:42:38 PM	PH3 valve closed
12/31/2011	3:42:38 PM	SiCl4 pre valve closed
12/31/2011	3:42:38 PM	SiCl4 post valve closed
12/31/2011	3:42:38 PM	Bypass valve closed
12/31/2011	3:42:38 PM	Bubbler valve closed
12/31/2011	3:42:38 PM	Helium valve opened
12/31/2011	3:42:38 PM	Main Vac valve opened
12/31/2011	3:42:38 PM	Helium MFC set to  20.000000
12/31/2011	3:42:38 PM	H2 MFC set to  0.000000
12/31/2011	3:42:38 PM	BCl3 MFC set to  0.000000
12/31/2011	3:42:38 PM	PHl3 MFC set to  0.000000
12/31/2011	3:42:38 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:42:38 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:42:38 PM	Tube furnace set to 150
12/31/2011	3:43:08 PM	Helium valve closed
12/31/2011	3:43:08 PM	H2 valve closed
12/31/2011	3:43:08 PM	BCl3 valve closed
12/31/2011	3:43:08 PM	PH3 valve closed
12/31/2011	3:43:09 PM	SiCl4 pre valve closed
12/31/2011	3:43:09 PM	SiCl4 post valve closed
12/31/2011	3:43:09 PM	Bypass valve closed
12/31/2011	3:43:09 PM	Bubbler valve closed
12/31/2011	3:43:09 PM	Main Vac valve opened
12/31/2011	3:43:09 PM	Helium MFC set to  0.000000
12/31/2011	3:43:09 PM	H2 MFC set to  0.000000
12/31/2011	3:43:09 PM	BCl3 MFC set to  0.000000
12/31/2011	3:43:09 PM	PHl3 MFC set to  0.000000
12/31/2011	3:43:09 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:43:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:43:09 PM	Tube furnace set to 150
12/31/2011	3:43:39 PM	H2 valve closed
12/31/2011	3:43:39 PM	BCl3 valve closed
12/31/2011	3:43:39 PM	PH3 valve closed
12/31/2011	3:43:39 PM	SiCl4 pre valve closed
12/31/2011	3:43:39 PM	SiCl4 post valve closed
12/31/2011	3:43:39 PM	Bypass valve closed
12/31/2011	3:43:39 PM	Bubbler valve closed
12/31/2011	3:43:39 PM	Helium valve opened
12/31/2011	3:43:39 PM	Main Vac valve opened
12/31/2011	3:43:39 PM	Helium MFC set to  20.000000
12/31/2011	3:43:39 PM	H2 MFC set to  0.000000
12/31/2011	3:43:39 PM	BCl3 MFC set to  0.000000
12/31/2011	3:43:39 PM	PHl3 MFC set to  0.000000
12/31/2011	3:43:39 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:43:39 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:43:39 PM	Tube furnace set to 150
12/31/2011	3:44:09 PM	Helium valve closed
12/31/2011	3:44:09 PM	H2 valve closed
12/31/2011	3:44:09 PM	BCl3 valve closed
12/31/2011	3:44:09 PM	PH3 valve closed
12/31/2011	3:44:09 PM	SiCl4 pre valve closed
12/31/2011	3:44:09 PM	SiCl4 post valve closed
12/31/2011	3:44:09 PM	Bypass valve closed
12/31/2011	3:44:09 PM	Bubbler valve closed
12/31/2011	3:44:09 PM	Main Vac valve opened
12/31/2011	3:44:09 PM	Helium MFC set to  0.000000
12/31/2011	3:44:09 PM	H2 MFC set to  0.000000
12/31/2011	3:44:09 PM	BCl3 MFC set to  0.000000
12/31/2011	3:44:09 PM	PHl3 MFC set to  0.000000
12/31/2011	3:44:09 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:44:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:44:09 PM	Tube furnace set to 150
12/31/2011	3:44:39 PM	H2 valve closed
12/31/2011	3:44:39 PM	BCl3 valve closed
12/31/2011	3:44:39 PM	PH3 valve closed
12/31/2011	3:44:39 PM	SiCl4 pre valve closed
12/31/2011	3:44:39 PM	SiCl4 post valve closed
12/31/2011	3:44:39 PM	Bypass valve closed
12/31/2011	3:44:39 PM	Bubbler valve closed
12/31/2011	3:44:39 PM	Helium valve opened
12/31/2011	3:44:39 PM	Main Vac valve opened
12/31/2011	3:44:39 PM	Helium MFC set to  20.000000
12/31/2011	3:44:39 PM	H2 MFC set to  0.000000
12/31/2011	3:44:39 PM	BCl3 MFC set to  0.000000
12/31/2011	3:44:39 PM	PHl3 MFC set to  0.000000
12/31/2011	3:44:39 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:44:39 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:44:39 PM	Tube furnace set to 150
12/31/2011	3:45:09 PM	Helium valve closed
12/31/2011	3:45:09 PM	H2 valve closed
12/31/2011	3:45:09 PM	BCl3 valve closed
12/31/2011	3:45:09 PM	PH3 valve closed
12/31/2011	3:45:09 PM	SiCl4 pre valve closed
12/31/2011	3:45:09 PM	SiCl4 post valve closed
12/31/2011	3:45:09 PM	Bypass valve closed
12/31/2011	3:45:09 PM	Bubbler valve closed
12/31/2011	3:45:09 PM	Main Vac valve opened
12/31/2011	3:45:09 PM	Helium MFC set to  0.000000
12/31/2011	3:45:09 PM	H2 MFC set to  0.000000
12/31/2011	3:45:09 PM	BCl3 MFC set to  0.000000
12/31/2011	3:45:09 PM	PHl3 MFC set to  0.000000
12/31/2011	3:45:09 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:45:09 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:45:10 PM	Tube furnace set to 150
12/31/2011	3:45:40 PM	H2 valve closed
12/31/2011	3:45:40 PM	BCl3 valve closed
12/31/2011	3:45:40 PM	PH3 valve closed
12/31/2011	3:45:40 PM	SiCl4 pre valve closed
12/31/2011	3:45:40 PM	SiCl4 post valve closed
12/31/2011	3:45:40 PM	Bypass valve closed
12/31/2011	3:45:40 PM	Bubbler valve closed
12/31/2011	3:45:40 PM	Helium valve opened
12/31/2011	3:45:40 PM	Main Vac valve opened
12/31/2011	3:45:40 PM	Helium MFC set to  20.000000
12/31/2011	3:45:40 PM	H2 MFC set to  0.000000
12/31/2011	3:45:40 PM	BCl3 MFC set to  0.000000
12/31/2011	3:45:40 PM	PHl3 MFC set to  0.000000
12/31/2011	3:45:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:45:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:45:40 PM	Tube furnace set to 150
12/31/2011	3:46:10 PM	Helium valve closed
12/31/2011	3:46:10 PM	H2 valve closed
12/31/2011	3:46:10 PM	BCl3 valve closed
12/31/2011	3:46:10 PM	PH3 valve closed
12/31/2011	3:46:10 PM	SiCl4 pre valve closed
12/31/2011	3:46:10 PM	SiCl4 post valve closed
12/31/2011	3:46:10 PM	Bypass valve closed
12/31/2011	3:46:10 PM	Bubbler valve closed
12/31/2011	3:46:10 PM	Main Vac valve opened
12/31/2011	3:46:10 PM	Helium MFC set to  0.000000
12/31/2011	3:46:10 PM	H2 MFC set to  0.000000
12/31/2011	3:46:10 PM	BCl3 MFC set to  0.000000
12/31/2011	3:46:10 PM	PHl3 MFC set to  0.000000
12/31/2011	3:46:10 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:46:10 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:46:10 PM	Tube furnace set to 150
12/31/2011	3:46:40 PM	H2 valve closed
12/31/2011	3:46:40 PM	BCl3 valve closed
12/31/2011	3:46:40 PM	PH3 valve closed
12/31/2011	3:46:40 PM	SiCl4 pre valve closed
12/31/2011	3:46:40 PM	SiCl4 post valve closed
12/31/2011	3:46:40 PM	Bypass valve closed
12/31/2011	3:46:40 PM	Bubbler valve closed
12/31/2011	3:46:40 PM	Helium valve opened
12/31/2011	3:46:40 PM	Main Vac valve opened
12/31/2011	3:46:40 PM	Helium MFC set to  20.000000
12/31/2011	3:46:40 PM	H2 MFC set to  0.000000
12/31/2011	3:46:40 PM	BCl3 MFC set to  0.000000
12/31/2011	3:46:40 PM	PHl3 MFC set to  0.000000
12/31/2011	3:46:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:46:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:46:40 PM	Tube furnace set to 150
12/31/2011	3:47:10 PM	Helium valve closed
12/31/2011	3:47:10 PM	H2 valve closed
12/31/2011	3:47:10 PM	BCl3 valve closed
12/31/2011	3:47:10 PM	PH3 valve closed
12/31/2011	3:47:10 PM	SiCl4 pre valve closed
12/31/2011	3:47:10 PM	SiCl4 post valve closed
12/31/2011	3:47:10 PM	Bypass valve closed
12/31/2011	3:47:10 PM	Bubbler valve closed
12/31/2011	3:47:10 PM	Main Vac valve opened
12/31/2011	3:47:10 PM	Helium MFC set to  0.000000
12/31/2011	3:47:10 PM	H2 MFC set to  0.000000
12/31/2011	3:47:10 PM	BCl3 MFC set to  0.000000
12/31/2011	3:47:10 PM	PHl3 MFC set to  0.000000
12/31/2011	3:47:10 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:47:10 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:47:10 PM	Tube furnace set to 150
12/31/2011	3:47:40 PM	H2 valve closed
12/31/2011	3:47:40 PM	BCl3 valve closed
12/31/2011	3:47:40 PM	PH3 valve closed
12/31/2011	3:47:40 PM	SiCl4 pre valve closed
12/31/2011	3:47:40 PM	SiCl4 post valve closed
12/31/2011	3:47:40 PM	Bypass valve closed
12/31/2011	3:47:40 PM	Bubbler valve closed
12/31/2011	3:47:40 PM	Helium valve opened
12/31/2011	3:47:40 PM	Main Vac valve opened
12/31/2011	3:47:40 PM	Helium MFC set to  20.000000
12/31/2011	3:47:40 PM	H2 MFC set to  0.000000
12/31/2011	3:47:40 PM	BCl3 MFC set to  0.000000
12/31/2011	3:47:40 PM	PHl3 MFC set to  0.000000
12/31/2011	3:47:40 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:47:40 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:47:41 PM	Tube furnace set to 150
12/31/2011	3:48:11 PM	Helium valve closed
12/31/2011	3:48:11 PM	H2 valve closed
12/31/2011	3:48:11 PM	BCl3 valve closed
12/31/2011	3:48:11 PM	PH3 valve closed
12/31/2011	3:48:11 PM	SiCl4 pre valve closed
12/31/2011	3:48:11 PM	SiCl4 post valve closed
12/31/2011	3:48:11 PM	Bypass valve closed
12/31/2011	3:48:11 PM	Bubbler valve closed
12/31/2011	3:48:11 PM	Main Vac valve opened
12/31/2011	3:48:11 PM	Helium MFC set to  0.000000
12/31/2011	3:48:11 PM	H2 MFC set to  0.000000
12/31/2011	3:48:11 PM	BCl3 MFC set to  0.000000
12/31/2011	3:48:11 PM	PHl3 MFC set to  0.000000
12/31/2011	3:48:11 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:48:11 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:48:11 PM	Tube furnace set to 150
12/31/2011	3:48:41 PM	H2 valve closed
12/31/2011	3:48:41 PM	BCl3 valve closed
12/31/2011	3:48:41 PM	PH3 valve closed
12/31/2011	3:48:41 PM	SiCl4 pre valve closed
12/31/2011	3:48:41 PM	SiCl4 post valve closed
12/31/2011	3:48:41 PM	Bypass valve closed
12/31/2011	3:48:41 PM	Bubbler valve closed
12/31/2011	3:48:41 PM	Helium valve opened
12/31/2011	3:48:41 PM	Main Vac valve opened
12/31/2011	3:48:41 PM	Helium MFC set to  20.000000
12/31/2011	3:48:41 PM	H2 MFC set to  0.000000
12/31/2011	3:48:41 PM	BCl3 MFC set to  0.000000
12/31/2011	3:48:41 PM	PHl3 MFC set to  0.000000
12/31/2011	3:48:41 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:48:41 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:48:41 PM	Tube furnace set to 150
12/31/2011	3:49:11 PM	Helium valve closed
12/31/2011	3:49:11 PM	H2 valve closed
12/31/2011	3:49:11 PM	BCl3 valve closed
12/31/2011	3:49:11 PM	PH3 valve closed
12/31/2011	3:49:11 PM	SiCl4 pre valve closed
12/31/2011	3:49:11 PM	SiCl4 post valve closed
12/31/2011	3:49:11 PM	Bypass valve closed
12/31/2011	3:49:11 PM	Bubbler valve closed
12/31/2011	3:49:11 PM	Main Vac valve opened
12/31/2011	3:49:11 PM	Helium MFC set to  0.000000
12/31/2011	3:49:11 PM	H2 MFC set to  0.000000
12/31/2011	3:49:11 PM	BCl3 MFC set to  0.000000
12/31/2011	3:49:11 PM	PHl3 MFC set to  0.000000
12/31/2011	3:49:11 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:49:11 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:49:11 PM	Tube furnace set to 180
12/31/2011	3:49:16 PM	Run finished at 3:49 PM
12/31/2011	3:54:58 PM	Recipe started at 3:54 PM
12/31/2011	3:54:58 PM	Helium valve closed
12/31/2011	3:54:58 PM	H2 valve closed
12/31/2011	3:54:58 PM	BCl3 valve closed
12/31/2011	3:54:58 PM	PH3 valve closed
12/31/2011	3:54:58 PM	SiCl4 pre valve closed
12/31/2011	3:54:58 PM	SiCl4 post valve closed
12/31/2011	3:54:58 PM	Main Vac valve closed
12/31/2011	3:54:58 PM	Bubbler valve closed
12/31/2011	3:54:58 PM	Bypass valve opened
12/31/2011	3:54:58 PM	Helium MFC set to  0.000000
12/31/2011	3:54:58 PM	H2 MFC set to  0.000000
12/31/2011	3:54:58 PM	BCl3 MFC set to  0.000000
12/31/2011	3:54:58 PM	PHl3 MFC set to  0.000000
12/31/2011	3:54:58 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:54:58 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:54:58 PM	Tube furnace set to 180
12/31/2011	3:54:59 PM	Helium valve closed
12/31/2011	3:54:59 PM	H2 valve closed
12/31/2011	3:54:59 PM	BCl3 valve closed
12/31/2011	3:54:59 PM	PH3 valve closed
12/31/2011	3:54:59 PM	SiCl4 pre valve closed
12/31/2011	3:54:59 PM	SiCl4 post valve closed
12/31/2011	3:54:59 PM	Main Vac valve closed
12/31/2011	3:54:59 PM	Bubbler valve closed
12/31/2011	3:54:59 PM	Bypass valve opened
12/31/2011	3:54:59 PM	Helium MFC set to  0.000000
12/31/2011	3:54:59 PM	H2 MFC set to  0.000000
12/31/2011	3:54:59 PM	BCl3 MFC set to  0.000000
12/31/2011	3:54:59 PM	PHl3 MFC set to  0.000000
12/31/2011	3:54:59 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:54:59 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:54:59 PM	Tube furnace set to 150
12/31/2011	3:55:29 PM	Helium valve closed
12/31/2011	3:55:29 PM	H2 valve closed
12/31/2011	3:55:29 PM	BCl3 valve closed
12/31/2011	3:55:29 PM	PH3 valve closed
12/31/2011	3:55:29 PM	SiCl4 pre valve closed
12/31/2011	3:55:29 PM	SiCl4 post valve closed
12/31/2011	3:55:29 PM	Bypass valve closed
12/31/2011	3:55:29 PM	Bubbler valve closed
12/31/2011	3:55:29 PM	Main Vac valve opened
12/31/2011	3:55:29 PM	Helium MFC set to  0.000000
12/31/2011	3:55:29 PM	H2 MFC set to  0.000000
12/31/2011	3:55:29 PM	BCl3 MFC set to  0.000000
12/31/2011	3:55:29 PM	PHl3 MFC set to  0.000000
12/31/2011	3:55:29 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:55:29 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:55:29 PM	Tube furnace set to 180
12/31/2011	3:56:00 PM	H2 valve closed
12/31/2011	3:56:00 PM	BCl3 valve closed
12/31/2011	3:56:00 PM	PH3 valve closed
12/31/2011	3:56:00 PM	SiCl4 pre valve closed
12/31/2011	3:56:00 PM	SiCl4 post valve closed
12/31/2011	3:56:00 PM	Bypass valve closed
12/31/2011	3:56:00 PM	Bubbler valve closed
12/31/2011	3:56:00 PM	Helium valve opened
12/31/2011	3:56:00 PM	Main Vac valve opened
12/31/2011	3:56:00 PM	Helium MFC set to  20.000000
12/31/2011	3:56:00 PM	H2 MFC set to  0.000000
12/31/2011	3:56:00 PM	BCl3 MFC set to  0.000000
12/31/2011	3:56:00 PM	PHl3 MFC set to  0.000000
12/31/2011	3:56:00 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:56:00 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:56:00 PM	Tube furnace set to 180
12/31/2011	3:56:30 PM	Helium valve closed
12/31/2011	3:56:30 PM	H2 valve closed
12/31/2011	3:56:30 PM	BCl3 valve closed
12/31/2011	3:56:30 PM	PH3 valve closed
12/31/2011	3:56:30 PM	SiCl4 pre valve closed
12/31/2011	3:56:30 PM	SiCl4 post valve closed
12/31/2011	3:56:30 PM	Bypass valve closed
12/31/2011	3:56:30 PM	Bubbler valve closed
12/31/2011	3:56:30 PM	Main Vac valve opened
12/31/2011	3:56:30 PM	Helium MFC set to  0.000000
12/31/2011	3:56:30 PM	H2 MFC set to  0.000000
12/31/2011	3:56:30 PM	BCl3 MFC set to  0.000000
12/31/2011	3:56:30 PM	PHl3 MFC set to  0.000000
12/31/2011	3:56:30 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:56:30 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:56:30 PM	Tube furnace set to 150
12/31/2011	3:57:00 PM	H2 valve closed
12/31/2011	3:57:00 PM	BCl3 valve closed
12/31/2011	3:57:00 PM	PH3 valve closed
12/31/2011	3:57:00 PM	SiCl4 pre valve closed
12/31/2011	3:57:00 PM	SiCl4 post valve closed
12/31/2011	3:57:00 PM	Bypass valve closed
12/31/2011	3:57:00 PM	Bubbler valve closed
12/31/2011	3:57:00 PM	Helium valve opened
12/31/2011	3:57:00 PM	Main Vac valve opened
12/31/2011	3:57:00 PM	Helium MFC set to  20.000000
12/31/2011	3:57:00 PM	H2 MFC set to  0.000000
12/31/2011	3:57:00 PM	BCl3 MFC set to  0.000000
12/31/2011	3:57:00 PM	PHl3 MFC set to  0.000000
12/31/2011	3:57:00 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:57:00 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:57:00 PM	Tube furnace set to 180
12/31/2011	3:57:30 PM	Helium valve closed
12/31/2011	3:57:30 PM	H2 valve closed
12/31/2011	3:57:30 PM	BCl3 valve closed
12/31/2011	3:57:30 PM	PH3 valve closed
12/31/2011	3:57:30 PM	SiCl4 pre valve closed
12/31/2011	3:57:30 PM	SiCl4 post valve closed
12/31/2011	3:57:30 PM	Bypass valve closed
12/31/2011	3:57:30 PM	Bubbler valve closed
12/31/2011	3:57:30 PM	Main Vac valve opened
12/31/2011	3:57:30 PM	Helium MFC set to  0.000000
12/31/2011	3:57:30 PM	H2 MFC set to  0.000000
12/31/2011	3:57:30 PM	BCl3 MFC set to  0.000000
12/31/2011	3:57:30 PM	PHl3 MFC set to  0.000000
12/31/2011	3:57:30 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:57:30 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:57:30 PM	Tube furnace set to 150
12/31/2011	3:58:00 PM	H2 valve closed
12/31/2011	3:58:00 PM	BCl3 valve closed
12/31/2011	3:58:00 PM	PH3 valve closed
12/31/2011	3:58:00 PM	SiCl4 pre valve closed
12/31/2011	3:58:00 PM	SiCl4 post valve closed
12/31/2011	3:58:00 PM	Bypass valve closed
12/31/2011	3:58:00 PM	Bubbler valve closed
12/31/2011	3:58:00 PM	Helium valve opened
12/31/2011	3:58:00 PM	Main Vac valve opened
12/31/2011	3:58:00 PM	Helium MFC set to  20.000000
12/31/2011	3:58:00 PM	H2 MFC set to  0.000000
12/31/2011	3:58:00 PM	BCl3 MFC set to  0.000000
12/31/2011	3:58:00 PM	PHl3 MFC set to  0.000000
12/31/2011	3:58:00 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:58:00 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:58:00 PM	Tube furnace set to 150
12/31/2011	3:58:31 PM	Helium valve closed
12/31/2011	3:58:31 PM	H2 valve closed
12/31/2011	3:58:31 PM	BCl3 valve closed
12/31/2011	3:58:31 PM	PH3 valve closed
12/31/2011	3:58:31 PM	SiCl4 pre valve closed
12/31/2011	3:58:31 PM	SiCl4 post valve closed
12/31/2011	3:58:31 PM	Bypass valve closed
12/31/2011	3:58:31 PM	Bubbler valve closed
12/31/2011	3:58:31 PM	Main Vac valve opened
12/31/2011	3:58:31 PM	Helium MFC set to  0.000000
12/31/2011	3:58:31 PM	H2 MFC set to  0.000000
12/31/2011	3:58:31 PM	BCl3 MFC set to  0.000000
12/31/2011	3:58:31 PM	PHl3 MFC set to  0.000000
12/31/2011	3:58:31 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:58:31 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:58:31 PM	Tube furnace set to 150
12/31/2011	3:59:01 PM	H2 valve closed
12/31/2011	3:59:01 PM	BCl3 valve closed
12/31/2011	3:59:01 PM	PH3 valve closed
12/31/2011	3:59:01 PM	SiCl4 pre valve closed
12/31/2011	3:59:01 PM	SiCl4 post valve closed
12/31/2011	3:59:01 PM	Bypass valve closed
12/31/2011	3:59:01 PM	Bubbler valve closed
12/31/2011	3:59:01 PM	Helium valve opened
12/31/2011	3:59:01 PM	Main Vac valve opened
12/31/2011	3:59:01 PM	Helium MFC set to  20.000000
12/31/2011	3:59:01 PM	H2 MFC set to  0.000000
12/31/2011	3:59:01 PM	BCl3 MFC set to  0.000000
12/31/2011	3:59:01 PM	PHl3 MFC set to  0.000000
12/31/2011	3:59:01 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:59:01 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:59:01 PM	Tube furnace set to 180
12/31/2011	3:59:31 PM	Helium valve closed
12/31/2011	3:59:31 PM	H2 valve closed
12/31/2011	3:59:31 PM	BCl3 valve closed
12/31/2011	3:59:31 PM	PH3 valve closed
12/31/2011	3:59:31 PM	SiCl4 pre valve closed
12/31/2011	3:59:31 PM	SiCl4 post valve closed
12/31/2011	3:59:31 PM	Bypass valve closed
12/31/2011	3:59:31 PM	Bubbler valve closed
12/31/2011	3:59:31 PM	Main Vac valve opened
12/31/2011	3:59:31 PM	Helium MFC set to  0.000000
12/31/2011	3:59:31 PM	H2 MFC set to  0.000000
12/31/2011	3:59:31 PM	BCl3 MFC set to  0.000000
12/31/2011	3:59:31 PM	PHl3 MFC set to  0.000000
12/31/2011	3:59:31 PM	SiCl4 MFC set to  0.000000
12/31/2011	3:59:31 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	3:59:31 PM	Tube furnace set to 150
12/31/2011	4:00:01 PM	H2 valve closed
12/31/2011	4:00:01 PM	BCl3 valve closed
12/31/2011	4:00:01 PM	PH3 valve closed
12/31/2011	4:00:01 PM	SiCl4 pre valve closed
12/31/2011	4:00:01 PM	SiCl4 post valve closed
12/31/2011	4:00:01 PM	Bypass valve closed
12/31/2011	4:00:01 PM	Bubbler valve closed
12/31/2011	4:00:01 PM	Helium valve opened
12/31/2011	4:00:01 PM	Main Vac valve opened
12/31/2011	4:00:01 PM	Helium MFC set to  20.000000
12/31/2011	4:00:01 PM	H2 MFC set to  0.000000
12/31/2011	4:00:01 PM	BCl3 MFC set to  0.000000
12/31/2011	4:00:01 PM	PHl3 MFC set to  0.000000
12/31/2011	4:00:01 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:00:01 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:00:01 PM	Tube furnace set to 150
12/31/2011	4:00:31 PM	Helium valve closed
12/31/2011	4:00:31 PM	H2 valve closed
12/31/2011	4:00:31 PM	BCl3 valve closed
12/31/2011	4:00:31 PM	PH3 valve closed
12/31/2011	4:00:31 PM	SiCl4 pre valve closed
12/31/2011	4:00:31 PM	SiCl4 post valve closed
12/31/2011	4:00:31 PM	Bypass valve closed
12/31/2011	4:00:31 PM	Bubbler valve closed
12/31/2011	4:00:31 PM	Main Vac valve opened
12/31/2011	4:00:31 PM	Helium MFC set to  0.000000
12/31/2011	4:00:31 PM	H2 MFC set to  0.000000
12/31/2011	4:00:31 PM	BCl3 MFC set to  0.000000
12/31/2011	4:00:31 PM	PHl3 MFC set to  0.000000
12/31/2011	4:00:31 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:00:31 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:00:31 PM	Tube furnace set to 150
12/31/2011	4:01:01 PM	H2 valve closed
12/31/2011	4:01:01 PM	BCl3 valve closed
12/31/2011	4:01:01 PM	PH3 valve closed
12/31/2011	4:01:01 PM	SiCl4 pre valve closed
12/31/2011	4:01:01 PM	SiCl4 post valve closed
12/31/2011	4:01:01 PM	Bypass valve closed
12/31/2011	4:01:01 PM	Bubbler valve closed
12/31/2011	4:01:02 PM	Helium valve opened
12/31/2011	4:01:02 PM	Main Vac valve opened
12/31/2011	4:01:02 PM	Helium MFC set to  20.000000
12/31/2011	4:01:02 PM	H2 MFC set to  0.000000
12/31/2011	4:01:02 PM	BCl3 MFC set to  0.000000
12/31/2011	4:01:02 PM	PHl3 MFC set to  0.000000
12/31/2011	4:01:02 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:01:02 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:01:02 PM	Tube furnace set to 150
12/31/2011	4:01:32 PM	Helium valve closed
12/31/2011	4:01:32 PM	H2 valve closed
12/31/2011	4:01:32 PM	BCl3 valve closed
12/31/2011	4:01:32 PM	PH3 valve closed
12/31/2011	4:01:32 PM	SiCl4 pre valve closed
12/31/2011	4:01:32 PM	SiCl4 post valve closed
12/31/2011	4:01:32 PM	Bypass valve closed
12/31/2011	4:01:32 PM	Bubbler valve closed
12/31/2011	4:01:32 PM	Main Vac valve opened
12/31/2011	4:01:32 PM	Helium MFC set to  0.000000
12/31/2011	4:01:32 PM	H2 MFC set to  0.000000
12/31/2011	4:01:32 PM	BCl3 MFC set to  0.000000
12/31/2011	4:01:32 PM	PHl3 MFC set to  0.000000
12/31/2011	4:01:32 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:01:32 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:01:32 PM	Tube furnace set to 150
12/31/2011	4:02:02 PM	H2 valve closed
12/31/2011	4:02:02 PM	BCl3 valve closed
12/31/2011	4:02:02 PM	PH3 valve closed
12/31/2011	4:02:02 PM	SiCl4 pre valve closed
12/31/2011	4:02:02 PM	SiCl4 post valve closed
12/31/2011	4:02:02 PM	Bypass valve closed
12/31/2011	4:02:02 PM	Bubbler valve closed
12/31/2011	4:02:02 PM	Helium valve opened
12/31/2011	4:02:02 PM	Main Vac valve opened
12/31/2011	4:02:02 PM	Helium MFC set to  20.000000
12/31/2011	4:02:02 PM	H2 MFC set to  0.000000
12/31/2011	4:02:02 PM	BCl3 MFC set to  0.000000
12/31/2011	4:02:02 PM	PHl3 MFC set to  0.000000
12/31/2011	4:02:02 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:02:02 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:02:02 PM	Tube furnace set to 150
12/31/2011	4:02:32 PM	Helium valve closed
12/31/2011	4:02:32 PM	H2 valve closed
12/31/2011	4:02:32 PM	BCl3 valve closed
12/31/2011	4:02:32 PM	PH3 valve closed
12/31/2011	4:02:32 PM	SiCl4 pre valve closed
12/31/2011	4:02:32 PM	SiCl4 post valve closed
12/31/2011	4:02:32 PM	Bypass valve closed
12/31/2011	4:02:32 PM	Bubbler valve closed
12/31/2011	4:02:32 PM	Main Vac valve opened
12/31/2011	4:02:32 PM	Helium MFC set to  0.000000
12/31/2011	4:02:32 PM	H2 MFC set to  0.000000
12/31/2011	4:02:32 PM	BCl3 MFC set to  0.000000
12/31/2011	4:02:32 PM	PHl3 MFC set to  0.000000
12/31/2011	4:02:32 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:02:32 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:02:32 PM	Tube furnace set to 150
12/31/2011	4:03:02 PM	H2 valve closed
12/31/2011	4:03:02 PM	BCl3 valve closed
12/31/2011	4:03:02 PM	PH3 valve closed
12/31/2011	4:03:02 PM	SiCl4 pre valve closed
12/31/2011	4:03:02 PM	SiCl4 post valve closed
12/31/2011	4:03:02 PM	Bypass valve closed
12/31/2011	4:03:02 PM	Bubbler valve closed
12/31/2011	4:03:02 PM	Helium valve opened
12/31/2011	4:03:02 PM	Main Vac valve opened
12/31/2011	4:03:02 PM	Helium MFC set to  20.000000
12/31/2011	4:03:02 PM	H2 MFC set to  0.000000
12/31/2011	4:03:02 PM	BCl3 MFC set to  0.000000
12/31/2011	4:03:02 PM	PHl3 MFC set to  0.000000
12/31/2011	4:03:02 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:03:02 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:03:02 PM	Tube furnace set to 150
12/31/2011	4:03:32 PM	Helium valve closed
12/31/2011	4:03:32 PM	H2 valve closed
12/31/2011	4:03:32 PM	BCl3 valve closed
12/31/2011	4:03:32 PM	PH3 valve closed
12/31/2011	4:03:32 PM	SiCl4 pre valve closed
12/31/2011	4:03:32 PM	SiCl4 post valve closed
12/31/2011	4:03:32 PM	Bypass valve closed
12/31/2011	4:03:32 PM	Bubbler valve closed
12/31/2011	4:03:32 PM	Main Vac valve opened
12/31/2011	4:03:32 PM	Helium MFC set to  0.000000
12/31/2011	4:03:32 PM	H2 MFC set to  0.000000
12/31/2011	4:03:32 PM	BCl3 MFC set to  0.000000
12/31/2011	4:03:32 PM	PHl3 MFC set to  0.000000
12/31/2011	4:03:32 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:03:32 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:03:33 PM	Tube furnace set to 150
12/31/2011	4:04:03 PM	H2 valve closed
12/31/2011	4:04:03 PM	BCl3 valve closed
12/31/2011	4:04:03 PM	PH3 valve closed
12/31/2011	4:04:03 PM	SiCl4 pre valve closed
12/31/2011	4:04:03 PM	SiCl4 post valve closed
12/31/2011	4:04:03 PM	Bypass valve closed
12/31/2011	4:04:03 PM	Bubbler valve closed
12/31/2011	4:04:03 PM	Helium valve opened
12/31/2011	4:04:03 PM	Main Vac valve opened
12/31/2011	4:04:03 PM	Helium MFC set to  20.000000
12/31/2011	4:04:03 PM	H2 MFC set to  0.000000
12/31/2011	4:04:03 PM	BCl3 MFC set to  0.000000
12/31/2011	4:04:03 PM	PHl3 MFC set to  0.000000
12/31/2011	4:04:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:04:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:04:03 PM	Tube furnace set to 150
12/31/2011	4:04:33 PM	Helium valve closed
12/31/2011	4:04:33 PM	H2 valve closed
12/31/2011	4:04:33 PM	BCl3 valve closed
12/31/2011	4:04:33 PM	PH3 valve closed
12/31/2011	4:04:33 PM	SiCl4 pre valve closed
12/31/2011	4:04:33 PM	SiCl4 post valve closed
12/31/2011	4:04:33 PM	Bypass valve closed
12/31/2011	4:04:33 PM	Bubbler valve closed
12/31/2011	4:04:33 PM	Main Vac valve opened
12/31/2011	4:04:33 PM	Helium MFC set to  0.000000
12/31/2011	4:04:33 PM	H2 MFC set to  0.000000
12/31/2011	4:04:33 PM	BCl3 MFC set to  0.000000
12/31/2011	4:04:33 PM	PHl3 MFC set to  0.000000
12/31/2011	4:04:33 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:04:33 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:04:33 PM	Tube furnace set to 150
12/31/2011	4:05:03 PM	H2 valve closed
12/31/2011	4:05:03 PM	BCl3 valve closed
12/31/2011	4:05:03 PM	PH3 valve closed
12/31/2011	4:05:03 PM	SiCl4 pre valve closed
12/31/2011	4:05:03 PM	SiCl4 post valve closed
12/31/2011	4:05:03 PM	Bypass valve closed
12/31/2011	4:05:03 PM	Bubbler valve closed
12/31/2011	4:05:03 PM	Helium valve opened
12/31/2011	4:05:03 PM	Main Vac valve opened
12/31/2011	4:05:03 PM	Helium MFC set to  20.000000
12/31/2011	4:05:03 PM	H2 MFC set to  0.000000
12/31/2011	4:05:03 PM	BCl3 MFC set to  0.000000
12/31/2011	4:05:03 PM	PHl3 MFC set to  0.000000
12/31/2011	4:05:03 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:05:03 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:05:03 PM	Tube furnace set to 150
12/31/2011	4:05:33 PM	Helium valve closed
12/31/2011	4:05:33 PM	H2 valve closed
12/31/2011	4:05:33 PM	BCl3 valve closed
12/31/2011	4:05:33 PM	PH3 valve closed
12/31/2011	4:05:33 PM	SiCl4 pre valve closed
12/31/2011	4:05:33 PM	SiCl4 post valve closed
12/31/2011	4:05:33 PM	Bypass valve closed
12/31/2011	4:05:33 PM	Bubbler valve closed
12/31/2011	4:05:33 PM	Main Vac valve opened
12/31/2011	4:05:33 PM	Helium MFC set to  0.000000
12/31/2011	4:05:33 PM	H2 MFC set to  0.000000
12/31/2011	4:05:33 PM	BCl3 MFC set to  0.000000
12/31/2011	4:05:33 PM	PHl3 MFC set to  0.000000
12/31/2011	4:05:33 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:05:33 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:05:33 PM	Tube furnace set to 150
12/31/2011	4:06:03 PM	H2 valve closed
12/31/2011	4:06:03 PM	BCl3 valve closed
12/31/2011	4:06:03 PM	PH3 valve closed
12/31/2011	4:06:03 PM	SiCl4 pre valve closed
12/31/2011	4:06:04 PM	SiCl4 post valve closed
12/31/2011	4:06:04 PM	Bypass valve closed
12/31/2011	4:06:04 PM	Bubbler valve closed
12/31/2011	4:06:04 PM	Helium valve opened
12/31/2011	4:06:04 PM	Main Vac valve opened
12/31/2011	4:06:04 PM	Helium MFC set to  20.000000
12/31/2011	4:06:04 PM	H2 MFC set to  0.000000
12/31/2011	4:06:04 PM	BCl3 MFC set to  0.000000
12/31/2011	4:06:04 PM	PHl3 MFC set to  0.000000
12/31/2011	4:06:04 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:06:04 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:06:04 PM	Tube furnace set to 150
12/31/2011	4:06:34 PM	Helium valve closed
12/31/2011	4:06:34 PM	H2 valve closed
12/31/2011	4:06:34 PM	BCl3 valve closed
12/31/2011	4:06:34 PM	PH3 valve closed
12/31/2011	4:06:34 PM	SiCl4 pre valve closed
12/31/2011	4:06:34 PM	SiCl4 post valve closed
12/31/2011	4:06:34 PM	Bypass valve closed
12/31/2011	4:06:34 PM	Bubbler valve closed
12/31/2011	4:06:34 PM	Main Vac valve opened
12/31/2011	4:06:34 PM	Helium MFC set to  0.000000
12/31/2011	4:06:34 PM	H2 MFC set to  0.000000
12/31/2011	4:06:34 PM	BCl3 MFC set to  0.000000
12/31/2011	4:06:34 PM	PHl3 MFC set to  0.000000
12/31/2011	4:06:34 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:06:34 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:06:34 PM	Tube furnace set to 150
12/31/2011	4:07:04 PM	H2 valve closed
12/31/2011	4:07:04 PM	BCl3 valve closed
12/31/2011	4:07:04 PM	PH3 valve closed
12/31/2011	4:07:04 PM	SiCl4 pre valve closed
12/31/2011	4:07:04 PM	SiCl4 post valve closed
12/31/2011	4:07:04 PM	Bypass valve closed
12/31/2011	4:07:04 PM	Bubbler valve closed
12/31/2011	4:07:04 PM	Helium valve opened
12/31/2011	4:07:04 PM	Main Vac valve opened
12/31/2011	4:07:04 PM	Helium MFC set to  20.000000
12/31/2011	4:07:04 PM	H2 MFC set to  0.000000
12/31/2011	4:07:04 PM	BCl3 MFC set to  0.000000
12/31/2011	4:07:04 PM	PHl3 MFC set to  0.000000
12/31/2011	4:07:04 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:07:04 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:07:04 PM	Tube furnace set to 150
12/31/2011	4:07:34 PM	Helium valve closed
12/31/2011	4:07:34 PM	H2 valve closed
12/31/2011	4:07:34 PM	BCl3 valve closed
12/31/2011	4:07:34 PM	PH3 valve closed
12/31/2011	4:07:34 PM	SiCl4 pre valve closed
12/31/2011	4:07:34 PM	SiCl4 post valve closed
12/31/2011	4:07:34 PM	Bypass valve closed
12/31/2011	4:07:34 PM	Bubbler valve closed
12/31/2011	4:07:34 PM	Main Vac valve opened
12/31/2011	4:07:34 PM	Helium MFC set to  0.000000
12/31/2011	4:07:34 PM	H2 MFC set to  0.000000
12/31/2011	4:07:34 PM	BCl3 MFC set to  0.000000
12/31/2011	4:07:34 PM	PHl3 MFC set to  0.000000
12/31/2011	4:07:34 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:07:34 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:07:34 PM	Tube furnace set to 150
12/31/2011	4:08:04 PM	H2 valve closed
12/31/2011	4:08:04 PM	BCl3 valve closed
12/31/2011	4:08:04 PM	PH3 valve closed
12/31/2011	4:08:04 PM	SiCl4 pre valve closed
12/31/2011	4:08:04 PM	SiCl4 post valve closed
12/31/2011	4:08:04 PM	Bypass valve closed
12/31/2011	4:08:04 PM	Bubbler valve closed
12/31/2011	4:08:04 PM	Helium valve opened
12/31/2011	4:08:04 PM	Main Vac valve opened
12/31/2011	4:08:04 PM	Helium MFC set to  20.000000
12/31/2011	4:08:04 PM	H2 MFC set to  0.000000
12/31/2011	4:08:04 PM	BCl3 MFC set to  0.000000
12/31/2011	4:08:04 PM	PHl3 MFC set to  0.000000
12/31/2011	4:08:04 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:08:04 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:08:05 PM	Tube furnace set to 150
12/31/2011	4:08:35 PM	Helium valve closed
12/31/2011	4:08:35 PM	H2 valve closed
12/31/2011	4:08:35 PM	BCl3 valve closed
12/31/2011	4:08:35 PM	PH3 valve closed
12/31/2011	4:08:35 PM	SiCl4 pre valve closed
12/31/2011	4:08:35 PM	SiCl4 post valve closed
12/31/2011	4:08:35 PM	Bypass valve closed
12/31/2011	4:08:35 PM	Bubbler valve closed
12/31/2011	4:08:35 PM	Main Vac valve opened
12/31/2011	4:08:35 PM	Helium MFC set to  0.000000
12/31/2011	4:08:35 PM	H2 MFC set to  0.000000
12/31/2011	4:08:35 PM	BCl3 MFC set to  0.000000
12/31/2011	4:08:35 PM	PHl3 MFC set to  0.000000
12/31/2011	4:08:35 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:08:35 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:08:35 PM	Tube furnace set to 150
12/31/2011	4:08:58 PM	Run aborted at 4:08 PM
12/31/2011	4:08:58 PM	Helium valve closed
12/31/2011	4:08:58 PM	H2 valve closed
12/31/2011	4:08:58 PM	BCl3 valve closed
12/31/2011	4:08:58 PM	PH3 valve closed
12/31/2011	4:08:58 PM	SiCl4 pre valve closed
12/31/2011	4:08:58 PM	SiCl4 post valve closed
12/31/2011	4:08:58 PM	Bypass valve closed
12/31/2011	4:08:58 PM	Main Vac valve closed
12/31/2011	4:08:58 PM	Bubbler valve closed
12/31/2011	4:08:58 PM	Helium MFC set to  0.000000
12/31/2011	4:08:58 PM	H2 MFC set to  0.000000
12/31/2011	4:08:58 PM	BCl3 MFC set to  0.000000
12/31/2011	4:08:58 PM	PHl3 MFC set to  0.000000
12/31/2011	4:08:58 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:08:58 PM	Tube furnace set to 0
12/31/2011	4:09:00 PM	Main Vac valve opened
12/31/2011	4:10:08 PM	Main Vac valve closed
12/31/2011	4:10:16 PM	Main Vac valve opened
12/31/2011	4:11:07 PM	Recipe started at 4:11 PM
12/31/2011	4:11:07 PM	Helium valve closed
12/31/2011	4:11:07 PM	H2 valve closed
12/31/2011	4:11:07 PM	BCl3 valve closed
12/31/2011	4:11:07 PM	PH3 valve closed
12/31/2011	4:11:07 PM	SiCl4 pre valve closed
12/31/2011	4:11:07 PM	SiCl4 post valve closed
12/31/2011	4:11:07 PM	Main Vac valve closed
12/31/2011	4:11:07 PM	Bypass valve closed
12/31/2011	4:11:07 PM	Bubbler valve closed
12/31/2011	4:11:07 PM	Helium MFC set to  0.000000
12/31/2011	4:11:07 PM	H2 MFC set to  0.000000
12/31/2011	4:11:07 PM	BCl3 MFC set to  0.000000
12/31/2011	4:11:07 PM	PHl3 MFC set to  0.000000
12/31/2011	4:11:07 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:11:07 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:11:07 PM	Tube furnace set to 0
12/31/2011	4:11:10 PM	Helium valve closed
12/31/2011	4:11:10 PM	BCl3 valve closed
12/31/2011	4:11:10 PM	PH3 valve closed
12/31/2011	4:11:10 PM	SiCl4 pre valve closed
12/31/2011	4:11:10 PM	SiCl4 post valve closed
12/31/2011	4:11:10 PM	Main Vac valve closed
12/31/2011	4:11:10 PM	Bypass valve closed
12/31/2011	4:11:10 PM	Bubbler valve closed
12/31/2011	4:11:10 PM	H2 valve opened
12/31/2011	4:11:10 PM	Helium MFC set to  0.000000
12/31/2011	4:11:10 PM	H2 MFC set to  500.000000
12/31/2011	4:11:10 PM	BCl3 MFC set to  0.000000
12/31/2011	4:11:10 PM	PHl3 MFC set to  0.000000
12/31/2011	4:11:10 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:11:10 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:11:10 PM	Tube furnace set to 50
12/31/2011	4:12:14 PM	Helium valve closed
12/31/2011	4:12:14 PM	BCl3 valve closed
12/31/2011	4:12:14 PM	PH3 valve closed
12/31/2011	4:12:14 PM	SiCl4 pre valve closed
12/31/2011	4:12:14 PM	SiCl4 post valve closed
12/31/2011	4:12:14 PM	Main Vac valve closed
12/31/2011	4:12:14 PM	Bypass valve closed
12/31/2011	4:12:14 PM	H2 valve opened
12/31/2011	4:12:14 PM	Bubbler valve opened
12/31/2011	4:12:14 PM	Helium MFC set to  0.000000
12/31/2011	4:12:14 PM	H2 MFC set to  500.000000
12/31/2011	4:12:14 PM	BCl3 MFC set to  0.000000
12/31/2011	4:12:14 PM	PHl3 MFC set to  0.000000
12/31/2011	4:12:14 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:12:14 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:12:14 PM	Tube furnace set to 50
12/31/2011	4:12:15 PM	Helium valve closed
12/31/2011	4:12:15 PM	BCl3 valve closed
12/31/2011	4:12:15 PM	PH3 valve closed
12/31/2011	4:12:15 PM	SiCl4 pre valve closed
12/31/2011	4:12:15 PM	SiCl4 post valve closed
12/31/2011	4:12:15 PM	Main Vac valve closed
12/31/2011	4:12:15 PM	Bypass valve closed
12/31/2011	4:12:15 PM	H2 valve opened
12/31/2011	4:12:15 PM	Bubbler valve opened
12/31/2011	4:12:15 PM	Helium MFC set to  0.000000
12/31/2011	4:12:15 PM	H2 MFC set to  500.000000
12/31/2011	4:12:15 PM	BCl3 MFC set to  0.000000
12/31/2011	4:12:15 PM	PHl3 MFC set to  0.000000
12/31/2011	4:12:15 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:12:15 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:12:15 PM	Tube furnace set to 1000
12/31/2011	4:32:15 PM	Helium valve closed
12/31/2011	4:32:15 PM	BCl3 valve closed
12/31/2011	4:32:15 PM	PH3 valve closed
12/31/2011	4:32:15 PM	Main Vac valve closed
12/31/2011	4:32:15 PM	Bypass valve closed
12/31/2011	4:32:15 PM	H2 valve opened
12/31/2011	4:32:15 PM	SiCl4 pre valve opened
12/31/2011	4:32:15 PM	SiCl4 post valve opened
12/31/2011	4:32:15 PM	Bubbler valve opened
12/31/2011	4:32:15 PM	Helium MFC set to  0.000000
12/31/2011	4:32:15 PM	H2 MFC set to  500.000000
12/31/2011	4:32:15 PM	BCl3 MFC set to  0.000000
12/31/2011	4:32:15 PM	PHl3 MFC set to  0.000000
12/31/2011	4:32:15 PM	SiCl4 MFC set to  55.000000
12/31/2011	4:32:15 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:32:15 PM	Tube furnace set to 1000
12/31/2011	4:42:15 PM	Helium valve closed
12/31/2011	4:42:15 PM	BCl3 valve closed
12/31/2011	4:42:15 PM	PH3 valve closed
12/31/2011	4:42:15 PM	SiCl4 pre valve closed
12/31/2011	4:42:15 PM	SiCl4 post valve closed
12/31/2011	4:42:15 PM	Main Vac valve closed
12/31/2011	4:42:15 PM	Bypass valve closed
12/31/2011	4:42:15 PM	H2 valve opened
12/31/2011	4:42:15 PM	Bubbler valve opened
12/31/2011	4:42:15 PM	Helium MFC set to  0.000000
12/31/2011	4:42:15 PM	H2 MFC set to  480.000000
12/31/2011	4:42:15 PM	BCl3 MFC set to  0.000000
12/31/2011	4:42:15 PM	PHl3 MFC set to  0.000000
12/31/2011	4:42:15 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:42:15 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:42:15 PM	Tube furnace set to 750
12/31/2011	4:52:15 PM	H2 valve closed
12/31/2011	4:52:15 PM	BCl3 valve closed
12/31/2011	4:52:15 PM	PH3 valve closed
12/31/2011	4:52:15 PM	SiCl4 pre valve closed
12/31/2011	4:52:15 PM	SiCl4 post valve closed
12/31/2011	4:52:15 PM	Main Vac valve closed
12/31/2011	4:52:15 PM	Bypass valve closed
12/31/2011	4:52:15 PM	Helium valve opened
12/31/2011	4:52:15 PM	Bubbler valve opened
12/31/2011	4:52:15 PM	Helium MFC set to  400.000000
12/31/2011	4:52:15 PM	H2 MFC set to  0.000000
12/31/2011	4:52:15 PM	BCl3 MFC set to  0.000000
12/31/2011	4:52:15 PM	PHl3 MFC set to  0.000000
12/31/2011	4:52:15 PM	SiCl4 MFC set to  0.000000
12/31/2011	4:52:15 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	4:52:16 PM	Tube furnace set to 0
12/31/2011	5:17:16 PM	Helium valve closed
12/31/2011	5:17:16 PM	H2 valve closed
12/31/2011	5:17:16 PM	BCl3 valve closed
12/31/2011	5:17:16 PM	PH3 valve closed
12/31/2011	5:17:16 PM	SiCl4 pre valve closed
12/31/2011	5:17:16 PM	SiCl4 post valve closed
12/31/2011	5:17:16 PM	Main Vac valve closed
12/31/2011	5:17:16 PM	Bypass valve closed
12/31/2011	5:17:16 PM	Bubbler valve closed
12/31/2011	5:17:16 PM	Helium MFC set to  0.000000
12/31/2011	5:17:16 PM	H2 MFC set to  0.000000
12/31/2011	5:17:16 PM	BCl3 MFC set to  0.000000
12/31/2011	5:17:16 PM	PHl3 MFC set to  0.000000
12/31/2011	5:17:16 PM	SiCl4 MFC set to  0.000000
12/31/2011	5:17:16 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	5:17:16 PM	Tube furnace set to 50
12/31/2011	5:22:16 PM	Helium valve closed
12/31/2011	5:22:16 PM	H2 valve closed
12/31/2011	5:22:16 PM	BCl3 valve closed
12/31/2011	5:22:16 PM	PH3 valve closed
12/31/2011	5:22:16 PM	SiCl4 pre valve closed
12/31/2011	5:22:16 PM	SiCl4 post valve closed
12/31/2011	5:22:16 PM	Main Vac valve closed
12/31/2011	5:22:16 PM	Bubbler valve closed
12/31/2011	5:22:16 PM	Bypass valve opened
12/31/2011	5:22:16 PM	Helium MFC set to  0.000000
12/31/2011	5:22:16 PM	H2 MFC set to  0.000000
12/31/2011	5:22:16 PM	BCl3 MFC set to  0.000000
12/31/2011	5:22:16 PM	PHl3 MFC set to  0.000000
12/31/2011	5:22:16 PM	SiCl4 MFC set to  0.000000
12/31/2011	5:22:16 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	5:22:16 PM	Tube furnace set to 0
12/31/2011	5:27:16 PM	Helium valve closed
12/31/2011	5:27:16 PM	H2 valve closed
12/31/2011	5:27:16 PM	BCl3 valve closed
12/31/2011	5:27:16 PM	PH3 valve closed
12/31/2011	5:27:16 PM	SiCl4 pre valve closed
12/31/2011	5:27:16 PM	SiCl4 post valve closed
12/31/2011	5:27:16 PM	Bypass valve closed
12/31/2011	5:27:16 PM	Bubbler valve closed
12/31/2011	5:27:16 PM	Main Vac valve opened
12/31/2011	5:27:16 PM	Helium MFC set to  0.000000
12/31/2011	5:27:16 PM	H2 MFC set to  0.000000
12/31/2011	5:27:16 PM	BCl3 MFC set to  0.000000
12/31/2011	5:27:16 PM	PHl3 MFC set to  0.000000
12/31/2011	5:27:16 PM	SiCl4 MFC set to  0.000000
12/31/2011	5:27:16 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	5:27:16 PM	Tube furnace set to 0
12/31/2011	5:27:17 PM	Run finished at 5:27 PM
12/31/2011	9:41:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/31/2011	9:41:20 PM	Recipe started at 9:41 PM
12/31/2011	9:41:20 PM	Helium valve closed
12/31/2011	9:41:20 PM	H2 valve closed
12/31/2011	9:41:20 PM	BCl3 valve closed
12/31/2011	9:41:20 PM	PH3 valve closed
12/31/2011	9:41:20 PM	SiCl4 pre valve closed
12/31/2011	9:41:20 PM	SiCl4 post valve closed
12/31/2011	9:41:20 PM	Main Vac valve closed
12/31/2011	9:41:20 PM	Bypass valve closed
12/31/2011	9:41:20 PM	Bubbler valve closed
12/31/2011	9:41:20 PM	Helium MFC set to  0.000000
12/31/2011	9:41:20 PM	H2 MFC set to  0.000000
12/31/2011	9:41:20 PM	BCl3 MFC set to  0.000000
12/31/2011	9:41:20 PM	PHl3 MFC set to  0.000000
12/31/2011	9:41:20 PM	SiCl4 MFC set to  0.000000
12/31/2011	9:41:20 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	9:41:20 PM	Tube furnace set to 0
12/31/2011	9:41:23 PM	H2 valve closed
12/31/2011	9:41:23 PM	BCl3 valve closed
12/31/2011	9:41:24 PM	PH3 valve closed
12/31/2011	9:41:24 PM	SiCl4 pre valve closed
12/31/2011	9:41:24 PM	SiCl4 post valve closed
12/31/2011	9:41:24 PM	Main Vac valve closed
12/31/2011	9:41:24 PM	Bypass valve closed
12/31/2011	9:41:24 PM	Bubbler valve closed
12/31/2011	9:41:24 PM	Helium valve opened
12/31/2011	9:41:24 PM	Helium MFC set to  500.000000
12/31/2011	9:41:24 PM	H2 MFC set to  0.000000
12/31/2011	9:41:24 PM	BCl3 MFC set to  0.000000
12/31/2011	9:41:24 PM	PHl3 MFC set to  0.000000
12/31/2011	9:41:24 PM	SiCl4 MFC set to  0.000000
12/31/2011	9:41:24 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	9:41:24 PM	Tube furnace set to 0
12/31/2011	9:42:30 PM	Helium valve closed
12/31/2011	9:42:30 PM	H2 valve closed
12/31/2011	9:42:30 PM	BCl3 valve closed
12/31/2011	9:42:30 PM	PH3 valve closed
12/31/2011	9:42:30 PM	SiCl4 pre valve closed
12/31/2011	9:42:30 PM	SiCl4 post valve closed
12/31/2011	9:42:30 PM	Main Vac valve closed
12/31/2011	9:42:30 PM	Bypass valve closed
12/31/2011	9:42:30 PM	Bubbler valve closed
12/31/2011	9:42:30 PM	Helium MFC set to  0.000000
12/31/2011	9:42:30 PM	H2 MFC set to  0.000000
12/31/2011	9:42:30 PM	BCl3 MFC set to  0.000000
12/31/2011	9:42:30 PM	PHl3 MFC set to  0.000000
12/31/2011	9:42:30 PM	SiCl4 MFC set to  0.000000
12/31/2011	9:42:30 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	9:42:30 PM	Tube furnace set to 0
12/31/2011	9:42:31 PM	Run finished at 9:42 PM
12/31/2011	9:42:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/31/2011	9:51:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/31/2011	9:52:00 PM	Recipe started at 9:52 PM
12/31/2011	9:52:00 PM	Helium valve closed
12/31/2011	9:52:00 PM	H2 valve closed
12/31/2011	9:52:00 PM	BCl3 valve closed
12/31/2011	9:52:00 PM	PH3 valve closed
12/31/2011	9:52:00 PM	SiCl4 pre valve closed
12/31/2011	9:52:00 PM	SiCl4 post valve closed
12/31/2011	9:52:00 PM	Main Vac valve closed
12/31/2011	9:52:00 PM	Bubbler valve closed
12/31/2011	9:52:00 PM	Bypass valve opened
12/31/2011	9:52:00 PM	Helium MFC set to  0.000000
12/31/2011	9:52:00 PM	H2 MFC set to  0.000000
12/31/2011	9:52:00 PM	BCl3 MFC set to  0.000000
12/31/2011	9:52:00 PM	PHl3 MFC set to  0.000000
12/31/2011	9:52:00 PM	SiCl4 MFC set to  0.000000
12/31/2011	9:52:00 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	9:52:00 PM	Tube furnace set to 0
12/31/2011	9:53:47 PM	Helium valve closed
12/31/2011	9:53:47 PM	H2 valve closed
12/31/2011	9:53:47 PM	BCl3 valve closed
12/31/2011	9:53:47 PM	PH3 valve closed
12/31/2011	9:53:47 PM	SiCl4 pre valve closed
12/31/2011	9:53:47 PM	SiCl4 post valve closed
12/31/2011	9:53:47 PM	Main Vac valve closed
12/31/2011	9:53:47 PM	Bubbler valve closed
12/31/2011	9:53:47 PM	Bypass valve opened
12/31/2011	9:53:47 PM	Helium MFC set to  0.000000
12/31/2011	9:53:47 PM	H2 MFC set to  0.000000
12/31/2011	9:53:47 PM	BCl3 MFC set to  0.000000
12/31/2011	9:53:47 PM	PHl3 MFC set to  0.000000
12/31/2011	9:53:47 PM	SiCl4 MFC set to  0.000000
12/31/2011	9:53:47 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	9:53:47 PM	Tube furnace set to 0
12/31/2011	9:54:47 PM	Helium valve closed
12/31/2011	9:54:47 PM	H2 valve closed
12/31/2011	9:54:47 PM	BCl3 valve closed
12/31/2011	9:54:47 PM	PH3 valve closed
12/31/2011	9:54:47 PM	SiCl4 pre valve closed
12/31/2011	9:54:47 PM	SiCl4 post valve closed
12/31/2011	9:54:47 PM	Bypass valve closed
12/31/2011	9:54:47 PM	Bubbler valve closed
12/31/2011	9:54:47 PM	Main Vac valve opened
12/31/2011	9:54:47 PM	Helium MFC set to  0.000000
12/31/2011	9:54:47 PM	H2 MFC set to  0.000000
12/31/2011	9:54:47 PM	BCl3 MFC set to  0.000000
12/31/2011	9:54:47 PM	PHl3 MFC set to  0.000000
12/31/2011	9:54:47 PM	SiCl4 MFC set to  0.000000
12/31/2011	9:54:47 PM	Bypass solenoid MFC set to  0.000000
12/31/2011	9:54:48 PM	Tube furnace set to 0
12/31/2011	9:54:49 PM	Run finished at 9:54 PM
12/31/2011	9:54:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
